5/29/2010	9:49:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/29/2010	9:49:17 AM	Recipe started at 9:49 AM
5/29/2010	9:49:17 AM	H2 valve closed
5/29/2010	9:49:17 AM	BCl3 valve closed
5/29/2010	9:49:17 AM	PH3 valve closed
5/29/2010	9:49:17 AM	SiCl4 pre valve closed
5/29/2010	9:49:17 AM	SiCl4 post valve closed
5/29/2010	9:49:17 AM	Main Vac valve closed
5/29/2010	9:49:17 AM	Bypass valve closed
5/29/2010	9:49:17 AM	Bubbler valve closed
5/29/2010	9:49:17 AM	Helium valve opened
5/29/2010	9:49:17 AM	Helium MFC set to  500.000000
5/29/2010	9:49:17 AM	H2 MFC set to  0.000000
5/29/2010	9:49:17 AM	BCl3 MFC set to  0.000000
5/29/2010	9:49:17 AM	PHl3 MFC set to  0.000000
5/29/2010	9:49:17 AM	SiCl4 MFC set to  0.000000
5/29/2010	9:49:17 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:49:17 AM	Tube furnace set to 0
5/29/2010	9:50:37 AM	Helium valve closed
5/29/2010	9:50:37 AM	H2 valve closed
5/29/2010	9:50:37 AM	BCl3 valve closed
5/29/2010	9:50:37 AM	PH3 valve closed
5/29/2010	9:50:37 AM	SiCl4 pre valve closed
5/29/2010	9:50:37 AM	SiCl4 post valve closed
5/29/2010	9:50:37 AM	Main Vac valve closed
5/29/2010	9:50:37 AM	Bypass valve closed
5/29/2010	9:50:37 AM	Bubbler valve closed
5/29/2010	9:50:37 AM	Helium MFC set to  0.000000
5/29/2010	9:50:37 AM	H2 MFC set to  0.000000
5/29/2010	9:50:37 AM	BCl3 MFC set to  0.000000
5/29/2010	9:50:37 AM	PHl3 MFC set to  0.000000
5/29/2010	9:50:37 AM	SiCl4 MFC set to  0.000000
5/29/2010	9:50:37 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:50:37 AM	Tube furnace set to 0
5/29/2010	9:50:37 AM	Run finished at 9:50 AM
5/29/2010	9:50:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/29/2010	9:55:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2010	9:55:49 AM	Recipe started at 9:55 AM
5/29/2010	9:55:49 AM	Helium valve closed
5/29/2010	9:55:49 AM	H2 valve closed
5/29/2010	9:55:49 AM	BCl3 valve closed
5/29/2010	9:55:49 AM	PH3 valve closed
5/29/2010	9:55:49 AM	SiCl4 pre valve closed
5/29/2010	9:55:49 AM	SiCl4 post valve closed
5/29/2010	9:55:49 AM	Main Vac valve closed
5/29/2010	9:55:49 AM	Bubbler valve closed
5/29/2010	9:55:49 AM	Bypass valve opened
5/29/2010	9:55:49 AM	Helium MFC set to  0.000000
5/29/2010	9:55:49 AM	H2 MFC set to  0.000000
5/29/2010	9:55:49 AM	BCl3 MFC set to  0.000000
5/29/2010	9:55:49 AM	PHl3 MFC set to  0.000000
5/29/2010	9:55:49 AM	SiCl4 MFC set to  0.000000
5/29/2010	9:55:49 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:55:50 AM	Tube furnace set to 0
5/29/2010	9:56:36 AM	Helium valve closed
5/29/2010	9:56:36 AM	H2 valve closed
5/29/2010	9:56:36 AM	BCl3 valve closed
5/29/2010	9:56:36 AM	PH3 valve closed
5/29/2010	9:56:36 AM	SiCl4 pre valve closed
5/29/2010	9:56:36 AM	SiCl4 post valve closed
5/29/2010	9:56:36 AM	Bubbler valve closed
5/29/2010	9:56:36 AM	Main Vac valve opened
5/29/2010	9:56:36 AM	Bypass valve opened
5/29/2010	9:56:36 AM	Helium MFC set to  0.000000
5/29/2010	9:56:36 AM	H2 MFC set to  0.000000
5/29/2010	9:56:36 AM	BCl3 MFC set to  0.000000
5/29/2010	9:56:36 AM	PHl3 MFC set to  0.000000
5/29/2010	9:56:36 AM	SiCl4 MFC set to  0.000000
5/29/2010	9:56:36 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:56:36 AM	Tube furnace set to 0
5/29/2010	9:56:37 AM	Run finished at 9:56 AM
5/29/2010	9:56:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2010	9:57:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	9:57:54 AM	Recipe started at 9:57 AM
5/29/2010	9:57:54 AM	H2 valve closed
5/29/2010	9:57:54 AM	BCl3 valve closed
5/29/2010	9:57:54 AM	PH3 valve closed
5/29/2010	9:57:54 AM	SiCl4 pre valve closed
5/29/2010	9:57:54 AM	SiCl4 post valve closed
5/29/2010	9:57:54 AM	Main Vac valve closed
5/29/2010	9:57:54 AM	Bypass valve closed
5/29/2010	9:57:54 AM	Bubbler valve closed
5/29/2010	9:57:54 AM	Helium valve opened
5/29/2010	9:57:54 AM	Helium MFC set to  500.000000
5/29/2010	9:57:54 AM	H2 MFC set to  0.000000
5/29/2010	9:57:54 AM	BCl3 MFC set to  0.000000
5/29/2010	9:57:54 AM	PHl3 MFC set to  0.000000
5/29/2010	9:57:54 AM	SiCl4 MFC set to  0.000000
5/29/2010	9:57:54 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:57:54 AM	Tube furnace set to 0
5/29/2010	9:59:16 AM	Helium valve closed
5/29/2010	9:59:16 AM	H2 valve closed
5/29/2010	9:59:16 AM	BCl3 valve closed
5/29/2010	9:59:16 AM	PH3 valve closed
5/29/2010	9:59:16 AM	SiCl4 pre valve closed
5/29/2010	9:59:16 AM	SiCl4 post valve closed
5/29/2010	9:59:16 AM	Main Vac valve closed
5/29/2010	9:59:16 AM	Bypass valve closed
5/29/2010	9:59:16 AM	Bubbler valve closed
5/29/2010	9:59:16 AM	Helium MFC set to  0.000000
5/29/2010	9:59:16 AM	H2 MFC set to  0.000000
5/29/2010	9:59:16 AM	BCl3 MFC set to  0.000000
5/29/2010	9:59:16 AM	PHl3 MFC set to  0.000000
5/29/2010	9:59:16 AM	SiCl4 MFC set to  0.000000
5/29/2010	9:59:16 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:59:16 AM	Tube furnace set to 0
5/29/2010	9:59:31 AM	Helium valve closed
5/29/2010	9:59:31 AM	H2 valve closed
5/29/2010	9:59:31 AM	BCl3 valve closed
5/29/2010	9:59:31 AM	PH3 valve closed
5/29/2010	9:59:31 AM	SiCl4 pre valve closed
5/29/2010	9:59:31 AM	SiCl4 post valve closed
5/29/2010	9:59:31 AM	Main Vac valve closed
5/29/2010	9:59:31 AM	Bubbler valve closed
5/29/2010	9:59:31 AM	Bypass valve opened
5/29/2010	9:59:31 AM	Helium MFC set to  0.000000
5/29/2010	9:59:31 AM	H2 MFC set to  0.000000
5/29/2010	9:59:31 AM	BCl3 MFC set to  0.000000
5/29/2010	9:59:31 AM	PHl3 MFC set to  0.000000
5/29/2010	9:59:31 AM	SiCl4 MFC set to  0.000000
5/29/2010	9:59:31 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:59:31 AM	Tube furnace set to 0
5/29/2010	10:00:05 AM	Helium valve closed
5/29/2010	10:00:05 AM	H2 valve closed
5/29/2010	10:00:05 AM	BCl3 valve closed
5/29/2010	10:00:05 AM	PH3 valve closed
5/29/2010	10:00:05 AM	SiCl4 pre valve closed
5/29/2010	10:00:05 AM	SiCl4 post valve closed
5/29/2010	10:00:05 AM	Bubbler valve closed
5/29/2010	10:00:05 AM	Main Vac valve opened
5/29/2010	10:00:05 AM	Bypass valve opened
5/29/2010	10:00:05 AM	Helium MFC set to  0.000000
5/29/2010	10:00:05 AM	H2 MFC set to  0.000000
5/29/2010	10:00:05 AM	BCl3 MFC set to  0.000000
5/29/2010	10:00:05 AM	PHl3 MFC set to  0.000000
5/29/2010	10:00:05 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:00:05 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:00:05 AM	Tube furnace set to 0
5/29/2010	10:05:05 AM	H2 valve closed
5/29/2010	10:05:05 AM	BCl3 valve closed
5/29/2010	10:05:05 AM	PH3 valve closed
5/29/2010	10:05:05 AM	SiCl4 pre valve closed
5/29/2010	10:05:05 AM	SiCl4 post valve closed
5/29/2010	10:05:05 AM	Main Vac valve closed
5/29/2010	10:05:05 AM	Bypass valve closed
5/29/2010	10:05:05 AM	Bubbler valve closed
5/29/2010	10:05:05 AM	Helium valve opened
5/29/2010	10:05:05 AM	Helium MFC set to  500.000000
5/29/2010	10:05:05 AM	H2 MFC set to  0.000000
5/29/2010	10:05:05 AM	BCl3 MFC set to  0.000000
5/29/2010	10:05:05 AM	PHl3 MFC set to  0.000000
5/29/2010	10:05:05 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:05:05 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:05:05 AM	Tube furnace set to 0
5/29/2010	10:06:27 AM	Helium valve closed
5/29/2010	10:06:27 AM	H2 valve closed
5/29/2010	10:06:27 AM	BCl3 valve closed
5/29/2010	10:06:27 AM	PH3 valve closed
5/29/2010	10:06:27 AM	SiCl4 pre valve closed
5/29/2010	10:06:27 AM	SiCl4 post valve closed
5/29/2010	10:06:27 AM	Main Vac valve closed
5/29/2010	10:06:27 AM	Bypass valve closed
5/29/2010	10:06:27 AM	Bubbler valve closed
5/29/2010	10:06:27 AM	Helium MFC set to  0.000000
5/29/2010	10:06:27 AM	H2 MFC set to  0.000000
5/29/2010	10:06:27 AM	BCl3 MFC set to  0.000000
5/29/2010	10:06:27 AM	PHl3 MFC set to  0.000000
5/29/2010	10:06:27 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:06:27 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:06:27 AM	Tube furnace set to 0
5/29/2010	10:06:42 AM	Helium valve closed
5/29/2010	10:06:42 AM	H2 valve closed
5/29/2010	10:06:42 AM	BCl3 valve closed
5/29/2010	10:06:42 AM	PH3 valve closed
5/29/2010	10:06:42 AM	SiCl4 pre valve closed
5/29/2010	10:06:42 AM	SiCl4 post valve closed
5/29/2010	10:06:42 AM	Main Vac valve closed
5/29/2010	10:06:42 AM	Bubbler valve closed
5/29/2010	10:06:42 AM	Bypass valve opened
5/29/2010	10:06:42 AM	Helium MFC set to  0.000000
5/29/2010	10:06:42 AM	H2 MFC set to  0.000000
5/29/2010	10:06:42 AM	BCl3 MFC set to  0.000000
5/29/2010	10:06:42 AM	PHl3 MFC set to  0.000000
5/29/2010	10:06:42 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:06:42 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:06:43 AM	Tube furnace set to 0
5/29/2010	10:07:16 AM	Helium valve closed
5/29/2010	10:07:16 AM	H2 valve closed
5/29/2010	10:07:16 AM	BCl3 valve closed
5/29/2010	10:07:16 AM	PH3 valve closed
5/29/2010	10:07:16 AM	SiCl4 pre valve closed
5/29/2010	10:07:16 AM	SiCl4 post valve closed
5/29/2010	10:07:16 AM	Bubbler valve closed
5/29/2010	10:07:16 AM	Main Vac valve opened
5/29/2010	10:07:16 AM	Bypass valve opened
5/29/2010	10:07:16 AM	Helium MFC set to  0.000000
5/29/2010	10:07:16 AM	H2 MFC set to  0.000000
5/29/2010	10:07:16 AM	BCl3 MFC set to  0.000000
5/29/2010	10:07:16 AM	PHl3 MFC set to  0.000000
5/29/2010	10:07:16 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:07:16 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:07:16 AM	Tube furnace set to 0
5/29/2010	10:12:16 AM	H2 valve closed
5/29/2010	10:12:16 AM	BCl3 valve closed
5/29/2010	10:12:16 AM	PH3 valve closed
5/29/2010	10:12:16 AM	SiCl4 pre valve closed
5/29/2010	10:12:16 AM	SiCl4 post valve closed
5/29/2010	10:12:16 AM	Main Vac valve closed
5/29/2010	10:12:16 AM	Bypass valve closed
5/29/2010	10:12:16 AM	Bubbler valve closed
5/29/2010	10:12:16 AM	Helium valve opened
5/29/2010	10:12:16 AM	Helium MFC set to  500.000000
5/29/2010	10:12:16 AM	H2 MFC set to  0.000000
5/29/2010	10:12:16 AM	BCl3 MFC set to  0.000000
5/29/2010	10:12:16 AM	PHl3 MFC set to  0.000000
5/29/2010	10:12:16 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:12:16 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:12:16 AM	Tube furnace set to 0
5/29/2010	10:13:39 AM	Helium valve closed
5/29/2010	10:13:39 AM	H2 valve closed
5/29/2010	10:13:39 AM	BCl3 valve closed
5/29/2010	10:13:39 AM	PH3 valve closed
5/29/2010	10:13:39 AM	SiCl4 pre valve closed
5/29/2010	10:13:39 AM	SiCl4 post valve closed
5/29/2010	10:13:39 AM	Main Vac valve closed
5/29/2010	10:13:39 AM	Bypass valve closed
5/29/2010	10:13:39 AM	Bubbler valve closed
5/29/2010	10:13:39 AM	Helium MFC set to  0.000000
5/29/2010	10:13:39 AM	H2 MFC set to  0.000000
5/29/2010	10:13:39 AM	BCl3 MFC set to  0.000000
5/29/2010	10:13:39 AM	PHl3 MFC set to  0.000000
5/29/2010	10:13:39 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:13:39 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:13:39 AM	Tube furnace set to 0
5/29/2010	10:13:54 AM	Helium valve closed
5/29/2010	10:13:54 AM	H2 valve closed
5/29/2010	10:13:54 AM	BCl3 valve closed
5/29/2010	10:13:54 AM	PH3 valve closed
5/29/2010	10:13:54 AM	SiCl4 pre valve closed
5/29/2010	10:13:54 AM	SiCl4 post valve closed
5/29/2010	10:13:54 AM	Main Vac valve closed
5/29/2010	10:13:54 AM	Bubbler valve closed
5/29/2010	10:13:54 AM	Bypass valve opened
5/29/2010	10:13:54 AM	Helium MFC set to  0.000000
5/29/2010	10:13:54 AM	H2 MFC set to  0.000000
5/29/2010	10:13:54 AM	BCl3 MFC set to  0.000000
5/29/2010	10:13:54 AM	PHl3 MFC set to  0.000000
5/29/2010	10:13:54 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:13:54 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:13:54 AM	Tube furnace set to 0
5/29/2010	10:14:27 AM	Helium valve closed
5/29/2010	10:14:27 AM	H2 valve closed
5/29/2010	10:14:27 AM	BCl3 valve closed
5/29/2010	10:14:27 AM	PH3 valve closed
5/29/2010	10:14:27 AM	SiCl4 pre valve closed
5/29/2010	10:14:27 AM	SiCl4 post valve closed
5/29/2010	10:14:27 AM	Bubbler valve closed
5/29/2010	10:14:27 AM	Main Vac valve opened
5/29/2010	10:14:27 AM	Bypass valve opened
5/29/2010	10:14:27 AM	Helium MFC set to  0.000000
5/29/2010	10:14:27 AM	H2 MFC set to  0.000000
5/29/2010	10:14:27 AM	BCl3 MFC set to  0.000000
5/29/2010	10:14:27 AM	PHl3 MFC set to  0.000000
5/29/2010	10:14:27 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:14:27 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:14:28 AM	Tube furnace set to 0
5/29/2010	10:19:28 AM	Helium valve closed
5/29/2010	10:19:28 AM	H2 valve closed
5/29/2010	10:19:28 AM	BCl3 valve closed
5/29/2010	10:19:28 AM	PH3 valve closed
5/29/2010	10:19:28 AM	SiCl4 pre valve closed
5/29/2010	10:19:28 AM	SiCl4 post valve closed
5/29/2010	10:19:28 AM	Bubbler valve closed
5/29/2010	10:19:28 AM	Main Vac valve opened
5/29/2010	10:19:28 AM	Bypass valve opened
5/29/2010	10:19:28 AM	Helium MFC set to  0.000000
5/29/2010	10:19:28 AM	H2 MFC set to  0.000000
5/29/2010	10:19:28 AM	BCl3 MFC set to  0.000000
5/29/2010	10:19:28 AM	PHl3 MFC set to  0.000000
5/29/2010	10:19:28 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:19:28 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:19:28 AM	Tube furnace set to 0
5/29/2010	10:19:29 AM	Run finished at 10:19 AM
5/29/2010	10:19:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	10:21:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/29/2010	10:21:03 AM	Recipe started at 10:21 AM
5/29/2010	10:21:04 AM	Helium valve closed
5/29/2010	10:21:04 AM	H2 valve closed
5/29/2010	10:21:04 AM	BCl3 valve closed
5/29/2010	10:21:04 AM	PH3 valve closed
5/29/2010	10:21:04 AM	SiCl4 pre valve closed
5/29/2010	10:21:04 AM	SiCl4 post valve closed
5/29/2010	10:21:04 AM	Main Vac valve closed
5/29/2010	10:21:04 AM	Bypass valve closed
5/29/2010	10:21:04 AM	Bubbler valve closed
5/29/2010	10:21:04 AM	Helium MFC set to  0.000000
5/29/2010	10:21:04 AM	H2 MFC set to  0.000000
5/29/2010	10:21:04 AM	BCl3 MFC set to  0.000000
5/29/2010	10:21:04 AM	PHl3 MFC set to  0.000000
5/29/2010	10:21:04 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:21:04 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:21:04 AM	Tube furnace set to 0
5/29/2010	10:21:04 AM	Run finished at 10:21 AM
5/29/2010	10:21:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/29/2010	10:21:26 AM	Tube furnace set to 400
5/29/2010	10:21:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	10:21:38 AM	Recipe started at 10:21 AM
5/29/2010	10:21:38 AM	H2 valve closed
5/29/2010	10:21:38 AM	BCl3 valve closed
5/29/2010	10:21:38 AM	PH3 valve closed
5/29/2010	10:21:38 AM	SiCl4 pre valve closed
5/29/2010	10:21:38 AM	SiCl4 post valve closed
5/29/2010	10:21:38 AM	Main Vac valve closed
5/29/2010	10:21:38 AM	Bypass valve closed
5/29/2010	10:21:38 AM	Bubbler valve closed
5/29/2010	10:21:38 AM	Helium valve opened
5/29/2010	10:21:38 AM	Helium MFC set to  500.000000
5/29/2010	10:21:38 AM	H2 MFC set to  0.000000
5/29/2010	10:21:38 AM	BCl3 MFC set to  0.000000
5/29/2010	10:21:38 AM	PHl3 MFC set to  0.000000
5/29/2010	10:21:38 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:21:38 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:21:39 AM	Tube furnace set to 0
5/29/2010	10:23:00 AM	Helium valve closed
5/29/2010	10:23:00 AM	H2 valve closed
5/29/2010	10:23:00 AM	BCl3 valve closed
5/29/2010	10:23:00 AM	PH3 valve closed
5/29/2010	10:23:00 AM	SiCl4 pre valve closed
5/29/2010	10:23:00 AM	SiCl4 post valve closed
5/29/2010	10:23:00 AM	Main Vac valve closed
5/29/2010	10:23:00 AM	Bypass valve closed
5/29/2010	10:23:00 AM	Bubbler valve closed
5/29/2010	10:23:00 AM	Helium MFC set to  0.000000
5/29/2010	10:23:00 AM	H2 MFC set to  0.000000
5/29/2010	10:23:00 AM	BCl3 MFC set to  0.000000
5/29/2010	10:23:00 AM	PHl3 MFC set to  0.000000
5/29/2010	10:23:00 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:23:00 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:23:00 AM	Tube furnace set to 0
5/29/2010	10:23:15 AM	Helium valve closed
5/29/2010	10:23:15 AM	H2 valve closed
5/29/2010	10:23:15 AM	BCl3 valve closed
5/29/2010	10:23:15 AM	PH3 valve closed
5/29/2010	10:23:15 AM	SiCl4 pre valve closed
5/29/2010	10:23:15 AM	SiCl4 post valve closed
5/29/2010	10:23:15 AM	Main Vac valve closed
5/29/2010	10:23:15 AM	Bubbler valve closed
5/29/2010	10:23:15 AM	Bypass valve opened
5/29/2010	10:23:15 AM	Helium MFC set to  0.000000
5/29/2010	10:23:15 AM	H2 MFC set to  0.000000
5/29/2010	10:23:15 AM	BCl3 MFC set to  0.000000
5/29/2010	10:23:15 AM	PHl3 MFC set to  0.000000
5/29/2010	10:23:15 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:23:15 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:23:15 AM	Tube furnace set to 0
5/29/2010	10:23:48 AM	Helium valve closed
5/29/2010	10:23:48 AM	H2 valve closed
5/29/2010	10:23:48 AM	BCl3 valve closed
5/29/2010	10:23:48 AM	PH3 valve closed
5/29/2010	10:23:48 AM	SiCl4 pre valve closed
5/29/2010	10:23:48 AM	SiCl4 post valve closed
5/29/2010	10:23:48 AM	Bubbler valve closed
5/29/2010	10:23:48 AM	Main Vac valve opened
5/29/2010	10:23:48 AM	Bypass valve opened
5/29/2010	10:23:48 AM	Helium MFC set to  0.000000
5/29/2010	10:23:48 AM	H2 MFC set to  0.000000
5/29/2010	10:23:48 AM	BCl3 MFC set to  0.000000
5/29/2010	10:23:48 AM	PHl3 MFC set to  0.000000
5/29/2010	10:23:48 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:23:48 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:23:48 AM	Tube furnace set to 0
5/29/2010	10:28:48 AM	H2 valve closed
5/29/2010	10:28:48 AM	BCl3 valve closed
5/29/2010	10:28:48 AM	PH3 valve closed
5/29/2010	10:28:48 AM	SiCl4 pre valve closed
5/29/2010	10:28:48 AM	SiCl4 post valve closed
5/29/2010	10:28:48 AM	Main Vac valve closed
5/29/2010	10:28:48 AM	Bypass valve closed
5/29/2010	10:28:48 AM	Bubbler valve closed
5/29/2010	10:28:48 AM	Helium valve opened
5/29/2010	10:28:48 AM	Helium MFC set to  500.000000
5/29/2010	10:28:48 AM	H2 MFC set to  0.000000
5/29/2010	10:28:48 AM	BCl3 MFC set to  0.000000
5/29/2010	10:28:48 AM	PHl3 MFC set to  0.000000
5/29/2010	10:28:48 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:28:48 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:28:48 AM	Tube furnace set to 0
5/29/2010	10:30:09 AM	Helium valve closed
5/29/2010	10:30:09 AM	H2 valve closed
5/29/2010	10:30:09 AM	BCl3 valve closed
5/29/2010	10:30:09 AM	PH3 valve closed
5/29/2010	10:30:09 AM	SiCl4 pre valve closed
5/29/2010	10:30:09 AM	SiCl4 post valve closed
5/29/2010	10:30:09 AM	Main Vac valve closed
5/29/2010	10:30:09 AM	Bypass valve closed
5/29/2010	10:30:09 AM	Bubbler valve closed
5/29/2010	10:30:09 AM	Helium MFC set to  0.000000
5/29/2010	10:30:09 AM	H2 MFC set to  0.000000
5/29/2010	10:30:09 AM	BCl3 MFC set to  0.000000
5/29/2010	10:30:09 AM	PHl3 MFC set to  0.000000
5/29/2010	10:30:09 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:30:09 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:30:09 AM	Tube furnace set to 0
5/29/2010	10:30:24 AM	Helium valve closed
5/29/2010	10:30:24 AM	H2 valve closed
5/29/2010	10:30:24 AM	BCl3 valve closed
5/29/2010	10:30:24 AM	PH3 valve closed
5/29/2010	10:30:24 AM	SiCl4 pre valve closed
5/29/2010	10:30:24 AM	SiCl4 post valve closed
5/29/2010	10:30:24 AM	Main Vac valve closed
5/29/2010	10:30:24 AM	Bubbler valve closed
5/29/2010	10:30:24 AM	Bypass valve opened
5/29/2010	10:30:24 AM	Helium MFC set to  0.000000
5/29/2010	10:30:24 AM	H2 MFC set to  0.000000
5/29/2010	10:30:24 AM	BCl3 MFC set to  0.000000
5/29/2010	10:30:24 AM	PHl3 MFC set to  0.000000
5/29/2010	10:30:24 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:30:24 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:30:24 AM	Tube furnace set to 0
5/29/2010	10:30:57 AM	Helium valve closed
5/29/2010	10:30:57 AM	H2 valve closed
5/29/2010	10:30:57 AM	BCl3 valve closed
5/29/2010	10:30:57 AM	PH3 valve closed
5/29/2010	10:30:57 AM	SiCl4 pre valve closed
5/29/2010	10:30:57 AM	SiCl4 post valve closed
5/29/2010	10:30:57 AM	Bubbler valve closed
5/29/2010	10:30:57 AM	Main Vac valve opened
5/29/2010	10:30:57 AM	Bypass valve opened
5/29/2010	10:30:57 AM	Helium MFC set to  0.000000
5/29/2010	10:30:57 AM	H2 MFC set to  0.000000
5/29/2010	10:30:57 AM	BCl3 MFC set to  0.000000
5/29/2010	10:30:57 AM	PHl3 MFC set to  0.000000
5/29/2010	10:30:57 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:30:57 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:30:57 AM	Tube furnace set to 0
5/29/2010	10:35:57 AM	H2 valve closed
5/29/2010	10:35:57 AM	BCl3 valve closed
5/29/2010	10:35:57 AM	PH3 valve closed
5/29/2010	10:35:57 AM	SiCl4 pre valve closed
5/29/2010	10:35:57 AM	SiCl4 post valve closed
5/29/2010	10:35:57 AM	Main Vac valve closed
5/29/2010	10:35:57 AM	Bypass valve closed
5/29/2010	10:35:57 AM	Bubbler valve closed
5/29/2010	10:35:57 AM	Helium valve opened
5/29/2010	10:35:57 AM	Helium MFC set to  500.000000
5/29/2010	10:35:57 AM	H2 MFC set to  0.000000
5/29/2010	10:35:57 AM	BCl3 MFC set to  0.000000
5/29/2010	10:35:57 AM	PHl3 MFC set to  0.000000
5/29/2010	10:35:57 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:35:57 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:35:58 AM	Tube furnace set to 0
5/29/2010	10:37:18 AM	Helium valve closed
5/29/2010	10:37:18 AM	H2 valve closed
5/29/2010	10:37:18 AM	BCl3 valve closed
5/29/2010	10:37:18 AM	PH3 valve closed
5/29/2010	10:37:18 AM	SiCl4 pre valve closed
5/29/2010	10:37:18 AM	SiCl4 post valve closed
5/29/2010	10:37:18 AM	Main Vac valve closed
5/29/2010	10:37:18 AM	Bypass valve closed
5/29/2010	10:37:18 AM	Bubbler valve closed
5/29/2010	10:37:18 AM	Helium MFC set to  0.000000
5/29/2010	10:37:18 AM	H2 MFC set to  0.000000
5/29/2010	10:37:18 AM	BCl3 MFC set to  0.000000
5/29/2010	10:37:18 AM	PHl3 MFC set to  0.000000
5/29/2010	10:37:18 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:37:18 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:37:18 AM	Tube furnace set to 0
5/29/2010	10:37:33 AM	Helium valve closed
5/29/2010	10:37:33 AM	H2 valve closed
5/29/2010	10:37:33 AM	BCl3 valve closed
5/29/2010	10:37:33 AM	PH3 valve closed
5/29/2010	10:37:34 AM	SiCl4 pre valve closed
5/29/2010	10:37:34 AM	SiCl4 post valve closed
5/29/2010	10:37:34 AM	Main Vac valve closed
5/29/2010	10:37:34 AM	Bubbler valve closed
5/29/2010	10:37:34 AM	Bypass valve opened
5/29/2010	10:37:34 AM	Helium MFC set to  0.000000
5/29/2010	10:37:34 AM	H2 MFC set to  0.000000
5/29/2010	10:37:34 AM	BCl3 MFC set to  0.000000
5/29/2010	10:37:34 AM	PHl3 MFC set to  0.000000
5/29/2010	10:37:34 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:37:34 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:37:34 AM	Tube furnace set to 0
5/29/2010	10:38:06 AM	Helium valve closed
5/29/2010	10:38:06 AM	H2 valve closed
5/29/2010	10:38:06 AM	BCl3 valve closed
5/29/2010	10:38:06 AM	PH3 valve closed
5/29/2010	10:38:06 AM	SiCl4 pre valve closed
5/29/2010	10:38:06 AM	SiCl4 post valve closed
5/29/2010	10:38:06 AM	Bubbler valve closed
5/29/2010	10:38:06 AM	Main Vac valve opened
5/29/2010	10:38:06 AM	Bypass valve opened
5/29/2010	10:38:06 AM	Helium MFC set to  0.000000
5/29/2010	10:38:06 AM	H2 MFC set to  0.000000
5/29/2010	10:38:06 AM	BCl3 MFC set to  0.000000
5/29/2010	10:38:06 AM	PHl3 MFC set to  0.000000
5/29/2010	10:38:06 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:38:06 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:38:07 AM	Tube furnace set to 0
5/29/2010	10:41:33 AM	Run aborted at 10:41 AM
5/29/2010	10:41:33 AM	Helium valve closed
5/29/2010	10:41:33 AM	H2 valve closed
5/29/2010	10:41:33 AM	BCl3 valve closed
5/29/2010	10:41:33 AM	PH3 valve closed
5/29/2010	10:41:33 AM	SiCl4 pre valve closed
5/29/2010	10:41:33 AM	SiCl4 post valve closed
5/29/2010	10:41:33 AM	Bypass valve closed
5/29/2010	10:41:33 AM	Main Vac valve closed
5/29/2010	10:41:33 AM	Bubbler valve closed
5/29/2010	10:41:33 AM	Helium MFC set to  0.000000
5/29/2010	10:41:33 AM	H2 MFC set to  0.000000
5/29/2010	10:41:33 AM	BCl3 MFC set to  0.000000
5/29/2010	10:41:33 AM	PHl3 MFC set to  0.000000
5/29/2010	10:41:33 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:41:34 AM	Tube furnace set to 0
5/29/2010	10:41:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	10:41:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2010	10:41:36 AM	Recipe started at 10:41 AM
5/29/2010	10:41:36 AM	Helium valve closed
5/29/2010	10:41:36 AM	H2 valve closed
5/29/2010	10:41:36 AM	BCl3 valve closed
5/29/2010	10:41:36 AM	PH3 valve closed
5/29/2010	10:41:36 AM	SiCl4 pre valve closed
5/29/2010	10:41:36 AM	SiCl4 post valve closed
5/29/2010	10:41:36 AM	Main Vac valve closed
5/29/2010	10:41:36 AM	Bubbler valve closed
5/29/2010	10:41:36 AM	Bypass valve opened
5/29/2010	10:41:36 AM	Helium MFC set to  0.000000
5/29/2010	10:41:36 AM	H2 MFC set to  0.000000
5/29/2010	10:41:36 AM	BCl3 MFC set to  0.000000
5/29/2010	10:41:36 AM	PHl3 MFC set to  0.000000
5/29/2010	10:41:36 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:41:36 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:41:36 AM	Tube furnace set to 0
5/29/2010	10:41:37 AM	Helium valve closed
5/29/2010	10:41:37 AM	H2 valve closed
5/29/2010	10:41:37 AM	BCl3 valve closed
5/29/2010	10:41:37 AM	PH3 valve closed
5/29/2010	10:41:37 AM	SiCl4 pre valve closed
5/29/2010	10:41:37 AM	SiCl4 post valve closed
5/29/2010	10:41:37 AM	Bubbler valve closed
5/29/2010	10:41:37 AM	Main Vac valve opened
5/29/2010	10:41:37 AM	Bypass valve opened
5/29/2010	10:41:37 AM	Helium MFC set to  0.000000
5/29/2010	10:41:37 AM	H2 MFC set to  0.000000
5/29/2010	10:41:37 AM	BCl3 MFC set to  0.000000
5/29/2010	10:41:37 AM	PHl3 MFC set to  0.000000
5/29/2010	10:41:37 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:41:37 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:41:37 AM	Tube furnace set to 0
5/29/2010	10:41:37 AM	Run finished at 10:41 AM
5/29/2010	10:41:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2010	10:41:45 AM	Tube furnace set to 200
5/29/2010	10:49:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	10:49:47 AM	Recipe started at 10:49 AM
5/29/2010	10:49:47 AM	H2 valve closed
5/29/2010	10:49:47 AM	BCl3 valve closed
5/29/2010	10:49:47 AM	PH3 valve closed
5/29/2010	10:49:47 AM	SiCl4 pre valve closed
5/29/2010	10:49:47 AM	SiCl4 post valve closed
5/29/2010	10:49:47 AM	Main Vac valve closed
5/29/2010	10:49:47 AM	Bypass valve closed
5/29/2010	10:49:47 AM	Bubbler valve closed
5/29/2010	10:49:47 AM	Helium valve opened
5/29/2010	10:49:47 AM	Helium MFC set to  500.000000
5/29/2010	10:49:47 AM	H2 MFC set to  0.000000
5/29/2010	10:49:47 AM	BCl3 MFC set to  0.000000
5/29/2010	10:49:47 AM	PHl3 MFC set to  0.000000
5/29/2010	10:49:47 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:49:47 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:49:47 AM	Tube furnace set to 0
5/29/2010	10:51:04 AM	Helium valve closed
5/29/2010	10:51:04 AM	H2 valve closed
5/29/2010	10:51:04 AM	BCl3 valve closed
5/29/2010	10:51:04 AM	PH3 valve closed
5/29/2010	10:51:04 AM	SiCl4 pre valve closed
5/29/2010	10:51:04 AM	SiCl4 post valve closed
5/29/2010	10:51:04 AM	Main Vac valve closed
5/29/2010	10:51:04 AM	Bypass valve closed
5/29/2010	10:51:04 AM	Bubbler valve closed
5/29/2010	10:51:04 AM	Helium MFC set to  0.000000
5/29/2010	10:51:04 AM	H2 MFC set to  0.000000
5/29/2010	10:51:04 AM	BCl3 MFC set to  0.000000
5/29/2010	10:51:04 AM	PHl3 MFC set to  0.000000
5/29/2010	10:51:04 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:51:04 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:51:04 AM	Tube furnace set to 0
5/29/2010	10:51:19 AM	Helium valve closed
5/29/2010	10:51:19 AM	H2 valve closed
5/29/2010	10:51:19 AM	BCl3 valve closed
5/29/2010	10:51:19 AM	PH3 valve closed
5/29/2010	10:51:19 AM	SiCl4 pre valve closed
5/29/2010	10:51:19 AM	SiCl4 post valve closed
5/29/2010	10:51:19 AM	Main Vac valve closed
5/29/2010	10:51:19 AM	Bubbler valve closed
5/29/2010	10:51:19 AM	Bypass valve opened
5/29/2010	10:51:19 AM	Helium MFC set to  0.000000
5/29/2010	10:51:19 AM	H2 MFC set to  0.000000
5/29/2010	10:51:19 AM	BCl3 MFC set to  0.000000
5/29/2010	10:51:19 AM	PHl3 MFC set to  0.000000
5/29/2010	10:51:19 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:51:19 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:51:19 AM	Tube furnace set to 0
5/29/2010	10:51:50 AM	Helium valve closed
5/29/2010	10:51:50 AM	H2 valve closed
5/29/2010	10:51:50 AM	BCl3 valve closed
5/29/2010	10:51:50 AM	PH3 valve closed
5/29/2010	10:51:50 AM	SiCl4 pre valve closed
5/29/2010	10:51:50 AM	SiCl4 post valve closed
5/29/2010	10:51:50 AM	Bubbler valve closed
5/29/2010	10:51:50 AM	Main Vac valve opened
5/29/2010	10:51:50 AM	Bypass valve opened
5/29/2010	10:51:50 AM	Helium MFC set to  0.000000
5/29/2010	10:51:50 AM	H2 MFC set to  0.000000
5/29/2010	10:51:50 AM	BCl3 MFC set to  0.000000
5/29/2010	10:51:50 AM	PHl3 MFC set to  0.000000
5/29/2010	10:51:50 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:51:50 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:51:50 AM	Tube furnace set to 0
5/29/2010	10:56:50 AM	H2 valve closed
5/29/2010	10:56:50 AM	BCl3 valve closed
5/29/2010	10:56:50 AM	PH3 valve closed
5/29/2010	10:56:50 AM	SiCl4 pre valve closed
5/29/2010	10:56:50 AM	SiCl4 post valve closed
5/29/2010	10:56:50 AM	Main Vac valve closed
5/29/2010	10:56:50 AM	Bypass valve closed
5/29/2010	10:56:50 AM	Bubbler valve closed
5/29/2010	10:56:50 AM	Helium valve opened
5/29/2010	10:56:50 AM	Helium MFC set to  500.000000
5/29/2010	10:56:50 AM	H2 MFC set to  0.000000
5/29/2010	10:56:50 AM	BCl3 MFC set to  0.000000
5/29/2010	10:56:50 AM	PHl3 MFC set to  0.000000
5/29/2010	10:56:50 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:56:50 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:56:50 AM	Tube furnace set to 0
5/29/2010	10:58:08 AM	Helium valve closed
5/29/2010	10:58:08 AM	H2 valve closed
5/29/2010	10:58:08 AM	BCl3 valve closed
5/29/2010	10:58:08 AM	PH3 valve closed
5/29/2010	10:58:08 AM	SiCl4 pre valve closed
5/29/2010	10:58:08 AM	SiCl4 post valve closed
5/29/2010	10:58:08 AM	Main Vac valve closed
5/29/2010	10:58:08 AM	Bypass valve closed
5/29/2010	10:58:08 AM	Bubbler valve closed
5/29/2010	10:58:08 AM	Helium MFC set to  0.000000
5/29/2010	10:58:08 AM	H2 MFC set to  0.000000
5/29/2010	10:58:08 AM	BCl3 MFC set to  0.000000
5/29/2010	10:58:08 AM	PHl3 MFC set to  0.000000
5/29/2010	10:58:08 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:58:08 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:58:08 AM	Tube furnace set to 0
5/29/2010	10:58:23 AM	Helium valve closed
5/29/2010	10:58:23 AM	H2 valve closed
5/29/2010	10:58:23 AM	BCl3 valve closed
5/29/2010	10:58:23 AM	PH3 valve closed
5/29/2010	10:58:23 AM	SiCl4 pre valve closed
5/29/2010	10:58:23 AM	SiCl4 post valve closed
5/29/2010	10:58:23 AM	Main Vac valve closed
5/29/2010	10:58:23 AM	Bubbler valve closed
5/29/2010	10:58:23 AM	Bypass valve opened
5/29/2010	10:58:23 AM	Helium MFC set to  0.000000
5/29/2010	10:58:23 AM	H2 MFC set to  0.000000
5/29/2010	10:58:23 AM	BCl3 MFC set to  0.000000
5/29/2010	10:58:23 AM	PHl3 MFC set to  0.000000
5/29/2010	10:58:23 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:58:23 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:58:23 AM	Tube furnace set to 0
5/29/2010	10:58:54 AM	Helium valve closed
5/29/2010	10:58:54 AM	H2 valve closed
5/29/2010	10:58:54 AM	BCl3 valve closed
5/29/2010	10:58:54 AM	PH3 valve closed
5/29/2010	10:58:54 AM	SiCl4 pre valve closed
5/29/2010	10:58:54 AM	SiCl4 post valve closed
5/29/2010	10:58:54 AM	Bubbler valve closed
5/29/2010	10:58:54 AM	Main Vac valve opened
5/29/2010	10:58:54 AM	Bypass valve opened
5/29/2010	10:58:54 AM	Helium MFC set to  0.000000
5/29/2010	10:58:54 AM	H2 MFC set to  0.000000
5/29/2010	10:58:54 AM	BCl3 MFC set to  0.000000
5/29/2010	10:58:54 AM	PHl3 MFC set to  0.000000
5/29/2010	10:58:54 AM	SiCl4 MFC set to  0.000000
5/29/2010	10:58:54 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:58:54 AM	Tube furnace set to 0
5/29/2010	11:03:54 AM	H2 valve closed
5/29/2010	11:03:54 AM	BCl3 valve closed
5/29/2010	11:03:54 AM	PH3 valve closed
5/29/2010	11:03:54 AM	SiCl4 pre valve closed
5/29/2010	11:03:54 AM	SiCl4 post valve closed
5/29/2010	11:03:54 AM	Main Vac valve closed
5/29/2010	11:03:54 AM	Bypass valve closed
5/29/2010	11:03:54 AM	Bubbler valve closed
5/29/2010	11:03:54 AM	Helium valve opened
5/29/2010	11:03:54 AM	Helium MFC set to  500.000000
5/29/2010	11:03:54 AM	H2 MFC set to  0.000000
5/29/2010	11:03:54 AM	BCl3 MFC set to  0.000000
5/29/2010	11:03:54 AM	PHl3 MFC set to  0.000000
5/29/2010	11:03:54 AM	SiCl4 MFC set to  0.000000
5/29/2010	11:03:54 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:03:55 AM	Tube furnace set to 0
5/29/2010	11:05:12 AM	Helium valve closed
5/29/2010	11:05:12 AM	H2 valve closed
5/29/2010	11:05:12 AM	BCl3 valve closed
5/29/2010	11:05:12 AM	PH3 valve closed
5/29/2010	11:05:12 AM	SiCl4 pre valve closed
5/29/2010	11:05:12 AM	SiCl4 post valve closed
5/29/2010	11:05:12 AM	Main Vac valve closed
5/29/2010	11:05:12 AM	Bypass valve closed
5/29/2010	11:05:12 AM	Bubbler valve closed
5/29/2010	11:05:12 AM	Helium MFC set to  0.000000
5/29/2010	11:05:12 AM	H2 MFC set to  0.000000
5/29/2010	11:05:12 AM	BCl3 MFC set to  0.000000
5/29/2010	11:05:12 AM	PHl3 MFC set to  0.000000
5/29/2010	11:05:12 AM	SiCl4 MFC set to  0.000000
5/29/2010	11:05:12 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:05:13 AM	Tube furnace set to 0
5/29/2010	11:05:28 AM	Helium valve closed
5/29/2010	11:05:28 AM	H2 valve closed
5/29/2010	11:05:28 AM	BCl3 valve closed
5/29/2010	11:05:28 AM	PH3 valve closed
5/29/2010	11:05:28 AM	SiCl4 pre valve closed
5/29/2010	11:05:28 AM	SiCl4 post valve closed
5/29/2010	11:05:28 AM	Main Vac valve closed
5/29/2010	11:05:28 AM	Bubbler valve closed
5/29/2010	11:05:28 AM	Bypass valve opened
5/29/2010	11:05:28 AM	Helium MFC set to  0.000000
5/29/2010	11:05:28 AM	H2 MFC set to  0.000000
5/29/2010	11:05:28 AM	BCl3 MFC set to  0.000000
5/29/2010	11:05:28 AM	PHl3 MFC set to  0.000000
5/29/2010	11:05:28 AM	SiCl4 MFC set to  0.000000
5/29/2010	11:05:28 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:05:28 AM	Tube furnace set to 0
5/29/2010	11:05:59 AM	Helium valve closed
5/29/2010	11:05:59 AM	H2 valve closed
5/29/2010	11:05:59 AM	BCl3 valve closed
5/29/2010	11:05:59 AM	PH3 valve closed
5/29/2010	11:05:59 AM	SiCl4 pre valve closed
5/29/2010	11:05:59 AM	SiCl4 post valve closed
5/29/2010	11:05:59 AM	Bubbler valve closed
5/29/2010	11:05:59 AM	Main Vac valve opened
5/29/2010	11:05:59 AM	Bypass valve opened
5/29/2010	11:05:59 AM	Helium MFC set to  0.000000
5/29/2010	11:05:59 AM	H2 MFC set to  0.000000
5/29/2010	11:05:59 AM	BCl3 MFC set to  0.000000
5/29/2010	11:05:59 AM	PHl3 MFC set to  0.000000
5/29/2010	11:05:59 AM	SiCl4 MFC set to  0.000000
5/29/2010	11:05:59 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:05:59 AM	Tube furnace set to 0
5/29/2010	11:10:59 AM	Helium valve closed
5/29/2010	11:10:59 AM	H2 valve closed
5/29/2010	11:10:59 AM	BCl3 valve closed
5/29/2010	11:10:59 AM	PH3 valve closed
5/29/2010	11:10:59 AM	SiCl4 pre valve closed
5/29/2010	11:10:59 AM	SiCl4 post valve closed
5/29/2010	11:10:59 AM	Bubbler valve closed
5/29/2010	11:10:59 AM	Main Vac valve opened
5/29/2010	11:10:59 AM	Bypass valve opened
5/29/2010	11:10:59 AM	Helium MFC set to  0.000000
5/29/2010	11:10:59 AM	H2 MFC set to  0.000000
5/29/2010	11:10:59 AM	BCl3 MFC set to  0.000000
5/29/2010	11:10:59 AM	PHl3 MFC set to  0.000000
5/29/2010	11:10:59 AM	SiCl4 MFC set to  0.000000
5/29/2010	11:10:59 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:11:00 AM	Tube furnace set to 0
5/29/2010	11:11:01 AM	Run finished at 11:11 AM
5/29/2010	11:11:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	11:25:29 AM	Recipe started at 11:25 AM
5/29/2010	11:25:29 AM	Helium valve closed
5/29/2010	11:25:29 AM	BCl3 valve closed
5/29/2010	11:25:29 AM	PH3 valve closed
5/29/2010	11:25:29 AM	SiCl4 pre valve closed
5/29/2010	11:25:29 AM	SiCl4 post valve closed
5/29/2010	11:25:29 AM	Main Vac valve closed
5/29/2010	11:25:29 AM	Bypass valve closed
5/29/2010	11:25:29 AM	Bubbler valve closed
5/29/2010	11:25:29 AM	H2 valve opened
5/29/2010	11:25:29 AM	Helium MFC set to  0.000000
5/29/2010	11:25:29 AM	H2 MFC set to  500.000000
5/29/2010	11:25:29 AM	BCl3 MFC set to  0.000000
5/29/2010	11:25:29 AM	PHl3 MFC set to  0.000000
5/29/2010	11:25:29 AM	SiCl4 MFC set to  0.000000
5/29/2010	11:25:29 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:25:29 AM	Tube furnace set to 0
5/29/2010	11:26:48 AM	Helium valve closed
5/29/2010	11:26:48 AM	BCl3 valve closed
5/29/2010	11:26:48 AM	PH3 valve closed
5/29/2010	11:26:48 AM	SiCl4 pre valve closed
5/29/2010	11:26:48 AM	SiCl4 post valve closed
5/29/2010	11:26:48 AM	Main Vac valve closed
5/29/2010	11:26:48 AM	Bypass valve closed
5/29/2010	11:26:48 AM	H2 valve opened
5/29/2010	11:26:48 AM	Bubbler valve opened
5/29/2010	11:26:48 AM	Helium MFC set to  0.000000
5/29/2010	11:26:48 AM	H2 MFC set to  500.000000
5/29/2010	11:26:48 AM	BCl3 MFC set to  0.000000
5/29/2010	11:26:48 AM	PHl3 MFC set to  0.000000
5/29/2010	11:26:48 AM	SiCl4 MFC set to  0.000000
5/29/2010	11:26:48 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:26:49 AM	Tube furnace set to 1000
5/29/2010	11:46:49 AM	Helium valve closed
5/29/2010	11:46:49 AM	PH3 valve closed
5/29/2010	11:46:49 AM	Main Vac valve closed
5/29/2010	11:46:49 AM	Bypass valve closed
5/29/2010	11:46:49 AM	H2 valve opened
5/29/2010	11:46:49 AM	BCl3 valve opened
5/29/2010	11:46:49 AM	SiCl4 pre valve opened
5/29/2010	11:46:49 AM	SiCl4 post valve opened
5/29/2010	11:46:49 AM	Bubbler valve opened
5/29/2010	11:46:49 AM	Helium MFC set to  0.000000
5/29/2010	11:46:49 AM	H2 MFC set to  500.000000
5/29/2010	11:46:49 AM	BCl3 MFC set to  35.000000
5/29/2010	11:46:49 AM	PHl3 MFC set to  0.000000
5/29/2010	11:46:49 AM	SiCl4 MFC set to  50.000000
5/29/2010	11:46:49 AM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:46:49 AM	Tube furnace set to 1000
5/29/2010	12:01:49 PM	H2 valve closed
5/29/2010	12:01:49 PM	BCl3 valve closed
5/29/2010	12:01:49 PM	PH3 valve closed
5/29/2010	12:01:49 PM	SiCl4 pre valve closed
5/29/2010	12:01:49 PM	SiCl4 post valve closed
5/29/2010	12:01:49 PM	Main Vac valve closed
5/29/2010	12:01:49 PM	Bypass valve closed
5/29/2010	12:01:49 PM	Helium valve opened
5/29/2010	12:01:49 PM	Bubbler valve opened
5/29/2010	12:01:49 PM	Helium MFC set to  500.000000
5/29/2010	12:01:49 PM	H2 MFC set to  0.000000
5/29/2010	12:01:49 PM	BCl3 MFC set to  0.000000
5/29/2010	12:01:49 PM	PHl3 MFC set to  0.000000
5/29/2010	12:01:49 PM	SiCl4 MFC set to  0.000000
5/29/2010	12:01:49 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	12:01:49 PM	Tube furnace set to 0
5/29/2010	12:21:49 PM	Helium valve closed
5/29/2010	12:21:49 PM	H2 valve closed
5/29/2010	12:21:49 PM	BCl3 valve closed
5/29/2010	12:21:49 PM	PH3 valve closed
5/29/2010	12:21:49 PM	SiCl4 pre valve closed
5/29/2010	12:21:49 PM	SiCl4 post valve closed
5/29/2010	12:21:49 PM	Main Vac valve closed
5/29/2010	12:21:49 PM	Bypass valve closed
5/29/2010	12:21:49 PM	Bubbler valve closed
5/29/2010	12:21:49 PM	Helium MFC set to  0.000000
5/29/2010	12:21:49 PM	H2 MFC set to  0.000000
5/29/2010	12:21:49 PM	BCl3 MFC set to  0.000000
5/29/2010	12:21:49 PM	PHl3 MFC set to  0.000000
5/29/2010	12:21:49 PM	SiCl4 MFC set to  0.000000
5/29/2010	12:21:49 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	12:21:49 PM	Tube furnace set to 0
5/29/2010	12:21:49 PM	Run finished at 12:21 PM
5/29/2010	12:36:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2010	12:36:04 PM	Recipe started at 12:36 PM
5/29/2010	12:36:04 PM	Helium valve closed
5/29/2010	12:36:04 PM	H2 valve closed
5/29/2010	12:36:04 PM	BCl3 valve closed
5/29/2010	12:36:04 PM	PH3 valve closed
5/29/2010	12:36:04 PM	SiCl4 pre valve closed
5/29/2010	12:36:04 PM	SiCl4 post valve closed
5/29/2010	12:36:04 PM	Main Vac valve closed
5/29/2010	12:36:04 PM	Bubbler valve closed
5/29/2010	12:36:04 PM	Bypass valve opened
5/29/2010	12:36:04 PM	Helium MFC set to  0.000000
5/29/2010	12:36:04 PM	H2 MFC set to  0.000000
5/29/2010	12:36:04 PM	BCl3 MFC set to  0.000000
5/29/2010	12:36:04 PM	PHl3 MFC set to  0.000000
5/29/2010	12:36:04 PM	SiCl4 MFC set to  0.000000
5/29/2010	12:36:04 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	12:36:04 PM	Tube furnace set to 0
5/29/2010	12:36:50 PM	Helium valve closed
5/29/2010	12:36:50 PM	H2 valve closed
5/29/2010	12:36:50 PM	BCl3 valve closed
5/29/2010	12:36:50 PM	PH3 valve closed
5/29/2010	12:36:50 PM	SiCl4 pre valve closed
5/29/2010	12:36:50 PM	SiCl4 post valve closed
5/29/2010	12:36:50 PM	Bubbler valve closed
5/29/2010	12:36:50 PM	Main Vac valve opened
5/29/2010	12:36:50 PM	Bypass valve opened
5/29/2010	12:36:50 PM	Helium MFC set to  0.000000
5/29/2010	12:36:50 PM	H2 MFC set to  0.000000
5/29/2010	12:36:50 PM	BCl3 MFC set to  0.000000
5/29/2010	12:36:50 PM	PHl3 MFC set to  0.000000
5/29/2010	12:36:50 PM	SiCl4 MFC set to  0.000000
5/29/2010	12:36:50 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	12:36:50 PM	Tube furnace set to 0
5/29/2010	12:36:50 PM	Run finished at 12:36 PM
5/29/2010	12:36:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2010	12:37:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	12:37:19 PM	Recipe started at 12:37 PM
5/29/2010	12:37:19 PM	H2 valve closed
5/29/2010	12:37:19 PM	BCl3 valve closed
5/29/2010	12:37:19 PM	PH3 valve closed
5/29/2010	12:37:19 PM	SiCl4 pre valve closed
5/29/2010	12:37:19 PM	SiCl4 post valve closed
5/29/2010	12:37:19 PM	Main Vac valve closed
5/29/2010	12:37:19 PM	Bypass valve closed
5/29/2010	12:37:19 PM	Bubbler valve closed
5/29/2010	12:37:19 PM	Helium valve opened
5/29/2010	12:37:19 PM	Helium MFC set to  500.000000
5/29/2010	12:37:19 PM	H2 MFC set to  0.000000
5/29/2010	12:37:19 PM	BCl3 MFC set to  0.000000
5/29/2010	12:37:19 PM	PHl3 MFC set to  0.000000
5/29/2010	12:37:19 PM	SiCl4 MFC set to  0.000000
5/29/2010	12:37:19 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	12:37:20 PM	Tube furnace set to 0
5/29/2010	12:38:37 PM	Helium valve closed
5/29/2010	12:38:37 PM	H2 valve closed
5/29/2010	12:38:37 PM	BCl3 valve closed
5/29/2010	12:38:37 PM	PH3 valve closed
5/29/2010	12:38:37 PM	SiCl4 pre valve closed
5/29/2010	12:38:37 PM	SiCl4 post valve closed
5/29/2010	12:38:37 PM	Main Vac valve closed
5/29/2010	12:38:37 PM	Bypass valve closed
5/29/2010	12:38:37 PM	Bubbler valve closed
5/29/2010	12:38:37 PM	Helium MFC set to  0.000000
5/29/2010	12:38:37 PM	H2 MFC set to  0.000000
5/29/2010	12:38:37 PM	BCl3 MFC set to  0.000000
5/29/2010	12:38:37 PM	PHl3 MFC set to  0.000000
5/29/2010	12:38:37 PM	SiCl4 MFC set to  0.000000
5/29/2010	12:38:37 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	12:38:37 PM	Tube furnace set to 0
5/29/2010	12:38:52 PM	Helium valve closed
5/29/2010	12:38:52 PM	H2 valve closed
5/29/2010	12:38:52 PM	BCl3 valve closed
5/29/2010	12:38:52 PM	PH3 valve closed
5/29/2010	12:38:52 PM	SiCl4 pre valve closed
5/29/2010	12:38:52 PM	SiCl4 post valve closed
5/29/2010	12:38:52 PM	Main Vac valve closed
5/29/2010	12:38:52 PM	Bubbler valve closed
5/29/2010	12:38:52 PM	Bypass valve opened
5/29/2010	12:38:52 PM	Helium MFC set to  0.000000
5/29/2010	12:38:52 PM	H2 MFC set to  0.000000
5/29/2010	12:38:52 PM	BCl3 MFC set to  0.000000
5/29/2010	12:38:52 PM	PHl3 MFC set to  0.000000
5/29/2010	12:38:52 PM	SiCl4 MFC set to  0.000000
5/29/2010	12:38:52 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	12:38:52 PM	Tube furnace set to 0
5/29/2010	12:39:24 PM	Helium valve closed
5/29/2010	12:39:24 PM	H2 valve closed
5/29/2010	12:39:24 PM	BCl3 valve closed
5/29/2010	12:39:24 PM	PH3 valve closed
5/29/2010	12:39:24 PM	SiCl4 pre valve closed
5/29/2010	12:39:24 PM	SiCl4 post valve closed
5/29/2010	12:39:24 PM	Bubbler valve closed
5/29/2010	12:39:24 PM	Main Vac valve opened
5/29/2010	12:39:24 PM	Bypass valve opened
5/29/2010	12:39:24 PM	Helium MFC set to  0.000000
5/29/2010	12:39:24 PM	H2 MFC set to  0.000000
5/29/2010	12:39:24 PM	BCl3 MFC set to  0.000000
5/29/2010	12:39:24 PM	PHl3 MFC set to  0.000000
5/29/2010	12:39:24 PM	SiCl4 MFC set to  0.000000
5/29/2010	12:39:24 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	12:39:24 PM	Tube furnace set to 0
5/29/2010	12:44:24 PM	H2 valve closed
5/29/2010	12:44:24 PM	BCl3 valve closed
5/29/2010	12:44:24 PM	PH3 valve closed
5/29/2010	12:44:24 PM	SiCl4 pre valve closed
5/29/2010	12:44:24 PM	SiCl4 post valve closed
5/29/2010	12:44:24 PM	Main Vac valve closed
5/29/2010	12:44:24 PM	Bypass valve closed
5/29/2010	12:44:24 PM	Bubbler valve closed
5/29/2010	12:44:24 PM	Helium valve opened
5/29/2010	12:44:24 PM	Helium MFC set to  500.000000
5/29/2010	12:44:24 PM	H2 MFC set to  0.000000
5/29/2010	12:44:24 PM	BCl3 MFC set to  0.000000
5/29/2010	12:44:24 PM	PHl3 MFC set to  0.000000
5/29/2010	12:44:24 PM	SiCl4 MFC set to  0.000000
5/29/2010	12:44:24 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	12:44:24 PM	Tube furnace set to 0
5/29/2010	12:45:40 PM	Helium valve closed
5/29/2010	12:45:40 PM	H2 valve closed
5/29/2010	12:45:40 PM	BCl3 valve closed
5/29/2010	12:45:40 PM	PH3 valve closed
5/29/2010	12:45:40 PM	SiCl4 pre valve closed
5/29/2010	12:45:40 PM	SiCl4 post valve closed
5/29/2010	12:45:40 PM	Main Vac valve closed
5/29/2010	12:45:40 PM	Bypass valve closed
5/29/2010	12:45:40 PM	Bubbler valve closed
5/29/2010	12:45:40 PM	Helium MFC set to  0.000000
5/29/2010	12:45:40 PM	H2 MFC set to  0.000000
5/29/2010	12:45:40 PM	BCl3 MFC set to  0.000000
5/29/2010	12:45:40 PM	PHl3 MFC set to  0.000000
5/29/2010	12:45:40 PM	SiCl4 MFC set to  0.000000
5/29/2010	12:45:40 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	12:45:40 PM	Tube furnace set to 0
5/29/2010	12:45:55 PM	Helium valve closed
5/29/2010	12:45:55 PM	H2 valve closed
5/29/2010	12:45:55 PM	BCl3 valve closed
5/29/2010	12:45:55 PM	PH3 valve closed
5/29/2010	12:45:55 PM	SiCl4 pre valve closed
5/29/2010	12:45:55 PM	SiCl4 post valve closed
5/29/2010	12:45:55 PM	Main Vac valve closed
5/29/2010	12:45:55 PM	Bubbler valve closed
5/29/2010	12:45:55 PM	Bypass valve opened
5/29/2010	12:45:55 PM	Helium MFC set to  0.000000
5/29/2010	12:45:55 PM	H2 MFC set to  0.000000
5/29/2010	12:45:55 PM	BCl3 MFC set to  0.000000
5/29/2010	12:45:55 PM	PHl3 MFC set to  0.000000
5/29/2010	12:45:55 PM	SiCl4 MFC set to  0.000000
5/29/2010	12:45:55 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	12:45:56 PM	Tube furnace set to 0
5/29/2010	12:46:26 PM	Helium valve closed
5/29/2010	12:46:26 PM	H2 valve closed
5/29/2010	12:46:26 PM	BCl3 valve closed
5/29/2010	12:46:26 PM	PH3 valve closed
5/29/2010	12:46:26 PM	SiCl4 pre valve closed
5/29/2010	12:46:26 PM	SiCl4 post valve closed
5/29/2010	12:46:26 PM	Bubbler valve closed
5/29/2010	12:46:26 PM	Main Vac valve opened
5/29/2010	12:46:26 PM	Bypass valve opened
5/29/2010	12:46:26 PM	Helium MFC set to  0.000000
5/29/2010	12:46:26 PM	H2 MFC set to  0.000000
5/29/2010	12:46:26 PM	BCl3 MFC set to  0.000000
5/29/2010	12:46:26 PM	PHl3 MFC set to  0.000000
5/29/2010	12:46:26 PM	SiCl4 MFC set to  0.000000
5/29/2010	12:46:26 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	12:46:26 PM	Tube furnace set to 0
5/29/2010	12:51:26 PM	H2 valve closed
5/29/2010	12:51:26 PM	BCl3 valve closed
5/29/2010	12:51:26 PM	PH3 valve closed
5/29/2010	12:51:26 PM	SiCl4 pre valve closed
5/29/2010	12:51:26 PM	SiCl4 post valve closed
5/29/2010	12:51:26 PM	Main Vac valve closed
5/29/2010	12:51:26 PM	Bypass valve closed
5/29/2010	12:51:26 PM	Bubbler valve closed
5/29/2010	12:51:26 PM	Helium valve opened
5/29/2010	12:51:26 PM	Helium MFC set to  500.000000
5/29/2010	12:51:27 PM	H2 MFC set to  0.000000
5/29/2010	12:51:27 PM	BCl3 MFC set to  0.000000
5/29/2010	12:51:27 PM	PHl3 MFC set to  0.000000
5/29/2010	12:51:27 PM	SiCl4 MFC set to  0.000000
5/29/2010	12:51:27 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	12:51:27 PM	Tube furnace set to 0
5/29/2010	12:52:43 PM	Helium valve closed
5/29/2010	12:52:43 PM	H2 valve closed
5/29/2010	12:52:43 PM	BCl3 valve closed
5/29/2010	12:52:43 PM	PH3 valve closed
5/29/2010	12:52:43 PM	SiCl4 pre valve closed
5/29/2010	12:52:43 PM	SiCl4 post valve closed
5/29/2010	12:52:43 PM	Main Vac valve closed
5/29/2010	12:52:43 PM	Bypass valve closed
5/29/2010	12:52:43 PM	Bubbler valve closed
5/29/2010	12:52:43 PM	Helium MFC set to  0.000000
5/29/2010	12:52:43 PM	H2 MFC set to  0.000000
5/29/2010	12:52:43 PM	BCl3 MFC set to  0.000000
5/29/2010	12:52:43 PM	PHl3 MFC set to  0.000000
5/29/2010	12:52:43 PM	SiCl4 MFC set to  0.000000
5/29/2010	12:52:43 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	12:52:43 PM	Tube furnace set to 0
5/29/2010	12:52:58 PM	Helium valve closed
5/29/2010	12:52:58 PM	H2 valve closed
5/29/2010	12:52:58 PM	BCl3 valve closed
5/29/2010	12:52:58 PM	PH3 valve closed
5/29/2010	12:52:58 PM	SiCl4 pre valve closed
5/29/2010	12:52:58 PM	SiCl4 post valve closed
5/29/2010	12:52:58 PM	Main Vac valve closed
5/29/2010	12:52:58 PM	Bubbler valve closed
5/29/2010	12:52:58 PM	Bypass valve opened
5/29/2010	12:52:58 PM	Helium MFC set to  0.000000
5/29/2010	12:52:58 PM	H2 MFC set to  0.000000
5/29/2010	12:52:58 PM	BCl3 MFC set to  0.000000
5/29/2010	12:52:58 PM	PHl3 MFC set to  0.000000
5/29/2010	12:52:58 PM	SiCl4 MFC set to  0.000000
5/29/2010	12:52:58 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	12:52:58 PM	Tube furnace set to 0
5/29/2010	12:53:29 PM	Helium valve closed
5/29/2010	12:53:29 PM	H2 valve closed
5/29/2010	12:53:29 PM	BCl3 valve closed
5/29/2010	12:53:29 PM	PH3 valve closed
5/29/2010	12:53:29 PM	SiCl4 pre valve closed
5/29/2010	12:53:29 PM	SiCl4 post valve closed
5/29/2010	12:53:29 PM	Bubbler valve closed
5/29/2010	12:53:29 PM	Main Vac valve opened
5/29/2010	12:53:29 PM	Bypass valve opened
5/29/2010	12:53:29 PM	Helium MFC set to  0.000000
5/29/2010	12:53:29 PM	H2 MFC set to  0.000000
5/29/2010	12:53:29 PM	BCl3 MFC set to  0.000000
5/29/2010	12:53:29 PM	PHl3 MFC set to  0.000000
5/29/2010	12:53:29 PM	SiCl4 MFC set to  0.000000
5/29/2010	12:53:29 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	12:53:29 PM	Tube furnace set to 0
5/29/2010	12:58:29 PM	Helium valve closed
5/29/2010	12:58:29 PM	H2 valve closed
5/29/2010	12:58:29 PM	BCl3 valve closed
5/29/2010	12:58:29 PM	PH3 valve closed
5/29/2010	12:58:29 PM	SiCl4 pre valve closed
5/29/2010	12:58:29 PM	SiCl4 post valve closed
5/29/2010	12:58:29 PM	Bubbler valve closed
5/29/2010	12:58:29 PM	Main Vac valve opened
5/29/2010	12:58:29 PM	Bypass valve opened
5/29/2010	12:58:29 PM	Helium MFC set to  0.000000
5/29/2010	12:58:29 PM	H2 MFC set to  0.000000
5/29/2010	12:58:29 PM	BCl3 MFC set to  0.000000
5/29/2010	12:58:29 PM	PHl3 MFC set to  0.000000
5/29/2010	12:58:29 PM	SiCl4 MFC set to  0.000000
5/29/2010	12:58:29 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	12:58:30 PM	Tube furnace set to 0
5/29/2010	12:58:31 PM	Run finished at 12:58 PM
5/29/2010	12:58:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	1:05:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	1:05:09 PM	Recipe started at 1:05 PM
5/29/2010	1:05:09 PM	H2 valve closed
5/29/2010	1:05:09 PM	BCl3 valve closed
5/29/2010	1:05:09 PM	PH3 valve closed
5/29/2010	1:05:09 PM	SiCl4 pre valve closed
5/29/2010	1:05:09 PM	SiCl4 post valve closed
5/29/2010	1:05:09 PM	Main Vac valve closed
5/29/2010	1:05:09 PM	Bypass valve closed
5/29/2010	1:05:09 PM	Bubbler valve closed
5/29/2010	1:05:09 PM	Helium valve opened
5/29/2010	1:05:09 PM	Helium MFC set to  500.000000
5/29/2010	1:05:09 PM	H2 MFC set to  0.000000
5/29/2010	1:05:09 PM	BCl3 MFC set to  0.000000
5/29/2010	1:05:09 PM	PHl3 MFC set to  0.000000
5/29/2010	1:05:09 PM	SiCl4 MFC set to  0.000000
5/29/2010	1:05:09 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	1:05:09 PM	Tube furnace set to 0
5/29/2010	1:06:25 PM	Helium valve closed
5/29/2010	1:06:25 PM	H2 valve closed
5/29/2010	1:06:25 PM	BCl3 valve closed
5/29/2010	1:06:25 PM	PH3 valve closed
5/29/2010	1:06:25 PM	SiCl4 pre valve closed
5/29/2010	1:06:25 PM	SiCl4 post valve closed
5/29/2010	1:06:25 PM	Main Vac valve closed
5/29/2010	1:06:25 PM	Bypass valve closed
5/29/2010	1:06:25 PM	Bubbler valve closed
5/29/2010	1:06:25 PM	Helium MFC set to  0.000000
5/29/2010	1:06:25 PM	H2 MFC set to  0.000000
5/29/2010	1:06:25 PM	BCl3 MFC set to  0.000000
5/29/2010	1:06:25 PM	PHl3 MFC set to  0.000000
5/29/2010	1:06:25 PM	SiCl4 MFC set to  0.000000
5/29/2010	1:06:25 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	1:06:26 PM	Tube furnace set to 0
5/29/2010	1:06:41 PM	Helium valve closed
5/29/2010	1:06:41 PM	H2 valve closed
5/29/2010	1:06:41 PM	BCl3 valve closed
5/29/2010	1:06:41 PM	PH3 valve closed
5/29/2010	1:06:41 PM	SiCl4 pre valve closed
5/29/2010	1:06:41 PM	SiCl4 post valve closed
5/29/2010	1:06:41 PM	Main Vac valve closed
5/29/2010	1:06:41 PM	Bubbler valve closed
5/29/2010	1:06:41 PM	Bypass valve opened
5/29/2010	1:06:41 PM	Helium MFC set to  0.000000
5/29/2010	1:06:41 PM	H2 MFC set to  0.000000
5/29/2010	1:06:41 PM	BCl3 MFC set to  0.000000
5/29/2010	1:06:41 PM	PHl3 MFC set to  0.000000
5/29/2010	1:06:41 PM	SiCl4 MFC set to  0.000000
5/29/2010	1:06:41 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	1:06:41 PM	Tube furnace set to 0
5/29/2010	1:07:12 PM	Helium valve closed
5/29/2010	1:07:12 PM	H2 valve closed
5/29/2010	1:07:12 PM	BCl3 valve closed
5/29/2010	1:07:12 PM	PH3 valve closed
5/29/2010	1:07:12 PM	SiCl4 pre valve closed
5/29/2010	1:07:12 PM	SiCl4 post valve closed
5/29/2010	1:07:12 PM	Bubbler valve closed
5/29/2010	1:07:12 PM	Main Vac valve opened
5/29/2010	1:07:12 PM	Bypass valve opened
5/29/2010	1:07:12 PM	Helium MFC set to  0.000000
5/29/2010	1:07:12 PM	H2 MFC set to  0.000000
5/29/2010	1:07:12 PM	BCl3 MFC set to  0.000000
5/29/2010	1:07:12 PM	PHl3 MFC set to  0.000000
5/29/2010	1:07:12 PM	SiCl4 MFC set to  0.000000
5/29/2010	1:07:12 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	1:07:12 PM	Tube furnace set to 0
5/29/2010	1:12:12 PM	H2 valve closed
5/29/2010	1:12:12 PM	BCl3 valve closed
5/29/2010	1:12:12 PM	PH3 valve closed
5/29/2010	1:12:12 PM	SiCl4 pre valve closed
5/29/2010	1:12:12 PM	SiCl4 post valve closed
5/29/2010	1:12:12 PM	Main Vac valve closed
5/29/2010	1:12:12 PM	Bypass valve closed
5/29/2010	1:12:12 PM	Bubbler valve closed
5/29/2010	1:12:12 PM	Helium valve opened
5/29/2010	1:12:12 PM	Helium MFC set to  500.000000
5/29/2010	1:12:12 PM	H2 MFC set to  0.000000
5/29/2010	1:12:12 PM	BCl3 MFC set to  0.000000
5/29/2010	1:12:12 PM	PHl3 MFC set to  0.000000
5/29/2010	1:12:12 PM	SiCl4 MFC set to  0.000000
5/29/2010	1:12:12 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	1:12:12 PM	Tube furnace set to 0
5/29/2010	1:13:29 PM	Helium valve closed
5/29/2010	1:13:29 PM	H2 valve closed
5/29/2010	1:13:29 PM	BCl3 valve closed
5/29/2010	1:13:29 PM	PH3 valve closed
5/29/2010	1:13:29 PM	SiCl4 pre valve closed
5/29/2010	1:13:29 PM	SiCl4 post valve closed
5/29/2010	1:13:29 PM	Main Vac valve closed
5/29/2010	1:13:29 PM	Bypass valve closed
5/29/2010	1:13:29 PM	Bubbler valve closed
5/29/2010	1:13:29 PM	Helium MFC set to  0.000000
5/29/2010	1:13:29 PM	H2 MFC set to  0.000000
5/29/2010	1:13:29 PM	BCl3 MFC set to  0.000000
5/29/2010	1:13:29 PM	PHl3 MFC set to  0.000000
5/29/2010	1:13:29 PM	SiCl4 MFC set to  0.000000
5/29/2010	1:13:29 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	1:13:29 PM	Tube furnace set to 0
5/29/2010	1:13:44 PM	Helium valve closed
5/29/2010	1:13:44 PM	H2 valve closed
5/29/2010	1:13:44 PM	BCl3 valve closed
5/29/2010	1:13:44 PM	PH3 valve closed
5/29/2010	1:13:44 PM	SiCl4 pre valve closed
5/29/2010	1:13:44 PM	SiCl4 post valve closed
5/29/2010	1:13:44 PM	Main Vac valve closed
5/29/2010	1:13:44 PM	Bubbler valve closed
5/29/2010	1:13:44 PM	Bypass valve opened
5/29/2010	1:13:44 PM	Helium MFC set to  0.000000
5/29/2010	1:13:44 PM	H2 MFC set to  0.000000
5/29/2010	1:13:44 PM	BCl3 MFC set to  0.000000
5/29/2010	1:13:44 PM	PHl3 MFC set to  0.000000
5/29/2010	1:13:44 PM	SiCl4 MFC set to  0.000000
5/29/2010	1:13:44 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	1:13:44 PM	Tube furnace set to 0
5/29/2010	1:14:15 PM	Helium valve closed
5/29/2010	1:14:15 PM	H2 valve closed
5/29/2010	1:14:15 PM	BCl3 valve closed
5/29/2010	1:14:15 PM	PH3 valve closed
5/29/2010	1:14:15 PM	SiCl4 pre valve closed
5/29/2010	1:14:15 PM	SiCl4 post valve closed
5/29/2010	1:14:15 PM	Bubbler valve closed
5/29/2010	1:14:15 PM	Main Vac valve opened
5/29/2010	1:14:15 PM	Bypass valve opened
5/29/2010	1:14:15 PM	Helium MFC set to  0.000000
5/29/2010	1:14:15 PM	H2 MFC set to  0.000000
5/29/2010	1:14:15 PM	BCl3 MFC set to  0.000000
5/29/2010	1:14:15 PM	PHl3 MFC set to  0.000000
5/29/2010	1:14:15 PM	SiCl4 MFC set to  0.000000
5/29/2010	1:14:15 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	1:14:15 PM	Tube furnace set to 0
5/29/2010	1:19:15 PM	H2 valve closed
5/29/2010	1:19:15 PM	BCl3 valve closed
5/29/2010	1:19:15 PM	PH3 valve closed
5/29/2010	1:19:15 PM	SiCl4 pre valve closed
5/29/2010	1:19:15 PM	SiCl4 post valve closed
5/29/2010	1:19:15 PM	Main Vac valve closed
5/29/2010	1:19:15 PM	Bypass valve closed
5/29/2010	1:19:15 PM	Bubbler valve closed
5/29/2010	1:19:15 PM	Helium valve opened
5/29/2010	1:19:15 PM	Helium MFC set to  500.000000
5/29/2010	1:19:15 PM	H2 MFC set to  0.000000
5/29/2010	1:19:15 PM	BCl3 MFC set to  0.000000
5/29/2010	1:19:15 PM	PHl3 MFC set to  0.000000
5/29/2010	1:19:15 PM	SiCl4 MFC set to  0.000000
5/29/2010	1:19:15 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	1:19:16 PM	Tube furnace set to 0
5/29/2010	1:20:33 PM	Helium valve closed
5/29/2010	1:20:33 PM	H2 valve closed
5/29/2010	1:20:33 PM	BCl3 valve closed
5/29/2010	1:20:33 PM	PH3 valve closed
5/29/2010	1:20:33 PM	SiCl4 pre valve closed
5/29/2010	1:20:33 PM	SiCl4 post valve closed
5/29/2010	1:20:33 PM	Main Vac valve closed
5/29/2010	1:20:33 PM	Bypass valve closed
5/29/2010	1:20:33 PM	Bubbler valve closed
5/29/2010	1:20:33 PM	Helium MFC set to  0.000000
5/29/2010	1:20:33 PM	H2 MFC set to  0.000000
5/29/2010	1:20:33 PM	BCl3 MFC set to  0.000000
5/29/2010	1:20:33 PM	PHl3 MFC set to  0.000000
5/29/2010	1:20:33 PM	SiCl4 MFC set to  0.000000
5/29/2010	1:20:33 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	1:20:33 PM	Tube furnace set to 0
5/29/2010	1:20:48 PM	Helium valve closed
5/29/2010	1:20:48 PM	H2 valve closed
5/29/2010	1:20:48 PM	BCl3 valve closed
5/29/2010	1:20:48 PM	PH3 valve closed
5/29/2010	1:20:48 PM	SiCl4 pre valve closed
5/29/2010	1:20:48 PM	SiCl4 post valve closed
5/29/2010	1:20:48 PM	Main Vac valve closed
5/29/2010	1:20:48 PM	Bubbler valve closed
5/29/2010	1:20:48 PM	Bypass valve opened
5/29/2010	1:20:48 PM	Helium MFC set to  0.000000
5/29/2010	1:20:48 PM	H2 MFC set to  0.000000
5/29/2010	1:20:48 PM	BCl3 MFC set to  0.000000
5/29/2010	1:20:48 PM	PHl3 MFC set to  0.000000
5/29/2010	1:20:48 PM	SiCl4 MFC set to  0.000000
5/29/2010	1:20:48 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	1:20:48 PM	Tube furnace set to 0
5/29/2010	1:21:19 PM	Helium valve closed
5/29/2010	1:21:19 PM	H2 valve closed
5/29/2010	1:21:19 PM	BCl3 valve closed
5/29/2010	1:21:19 PM	PH3 valve closed
5/29/2010	1:21:19 PM	SiCl4 pre valve closed
5/29/2010	1:21:19 PM	SiCl4 post valve closed
5/29/2010	1:21:19 PM	Bubbler valve closed
5/29/2010	1:21:19 PM	Main Vac valve opened
5/29/2010	1:21:19 PM	Bypass valve opened
5/29/2010	1:21:19 PM	Helium MFC set to  0.000000
5/29/2010	1:21:19 PM	H2 MFC set to  0.000000
5/29/2010	1:21:19 PM	BCl3 MFC set to  0.000000
5/29/2010	1:21:19 PM	PHl3 MFC set to  0.000000
5/29/2010	1:21:19 PM	SiCl4 MFC set to  0.000000
5/29/2010	1:21:19 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	1:21:19 PM	Tube furnace set to 0
5/29/2010	1:26:19 PM	Helium valve closed
5/29/2010	1:26:19 PM	H2 valve closed
5/29/2010	1:26:19 PM	BCl3 valve closed
5/29/2010	1:26:19 PM	PH3 valve closed
5/29/2010	1:26:19 PM	SiCl4 pre valve closed
5/29/2010	1:26:19 PM	SiCl4 post valve closed
5/29/2010	1:26:19 PM	Bubbler valve closed
5/29/2010	1:26:19 PM	Main Vac valve opened
5/29/2010	1:26:19 PM	Bypass valve opened
5/29/2010	1:26:19 PM	Helium MFC set to  0.000000
5/29/2010	1:26:19 PM	H2 MFC set to  0.000000
5/29/2010	1:26:19 PM	BCl3 MFC set to  0.000000
5/29/2010	1:26:19 PM	PHl3 MFC set to  0.000000
5/29/2010	1:26:19 PM	SiCl4 MFC set to  0.000000
5/29/2010	1:26:19 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	1:26:19 PM	Tube furnace set to 0
5/29/2010	1:26:20 PM	Run finished at 1:26 PM
5/29/2010	1:26:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	1:52:14 PM	Recipe started at 1:52 PM
5/29/2010	1:52:14 PM	Helium valve closed
5/29/2010	1:52:14 PM	BCl3 valve closed
5/29/2010	1:52:14 PM	PH3 valve closed
5/29/2010	1:52:14 PM	SiCl4 pre valve closed
5/29/2010	1:52:14 PM	SiCl4 post valve closed
5/29/2010	1:52:14 PM	Main Vac valve closed
5/29/2010	1:52:14 PM	Bypass valve closed
5/29/2010	1:52:14 PM	Bubbler valve closed
5/29/2010	1:52:14 PM	H2 valve opened
5/29/2010	1:52:14 PM	Helium MFC set to  0.000000
5/29/2010	1:52:14 PM	H2 MFC set to  500.000000
5/29/2010	1:52:14 PM	BCl3 MFC set to  0.000000
5/29/2010	1:52:14 PM	PHl3 MFC set to  0.000000
5/29/2010	1:52:14 PM	SiCl4 MFC set to  0.000000
5/29/2010	1:52:14 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	1:52:14 PM	Tube furnace set to 0
5/29/2010	1:53:32 PM	Helium valve closed
5/29/2010	1:53:32 PM	BCl3 valve closed
5/29/2010	1:53:32 PM	PH3 valve closed
5/29/2010	1:53:32 PM	SiCl4 pre valve closed
5/29/2010	1:53:32 PM	SiCl4 post valve closed
5/29/2010	1:53:32 PM	Main Vac valve closed
5/29/2010	1:53:32 PM	Bypass valve closed
5/29/2010	1:53:32 PM	H2 valve opened
5/29/2010	1:53:32 PM	Bubbler valve opened
5/29/2010	1:53:32 PM	Helium MFC set to  0.000000
5/29/2010	1:53:32 PM	H2 MFC set to  500.000000
5/29/2010	1:53:32 PM	BCl3 MFC set to  0.000000
5/29/2010	1:53:32 PM	PHl3 MFC set to  0.000000
5/29/2010	1:53:32 PM	SiCl4 MFC set to  0.000000
5/29/2010	1:53:32 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	1:53:32 PM	Tube furnace set to 1000
5/29/2010	2:13:32 PM	Helium valve closed
5/29/2010	2:13:32 PM	PH3 valve closed
5/29/2010	2:13:32 PM	Main Vac valve closed
5/29/2010	2:13:32 PM	Bypass valve closed
5/29/2010	2:13:32 PM	H2 valve opened
5/29/2010	2:13:32 PM	BCl3 valve opened
5/29/2010	2:13:32 PM	SiCl4 pre valve opened
5/29/2010	2:13:32 PM	SiCl4 post valve opened
5/29/2010	2:13:32 PM	Bubbler valve opened
5/29/2010	2:13:32 PM	Helium MFC set to  0.000000
5/29/2010	2:13:32 PM	H2 MFC set to  500.000000
5/29/2010	2:13:32 PM	BCl3 MFC set to  35.000000
5/29/2010	2:13:32 PM	PHl3 MFC set to  0.000000
5/29/2010	2:13:32 PM	SiCl4 MFC set to  50.000000
5/29/2010	2:13:32 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	2:13:33 PM	Tube furnace set to 1000
5/29/2010	2:23:33 PM	H2 valve closed
5/29/2010	2:23:33 PM	BCl3 valve closed
5/29/2010	2:23:33 PM	PH3 valve closed
5/29/2010	2:23:33 PM	SiCl4 pre valve closed
5/29/2010	2:23:33 PM	SiCl4 post valve closed
5/29/2010	2:23:33 PM	Main Vac valve closed
5/29/2010	2:23:33 PM	Bypass valve closed
5/29/2010	2:23:33 PM	Helium valve opened
5/29/2010	2:23:33 PM	Bubbler valve opened
5/29/2010	2:23:33 PM	Helium MFC set to  500.000000
5/29/2010	2:23:33 PM	H2 MFC set to  0.000000
5/29/2010	2:23:33 PM	BCl3 MFC set to  0.000000
5/29/2010	2:23:33 PM	PHl3 MFC set to  0.000000
5/29/2010	2:23:33 PM	SiCl4 MFC set to  0.000000
5/29/2010	2:23:33 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	2:23:33 PM	Tube furnace set to 0
5/29/2010	2:43:33 PM	Helium valve closed
5/29/2010	2:43:33 PM	H2 valve closed
5/29/2010	2:43:33 PM	BCl3 valve closed
5/29/2010	2:43:33 PM	PH3 valve closed
5/29/2010	2:43:33 PM	SiCl4 pre valve closed
5/29/2010	2:43:33 PM	SiCl4 post valve closed
5/29/2010	2:43:33 PM	Main Vac valve closed
5/29/2010	2:43:33 PM	Bypass valve closed
5/29/2010	2:43:33 PM	Bubbler valve closed
5/29/2010	2:43:33 PM	Helium MFC set to  0.000000
5/29/2010	2:43:33 PM	H2 MFC set to  0.000000
5/29/2010	2:43:33 PM	BCl3 MFC set to  0.000000
5/29/2010	2:43:33 PM	PHl3 MFC set to  0.000000
5/29/2010	2:43:33 PM	SiCl4 MFC set to  0.000000
5/29/2010	2:43:33 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	2:43:33 PM	Tube furnace set to 0
5/29/2010	2:43:33 PM	Run finished at 2:43 PM
5/29/2010	2:59:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2010	2:59:43 PM	Recipe started at 2:59 PM
5/29/2010	2:59:43 PM	Helium valve closed
5/29/2010	2:59:43 PM	H2 valve closed
5/29/2010	2:59:43 PM	BCl3 valve closed
5/29/2010	2:59:43 PM	PH3 valve closed
5/29/2010	2:59:43 PM	SiCl4 pre valve closed
5/29/2010	2:59:43 PM	SiCl4 post valve closed
5/29/2010	2:59:43 PM	Main Vac valve closed
5/29/2010	2:59:43 PM	Bubbler valve closed
5/29/2010	2:59:43 PM	Bypass valve opened
5/29/2010	2:59:43 PM	Helium MFC set to  0.000000
5/29/2010	2:59:43 PM	H2 MFC set to  0.000000
5/29/2010	2:59:43 PM	BCl3 MFC set to  0.000000
5/29/2010	2:59:43 PM	PHl3 MFC set to  0.000000
5/29/2010	2:59:43 PM	SiCl4 MFC set to  0.000000
5/29/2010	2:59:43 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	2:59:43 PM	Tube furnace set to 0
5/29/2010	3:00:31 PM	Helium valve closed
5/29/2010	3:00:31 PM	H2 valve closed
5/29/2010	3:00:31 PM	BCl3 valve closed
5/29/2010	3:00:31 PM	PH3 valve closed
5/29/2010	3:00:31 PM	SiCl4 pre valve closed
5/29/2010	3:00:31 PM	SiCl4 post valve closed
5/29/2010	3:00:31 PM	Bubbler valve closed
5/29/2010	3:00:31 PM	Main Vac valve opened
5/29/2010	3:00:31 PM	Bypass valve opened
5/29/2010	3:00:31 PM	Helium MFC set to  0.000000
5/29/2010	3:00:31 PM	H2 MFC set to  0.000000
5/29/2010	3:00:31 PM	BCl3 MFC set to  0.000000
5/29/2010	3:00:31 PM	PHl3 MFC set to  0.000000
5/29/2010	3:00:31 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:00:31 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:00:31 PM	Tube furnace set to 0
5/29/2010	3:00:31 PM	Run finished at 3:00 PM
5/29/2010	3:00:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2010	3:00:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	3:00:53 PM	Recipe started at 3:00 PM
5/29/2010	3:00:53 PM	H2 valve closed
5/29/2010	3:00:53 PM	BCl3 valve closed
5/29/2010	3:00:53 PM	PH3 valve closed
5/29/2010	3:00:53 PM	SiCl4 pre valve closed
5/29/2010	3:00:53 PM	SiCl4 post valve closed
5/29/2010	3:00:53 PM	Main Vac valve closed
5/29/2010	3:00:53 PM	Bypass valve closed
5/29/2010	3:00:53 PM	Bubbler valve closed
5/29/2010	3:00:53 PM	Helium valve opened
5/29/2010	3:00:53 PM	Helium MFC set to  500.000000
5/29/2010	3:00:53 PM	H2 MFC set to  0.000000
5/29/2010	3:00:53 PM	BCl3 MFC set to  0.000000
5/29/2010	3:00:53 PM	PHl3 MFC set to  0.000000
5/29/2010	3:00:53 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:00:53 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:00:53 PM	Tube furnace set to 0
5/29/2010	3:02:12 PM	Helium valve closed
5/29/2010	3:02:12 PM	H2 valve closed
5/29/2010	3:02:12 PM	BCl3 valve closed
5/29/2010	3:02:12 PM	PH3 valve closed
5/29/2010	3:02:12 PM	SiCl4 pre valve closed
5/29/2010	3:02:12 PM	SiCl4 post valve closed
5/29/2010	3:02:12 PM	Main Vac valve closed
5/29/2010	3:02:12 PM	Bypass valve closed
5/29/2010	3:02:12 PM	Bubbler valve closed
5/29/2010	3:02:12 PM	Helium MFC set to  0.000000
5/29/2010	3:02:12 PM	H2 MFC set to  0.000000
5/29/2010	3:02:12 PM	BCl3 MFC set to  0.000000
5/29/2010	3:02:12 PM	PHl3 MFC set to  0.000000
5/29/2010	3:02:12 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:02:12 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:02:12 PM	Tube furnace set to 0
5/29/2010	3:02:27 PM	Helium valve closed
5/29/2010	3:02:27 PM	H2 valve closed
5/29/2010	3:02:27 PM	BCl3 valve closed
5/29/2010	3:02:27 PM	PH3 valve closed
5/29/2010	3:02:27 PM	SiCl4 pre valve closed
5/29/2010	3:02:27 PM	SiCl4 post valve closed
5/29/2010	3:02:27 PM	Main Vac valve closed
5/29/2010	3:02:27 PM	Bubbler valve closed
5/29/2010	3:02:27 PM	Bypass valve opened
5/29/2010	3:02:27 PM	Helium MFC set to  0.000000
5/29/2010	3:02:27 PM	H2 MFC set to  0.000000
5/29/2010	3:02:27 PM	BCl3 MFC set to  0.000000
5/29/2010	3:02:27 PM	PHl3 MFC set to  0.000000
5/29/2010	3:02:27 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:02:27 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:02:27 PM	Tube furnace set to 0
5/29/2010	3:02:59 PM	Helium valve closed
5/29/2010	3:02:59 PM	H2 valve closed
5/29/2010	3:02:59 PM	BCl3 valve closed
5/29/2010	3:02:59 PM	PH3 valve closed
5/29/2010	3:02:59 PM	SiCl4 pre valve closed
5/29/2010	3:02:59 PM	SiCl4 post valve closed
5/29/2010	3:02:59 PM	Bubbler valve closed
5/29/2010	3:02:59 PM	Main Vac valve opened
5/29/2010	3:02:59 PM	Bypass valve opened
5/29/2010	3:02:59 PM	Helium MFC set to  0.000000
5/29/2010	3:02:59 PM	H2 MFC set to  0.000000
5/29/2010	3:02:59 PM	BCl3 MFC set to  0.000000
5/29/2010	3:02:59 PM	PHl3 MFC set to  0.000000
5/29/2010	3:02:59 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:02:59 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:02:59 PM	Tube furnace set to 0
5/29/2010	3:07:59 PM	H2 valve closed
5/29/2010	3:07:59 PM	BCl3 valve closed
5/29/2010	3:07:59 PM	PH3 valve closed
5/29/2010	3:07:59 PM	SiCl4 pre valve closed
5/29/2010	3:07:59 PM	SiCl4 post valve closed
5/29/2010	3:07:59 PM	Main Vac valve closed
5/29/2010	3:07:59 PM	Bypass valve closed
5/29/2010	3:07:59 PM	Bubbler valve closed
5/29/2010	3:07:59 PM	Helium valve opened
5/29/2010	3:07:59 PM	Helium MFC set to  500.000000
5/29/2010	3:07:59 PM	H2 MFC set to  0.000000
5/29/2010	3:07:59 PM	BCl3 MFC set to  0.000000
5/29/2010	3:07:59 PM	PHl3 MFC set to  0.000000
5/29/2010	3:07:59 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:07:59 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:07:59 PM	Tube furnace set to 0
5/29/2010	3:09:17 PM	Helium valve closed
5/29/2010	3:09:17 PM	H2 valve closed
5/29/2010	3:09:17 PM	BCl3 valve closed
5/29/2010	3:09:17 PM	PH3 valve closed
5/29/2010	3:09:17 PM	SiCl4 pre valve closed
5/29/2010	3:09:17 PM	SiCl4 post valve closed
5/29/2010	3:09:17 PM	Main Vac valve closed
5/29/2010	3:09:17 PM	Bypass valve closed
5/29/2010	3:09:17 PM	Bubbler valve closed
5/29/2010	3:09:17 PM	Helium MFC set to  0.000000
5/29/2010	3:09:17 PM	H2 MFC set to  0.000000
5/29/2010	3:09:17 PM	BCl3 MFC set to  0.000000
5/29/2010	3:09:17 PM	PHl3 MFC set to  0.000000
5/29/2010	3:09:17 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:09:17 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:09:17 PM	Tube furnace set to 0
5/29/2010	3:09:32 PM	Helium valve closed
5/29/2010	3:09:32 PM	H2 valve closed
5/29/2010	3:09:32 PM	BCl3 valve closed
5/29/2010	3:09:32 PM	PH3 valve closed
5/29/2010	3:09:32 PM	SiCl4 pre valve closed
5/29/2010	3:09:32 PM	SiCl4 post valve closed
5/29/2010	3:09:32 PM	Main Vac valve closed
5/29/2010	3:09:32 PM	Bubbler valve closed
5/29/2010	3:09:32 PM	Bypass valve opened
5/29/2010	3:09:32 PM	Helium MFC set to  0.000000
5/29/2010	3:09:32 PM	H2 MFC set to  0.000000
5/29/2010	3:09:32 PM	BCl3 MFC set to  0.000000
5/29/2010	3:09:32 PM	PHl3 MFC set to  0.000000
5/29/2010	3:09:32 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:09:32 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:09:32 PM	Tube furnace set to 0
5/29/2010	3:10:04 PM	Helium valve closed
5/29/2010	3:10:04 PM	H2 valve closed
5/29/2010	3:10:04 PM	BCl3 valve closed
5/29/2010	3:10:04 PM	PH3 valve closed
5/29/2010	3:10:04 PM	SiCl4 pre valve closed
5/29/2010	3:10:04 PM	SiCl4 post valve closed
5/29/2010	3:10:04 PM	Bubbler valve closed
5/29/2010	3:10:04 PM	Main Vac valve opened
5/29/2010	3:10:04 PM	Bypass valve opened
5/29/2010	3:10:04 PM	Helium MFC set to  0.000000
5/29/2010	3:10:04 PM	H2 MFC set to  0.000000
5/29/2010	3:10:04 PM	BCl3 MFC set to  0.000000
5/29/2010	3:10:04 PM	PHl3 MFC set to  0.000000
5/29/2010	3:10:04 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:10:04 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:10:04 PM	Tube furnace set to 0
5/29/2010	3:15:04 PM	H2 valve closed
5/29/2010	3:15:04 PM	BCl3 valve closed
5/29/2010	3:15:04 PM	PH3 valve closed
5/29/2010	3:15:04 PM	SiCl4 pre valve closed
5/29/2010	3:15:04 PM	SiCl4 post valve closed
5/29/2010	3:15:04 PM	Main Vac valve closed
5/29/2010	3:15:04 PM	Bypass valve closed
5/29/2010	3:15:04 PM	Bubbler valve closed
5/29/2010	3:15:04 PM	Helium valve opened
5/29/2010	3:15:04 PM	Helium MFC set to  500.000000
5/29/2010	3:15:04 PM	H2 MFC set to  0.000000
5/29/2010	3:15:04 PM	BCl3 MFC set to  0.000000
5/29/2010	3:15:04 PM	PHl3 MFC set to  0.000000
5/29/2010	3:15:04 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:15:04 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:15:04 PM	Tube furnace set to 0
5/29/2010	3:16:22 PM	Helium valve closed
5/29/2010	3:16:22 PM	H2 valve closed
5/29/2010	3:16:22 PM	BCl3 valve closed
5/29/2010	3:16:22 PM	PH3 valve closed
5/29/2010	3:16:22 PM	SiCl4 pre valve closed
5/29/2010	3:16:22 PM	SiCl4 post valve closed
5/29/2010	3:16:22 PM	Main Vac valve closed
5/29/2010	3:16:22 PM	Bypass valve closed
5/29/2010	3:16:22 PM	Bubbler valve closed
5/29/2010	3:16:22 PM	Helium MFC set to  0.000000
5/29/2010	3:16:22 PM	H2 MFC set to  0.000000
5/29/2010	3:16:22 PM	BCl3 MFC set to  0.000000
5/29/2010	3:16:22 PM	PHl3 MFC set to  0.000000
5/29/2010	3:16:22 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:16:22 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:16:22 PM	Tube furnace set to 0
5/29/2010	3:16:37 PM	Helium valve closed
5/29/2010	3:16:37 PM	H2 valve closed
5/29/2010	3:16:37 PM	BCl3 valve closed
5/29/2010	3:16:37 PM	PH3 valve closed
5/29/2010	3:16:37 PM	SiCl4 pre valve closed
5/29/2010	3:16:37 PM	SiCl4 post valve closed
5/29/2010	3:16:37 PM	Main Vac valve closed
5/29/2010	3:16:37 PM	Bubbler valve closed
5/29/2010	3:16:37 PM	Bypass valve opened
5/29/2010	3:16:37 PM	Helium MFC set to  0.000000
5/29/2010	3:16:37 PM	H2 MFC set to  0.000000
5/29/2010	3:16:37 PM	BCl3 MFC set to  0.000000
5/29/2010	3:16:37 PM	PHl3 MFC set to  0.000000
5/29/2010	3:16:37 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:16:37 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:16:37 PM	Tube furnace set to 0
5/29/2010	3:17:09 PM	Helium valve closed
5/29/2010	3:17:09 PM	H2 valve closed
5/29/2010	3:17:09 PM	BCl3 valve closed
5/29/2010	3:17:09 PM	PH3 valve closed
5/29/2010	3:17:09 PM	SiCl4 pre valve closed
5/29/2010	3:17:09 PM	SiCl4 post valve closed
5/29/2010	3:17:09 PM	Bubbler valve closed
5/29/2010	3:17:09 PM	Main Vac valve opened
5/29/2010	3:17:09 PM	Bypass valve opened
5/29/2010	3:17:09 PM	Helium MFC set to  0.000000
5/29/2010	3:17:09 PM	H2 MFC set to  0.000000
5/29/2010	3:17:09 PM	BCl3 MFC set to  0.000000
5/29/2010	3:17:09 PM	PHl3 MFC set to  0.000000
5/29/2010	3:17:09 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:17:09 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:17:09 PM	Tube furnace set to 0
5/29/2010	3:22:09 PM	Helium valve closed
5/29/2010	3:22:09 PM	H2 valve closed
5/29/2010	3:22:09 PM	BCl3 valve closed
5/29/2010	3:22:09 PM	PH3 valve closed
5/29/2010	3:22:09 PM	SiCl4 pre valve closed
5/29/2010	3:22:09 PM	SiCl4 post valve closed
5/29/2010	3:22:09 PM	Bubbler valve closed
5/29/2010	3:22:09 PM	Main Vac valve opened
5/29/2010	3:22:09 PM	Bypass valve opened
5/29/2010	3:22:09 PM	Helium MFC set to  0.000000
5/29/2010	3:22:09 PM	H2 MFC set to  0.000000
5/29/2010	3:22:09 PM	BCl3 MFC set to  0.000000
5/29/2010	3:22:09 PM	PHl3 MFC set to  0.000000
5/29/2010	3:22:09 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:22:09 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:22:09 PM	Tube furnace set to 0
5/29/2010	3:22:10 PM	Run finished at 3:22 PM
5/29/2010	3:22:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	3:36:44 PM	Tube furnace set to 400
5/29/2010	3:46:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	3:46:37 PM	Recipe started at 3:46 PM
5/29/2010	3:46:37 PM	H2 valve closed
5/29/2010	3:46:37 PM	BCl3 valve closed
5/29/2010	3:46:37 PM	PH3 valve closed
5/29/2010	3:46:37 PM	SiCl4 pre valve closed
5/29/2010	3:46:37 PM	SiCl4 post valve closed
5/29/2010	3:46:37 PM	Main Vac valve closed
5/29/2010	3:46:37 PM	Bypass valve closed
5/29/2010	3:46:37 PM	Bubbler valve closed
5/29/2010	3:46:37 PM	Helium valve opened
5/29/2010	3:46:37 PM	Helium MFC set to  500.000000
5/29/2010	3:46:37 PM	H2 MFC set to  0.000000
5/29/2010	3:46:37 PM	BCl3 MFC set to  0.000000
5/29/2010	3:46:37 PM	PHl3 MFC set to  0.000000
5/29/2010	3:46:37 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:46:37 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:46:37 PM	Tube furnace set to 0
5/29/2010	3:47:51 PM	Helium valve closed
5/29/2010	3:47:51 PM	H2 valve closed
5/29/2010	3:47:51 PM	BCl3 valve closed
5/29/2010	3:47:51 PM	PH3 valve closed
5/29/2010	3:47:51 PM	SiCl4 pre valve closed
5/29/2010	3:47:51 PM	SiCl4 post valve closed
5/29/2010	3:47:51 PM	Main Vac valve closed
5/29/2010	3:47:51 PM	Bypass valve closed
5/29/2010	3:47:51 PM	Bubbler valve closed
5/29/2010	3:47:51 PM	Helium MFC set to  0.000000
5/29/2010	3:47:51 PM	H2 MFC set to  0.000000
5/29/2010	3:47:51 PM	BCl3 MFC set to  0.000000
5/29/2010	3:47:51 PM	PHl3 MFC set to  0.000000
5/29/2010	3:47:51 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:47:51 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:47:51 PM	Tube furnace set to 0
5/29/2010	3:48:06 PM	Helium valve closed
5/29/2010	3:48:06 PM	H2 valve closed
5/29/2010	3:48:06 PM	BCl3 valve closed
5/29/2010	3:48:06 PM	PH3 valve closed
5/29/2010	3:48:06 PM	SiCl4 pre valve closed
5/29/2010	3:48:06 PM	SiCl4 post valve closed
5/29/2010	3:48:06 PM	Main Vac valve closed
5/29/2010	3:48:06 PM	Bubbler valve closed
5/29/2010	3:48:06 PM	Bypass valve opened
5/29/2010	3:48:06 PM	Helium MFC set to  0.000000
5/29/2010	3:48:06 PM	H2 MFC set to  0.000000
5/29/2010	3:48:06 PM	BCl3 MFC set to  0.000000
5/29/2010	3:48:06 PM	PHl3 MFC set to  0.000000
5/29/2010	3:48:06 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:48:06 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:48:07 PM	Tube furnace set to 0
5/29/2010	3:48:37 PM	Helium valve closed
5/29/2010	3:48:37 PM	H2 valve closed
5/29/2010	3:48:37 PM	BCl3 valve closed
5/29/2010	3:48:37 PM	PH3 valve closed
5/29/2010	3:48:37 PM	SiCl4 pre valve closed
5/29/2010	3:48:37 PM	SiCl4 post valve closed
5/29/2010	3:48:37 PM	Bubbler valve closed
5/29/2010	3:48:37 PM	Main Vac valve opened
5/29/2010	3:48:37 PM	Bypass valve opened
5/29/2010	3:48:37 PM	Helium MFC set to  0.000000
5/29/2010	3:48:37 PM	H2 MFC set to  0.000000
5/29/2010	3:48:37 PM	BCl3 MFC set to  0.000000
5/29/2010	3:48:37 PM	PHl3 MFC set to  0.000000
5/29/2010	3:48:37 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:48:37 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:48:37 PM	Tube furnace set to 0
5/29/2010	3:53:37 PM	H2 valve closed
5/29/2010	3:53:37 PM	BCl3 valve closed
5/29/2010	3:53:37 PM	PH3 valve closed
5/29/2010	3:53:37 PM	SiCl4 pre valve closed
5/29/2010	3:53:37 PM	SiCl4 post valve closed
5/29/2010	3:53:37 PM	Main Vac valve closed
5/29/2010	3:53:37 PM	Bypass valve closed
5/29/2010	3:53:37 PM	Bubbler valve closed
5/29/2010	3:53:37 PM	Helium valve opened
5/29/2010	3:53:37 PM	Helium MFC set to  500.000000
5/29/2010	3:53:37 PM	H2 MFC set to  0.000000
5/29/2010	3:53:37 PM	BCl3 MFC set to  0.000000
5/29/2010	3:53:37 PM	PHl3 MFC set to  0.000000
5/29/2010	3:53:37 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:53:37 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:53:37 PM	Tube furnace set to 0
5/29/2010	3:54:51 PM	Helium valve closed
5/29/2010	3:54:51 PM	H2 valve closed
5/29/2010	3:54:51 PM	BCl3 valve closed
5/29/2010	3:54:51 PM	PH3 valve closed
5/29/2010	3:54:51 PM	SiCl4 pre valve closed
5/29/2010	3:54:51 PM	SiCl4 post valve closed
5/29/2010	3:54:51 PM	Main Vac valve closed
5/29/2010	3:54:51 PM	Bypass valve closed
5/29/2010	3:54:51 PM	Bubbler valve closed
5/29/2010	3:54:51 PM	Helium MFC set to  0.000000
5/29/2010	3:54:51 PM	H2 MFC set to  0.000000
5/29/2010	3:54:51 PM	BCl3 MFC set to  0.000000
5/29/2010	3:54:51 PM	PHl3 MFC set to  0.000000
5/29/2010	3:54:51 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:54:51 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:54:51 PM	Tube furnace set to 0
5/29/2010	3:55:06 PM	Helium valve closed
5/29/2010	3:55:06 PM	H2 valve closed
5/29/2010	3:55:06 PM	BCl3 valve closed
5/29/2010	3:55:06 PM	PH3 valve closed
5/29/2010	3:55:06 PM	SiCl4 pre valve closed
5/29/2010	3:55:06 PM	SiCl4 post valve closed
5/29/2010	3:55:06 PM	Main Vac valve closed
5/29/2010	3:55:06 PM	Bubbler valve closed
5/29/2010	3:55:06 PM	Bypass valve opened
5/29/2010	3:55:06 PM	Helium MFC set to  0.000000
5/29/2010	3:55:06 PM	H2 MFC set to  0.000000
5/29/2010	3:55:06 PM	BCl3 MFC set to  0.000000
5/29/2010	3:55:06 PM	PHl3 MFC set to  0.000000
5/29/2010	3:55:06 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:55:06 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:55:07 PM	Tube furnace set to 0
5/29/2010	3:55:37 PM	Helium valve closed
5/29/2010	3:55:37 PM	H2 valve closed
5/29/2010	3:55:37 PM	BCl3 valve closed
5/29/2010	3:55:37 PM	PH3 valve closed
5/29/2010	3:55:37 PM	SiCl4 pre valve closed
5/29/2010	3:55:37 PM	SiCl4 post valve closed
5/29/2010	3:55:37 PM	Bubbler valve closed
5/29/2010	3:55:37 PM	Main Vac valve opened
5/29/2010	3:55:37 PM	Bypass valve opened
5/29/2010	3:55:37 PM	Helium MFC set to  0.000000
5/29/2010	3:55:37 PM	H2 MFC set to  0.000000
5/29/2010	3:55:37 PM	BCl3 MFC set to  0.000000
5/29/2010	3:55:37 PM	PHl3 MFC set to  0.000000
5/29/2010	3:55:37 PM	SiCl4 MFC set to  0.000000
5/29/2010	3:55:37 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	3:55:37 PM	Tube furnace set to 0
5/29/2010	4:00:37 PM	H2 valve closed
5/29/2010	4:00:37 PM	BCl3 valve closed
5/29/2010	4:00:37 PM	PH3 valve closed
5/29/2010	4:00:37 PM	SiCl4 pre valve closed
5/29/2010	4:00:37 PM	SiCl4 post valve closed
5/29/2010	4:00:37 PM	Main Vac valve closed
5/29/2010	4:00:37 PM	Bypass valve closed
5/29/2010	4:00:37 PM	Bubbler valve closed
5/29/2010	4:00:37 PM	Helium valve opened
5/29/2010	4:00:37 PM	Helium MFC set to  500.000000
5/29/2010	4:00:37 PM	H2 MFC set to  0.000000
5/29/2010	4:00:37 PM	BCl3 MFC set to  0.000000
5/29/2010	4:00:37 PM	PHl3 MFC set to  0.000000
5/29/2010	4:00:37 PM	SiCl4 MFC set to  0.000000
5/29/2010	4:00:37 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	4:00:37 PM	Tube furnace set to 0
5/29/2010	4:01:52 PM	Helium valve closed
5/29/2010	4:01:52 PM	H2 valve closed
5/29/2010	4:01:52 PM	BCl3 valve closed
5/29/2010	4:01:52 PM	PH3 valve closed
5/29/2010	4:01:52 PM	SiCl4 pre valve closed
5/29/2010	4:01:52 PM	SiCl4 post valve closed
5/29/2010	4:01:52 PM	Main Vac valve closed
5/29/2010	4:01:52 PM	Bypass valve closed
5/29/2010	4:01:52 PM	Bubbler valve closed
5/29/2010	4:01:52 PM	Helium MFC set to  0.000000
5/29/2010	4:01:52 PM	H2 MFC set to  0.000000
5/29/2010	4:01:52 PM	BCl3 MFC set to  0.000000
5/29/2010	4:01:52 PM	PHl3 MFC set to  0.000000
5/29/2010	4:01:52 PM	SiCl4 MFC set to  0.000000
5/29/2010	4:01:52 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	4:01:52 PM	Tube furnace set to 0
5/29/2010	4:02:07 PM	Helium valve closed
5/29/2010	4:02:07 PM	H2 valve closed
5/29/2010	4:02:07 PM	BCl3 valve closed
5/29/2010	4:02:07 PM	PH3 valve closed
5/29/2010	4:02:07 PM	SiCl4 pre valve closed
5/29/2010	4:02:07 PM	SiCl4 post valve closed
5/29/2010	4:02:07 PM	Main Vac valve closed
5/29/2010	4:02:07 PM	Bubbler valve closed
5/29/2010	4:02:07 PM	Bypass valve opened
5/29/2010	4:02:07 PM	Helium MFC set to  0.000000
5/29/2010	4:02:07 PM	H2 MFC set to  0.000000
5/29/2010	4:02:07 PM	BCl3 MFC set to  0.000000
5/29/2010	4:02:07 PM	PHl3 MFC set to  0.000000
5/29/2010	4:02:07 PM	SiCl4 MFC set to  0.000000
5/29/2010	4:02:07 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	4:02:07 PM	Tube furnace set to 0
5/29/2010	4:02:38 PM	Helium valve closed
5/29/2010	4:02:38 PM	H2 valve closed
5/29/2010	4:02:38 PM	BCl3 valve closed
5/29/2010	4:02:38 PM	PH3 valve closed
5/29/2010	4:02:38 PM	SiCl4 pre valve closed
5/29/2010	4:02:38 PM	SiCl4 post valve closed
5/29/2010	4:02:38 PM	Bubbler valve closed
5/29/2010	4:02:38 PM	Main Vac valve opened
5/29/2010	4:02:38 PM	Bypass valve opened
5/29/2010	4:02:38 PM	Helium MFC set to  0.000000
5/29/2010	4:02:38 PM	H2 MFC set to  0.000000
5/29/2010	4:02:38 PM	BCl3 MFC set to  0.000000
5/29/2010	4:02:38 PM	PHl3 MFC set to  0.000000
5/29/2010	4:02:38 PM	SiCl4 MFC set to  0.000000
5/29/2010	4:02:38 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	4:02:38 PM	Tube furnace set to 0
5/29/2010	4:07:38 PM	Helium valve closed
5/29/2010	4:07:38 PM	H2 valve closed
5/29/2010	4:07:38 PM	BCl3 valve closed
5/29/2010	4:07:38 PM	PH3 valve closed
5/29/2010	4:07:38 PM	SiCl4 pre valve closed
5/29/2010	4:07:38 PM	SiCl4 post valve closed
5/29/2010	4:07:38 PM	Bubbler valve closed
5/29/2010	4:07:38 PM	Main Vac valve opened
5/29/2010	4:07:38 PM	Bypass valve opened
5/29/2010	4:07:38 PM	Helium MFC set to  0.000000
5/29/2010	4:07:38 PM	H2 MFC set to  0.000000
5/29/2010	4:07:38 PM	BCl3 MFC set to  0.000000
5/29/2010	4:07:38 PM	PHl3 MFC set to  0.000000
5/29/2010	4:07:38 PM	SiCl4 MFC set to  0.000000
5/29/2010	4:07:38 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	4:07:38 PM	Tube furnace set to 0
5/29/2010	4:07:39 PM	Run finished at 4:07 PM
5/29/2010	4:07:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	4:28:05 PM	Recipe started at 4:28 PM
5/29/2010	4:28:05 PM	Helium valve closed
5/29/2010	4:28:05 PM	BCl3 valve closed
5/29/2010	4:28:05 PM	PH3 valve closed
5/29/2010	4:28:05 PM	SiCl4 pre valve closed
5/29/2010	4:28:05 PM	SiCl4 post valve closed
5/29/2010	4:28:05 PM	Main Vac valve closed
5/29/2010	4:28:05 PM	Bypass valve closed
5/29/2010	4:28:05 PM	Bubbler valve closed
5/29/2010	4:28:05 PM	H2 valve opened
5/29/2010	4:28:05 PM	Helium MFC set to  0.000000
5/29/2010	4:28:05 PM	H2 MFC set to  500.000000
5/29/2010	4:28:05 PM	BCl3 MFC set to  0.000000
5/29/2010	4:28:05 PM	PHl3 MFC set to  0.000000
5/29/2010	4:28:05 PM	SiCl4 MFC set to  0.000000
5/29/2010	4:28:05 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	4:28:05 PM	Tube furnace set to 0
5/29/2010	4:29:22 PM	Helium valve closed
5/29/2010	4:29:22 PM	BCl3 valve closed
5/29/2010	4:29:22 PM	PH3 valve closed
5/29/2010	4:29:22 PM	SiCl4 pre valve closed
5/29/2010	4:29:22 PM	SiCl4 post valve closed
5/29/2010	4:29:22 PM	Main Vac valve closed
5/29/2010	4:29:22 PM	Bypass valve closed
5/29/2010	4:29:22 PM	H2 valve opened
5/29/2010	4:29:22 PM	Bubbler valve opened
5/29/2010	4:29:22 PM	Helium MFC set to  0.000000
5/29/2010	4:29:22 PM	H2 MFC set to  500.000000
5/29/2010	4:29:22 PM	BCl3 MFC set to  0.000000
5/29/2010	4:29:22 PM	PHl3 MFC set to  0.000000
5/29/2010	4:29:22 PM	SiCl4 MFC set to  0.000000
5/29/2010	4:29:22 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	4:29:22 PM	Tube furnace set to 1000
5/29/2010	4:49:22 PM	Helium valve closed
5/29/2010	4:49:22 PM	PH3 valve closed
5/29/2010	4:49:22 PM	Main Vac valve closed
5/29/2010	4:49:22 PM	Bypass valve closed
5/29/2010	4:49:22 PM	H2 valve opened
5/29/2010	4:49:22 PM	BCl3 valve opened
5/29/2010	4:49:22 PM	SiCl4 pre valve opened
5/29/2010	4:49:22 PM	SiCl4 post valve opened
5/29/2010	4:49:22 PM	Bubbler valve opened
5/29/2010	4:49:22 PM	Helium MFC set to  0.000000
5/29/2010	4:49:22 PM	H2 MFC set to  500.000000
5/29/2010	4:49:22 PM	BCl3 MFC set to  35.000000
5/29/2010	4:49:22 PM	PHl3 MFC set to  0.000000
5/29/2010	4:49:22 PM	SiCl4 MFC set to  50.000000
5/29/2010	4:49:22 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	4:49:22 PM	Tube furnace set to 1000
5/29/2010	5:01:22 PM	H2 valve closed
5/29/2010	5:01:22 PM	BCl3 valve closed
5/29/2010	5:01:22 PM	PH3 valve closed
5/29/2010	5:01:22 PM	SiCl4 pre valve closed
5/29/2010	5:01:22 PM	SiCl4 post valve closed
5/29/2010	5:01:22 PM	Main Vac valve closed
5/29/2010	5:01:22 PM	Bypass valve closed
5/29/2010	5:01:22 PM	Helium valve opened
5/29/2010	5:01:22 PM	Bubbler valve opened
5/29/2010	5:01:22 PM	Helium MFC set to  500.000000
5/29/2010	5:01:22 PM	H2 MFC set to  0.000000
5/29/2010	5:01:22 PM	BCl3 MFC set to  0.000000
5/29/2010	5:01:22 PM	PHl3 MFC set to  0.000000
5/29/2010	5:01:22 PM	SiCl4 MFC set to  0.000000
5/29/2010	5:01:22 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	5:01:22 PM	Tube furnace set to 0
5/29/2010	5:21:22 PM	Helium valve closed
5/29/2010	5:21:22 PM	H2 valve closed
5/29/2010	5:21:22 PM	BCl3 valve closed
5/29/2010	5:21:22 PM	PH3 valve closed
5/29/2010	5:21:22 PM	SiCl4 pre valve closed
5/29/2010	5:21:22 PM	SiCl4 post valve closed
5/29/2010	5:21:22 PM	Main Vac valve closed
5/29/2010	5:21:22 PM	Bypass valve closed
5/29/2010	5:21:22 PM	Bubbler valve closed
5/29/2010	5:21:22 PM	Helium MFC set to  0.000000
5/29/2010	5:21:22 PM	H2 MFC set to  0.000000
5/29/2010	5:21:23 PM	BCl3 MFC set to  0.000000
5/29/2010	5:21:23 PM	PHl3 MFC set to  0.000000
5/29/2010	5:21:23 PM	SiCl4 MFC set to  0.000000
5/29/2010	5:21:23 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	5:21:23 PM	Tube furnace set to 0
5/29/2010	5:21:23 PM	Run finished at 5:21 PM
5/29/2010	5:34:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/29/2010	5:34:47 PM	Recipe started at 5:34 PM
5/29/2010	5:34:47 PM	H2 valve closed
5/29/2010	5:34:47 PM	BCl3 valve closed
5/29/2010	5:34:47 PM	PH3 valve closed
5/29/2010	5:34:47 PM	SiCl4 pre valve closed
5/29/2010	5:34:47 PM	SiCl4 post valve closed
5/29/2010	5:34:47 PM	Main Vac valve closed
5/29/2010	5:34:47 PM	Bypass valve closed
5/29/2010	5:34:47 PM	Bubbler valve closed
5/29/2010	5:34:47 PM	Helium valve opened
5/29/2010	5:34:47 PM	Helium MFC set to  500.000000
5/29/2010	5:34:47 PM	H2 MFC set to  0.000000
5/29/2010	5:34:47 PM	BCl3 MFC set to  0.000000
5/29/2010	5:34:47 PM	PHl3 MFC set to  0.000000
5/29/2010	5:34:47 PM	SiCl4 MFC set to  0.000000
5/29/2010	5:34:47 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	5:34:47 PM	Tube furnace set to 0
5/29/2010	5:34:53 PM	Helium valve closed
5/29/2010	5:34:53 PM	H2 valve closed
5/29/2010	5:34:53 PM	BCl3 valve closed
5/29/2010	5:34:53 PM	PH3 valve closed
5/29/2010	5:34:53 PM	SiCl4 pre valve closed
5/29/2010	5:34:53 PM	SiCl4 post valve closed
5/29/2010	5:34:53 PM	Main Vac valve closed
5/29/2010	5:34:53 PM	Bypass valve closed
5/29/2010	5:34:53 PM	Bubbler valve closed
5/29/2010	5:34:53 PM	Helium MFC set to  0.000000
5/29/2010	5:34:53 PM	H2 MFC set to  0.000000
5/29/2010	5:34:53 PM	BCl3 MFC set to  0.000000
5/29/2010	5:34:53 PM	PHl3 MFC set to  0.000000
5/29/2010	5:34:53 PM	SiCl4 MFC set to  0.000000
5/29/2010	5:34:53 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	5:34:53 PM	Tube furnace set to 0
5/29/2010	5:34:53 PM	Run finished at 5:34 PM
5/29/2010	5:34:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/29/2010	6:03:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2010	6:03:30 PM	Recipe started at 6:03 PM
5/29/2010	6:03:30 PM	Helium valve closed
5/29/2010	6:03:30 PM	H2 valve closed
5/29/2010	6:03:30 PM	BCl3 valve closed
5/29/2010	6:03:30 PM	PH3 valve closed
5/29/2010	6:03:30 PM	SiCl4 pre valve closed
5/29/2010	6:03:30 PM	SiCl4 post valve closed
5/29/2010	6:03:30 PM	Main Vac valve closed
5/29/2010	6:03:30 PM	Bubbler valve closed
5/29/2010	6:03:30 PM	Bypass valve opened
5/29/2010	6:03:30 PM	Helium MFC set to  0.000000
5/29/2010	6:03:30 PM	H2 MFC set to  0.000000
5/29/2010	6:03:30 PM	BCl3 MFC set to  0.000000
5/29/2010	6:03:30 PM	PHl3 MFC set to  0.000000
5/29/2010	6:03:30 PM	SiCl4 MFC set to  0.000000
5/29/2010	6:03:30 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	6:03:30 PM	Tube furnace set to 0
5/29/2010	6:04:19 PM	Helium valve closed
5/29/2010	6:04:19 PM	H2 valve closed
5/29/2010	6:04:19 PM	BCl3 valve closed
5/29/2010	6:04:19 PM	PH3 valve closed
5/29/2010	6:04:19 PM	SiCl4 pre valve closed
5/29/2010	6:04:19 PM	SiCl4 post valve closed
5/29/2010	6:04:19 PM	Bubbler valve closed
5/29/2010	6:04:19 PM	Main Vac valve opened
5/29/2010	6:04:19 PM	Bypass valve opened
5/29/2010	6:04:19 PM	Helium MFC set to  0.000000
5/29/2010	6:04:19 PM	H2 MFC set to  0.000000
5/29/2010	6:04:19 PM	BCl3 MFC set to  0.000000
5/29/2010	6:04:19 PM	PHl3 MFC set to  0.000000
5/29/2010	6:04:19 PM	SiCl4 MFC set to  0.000000
5/29/2010	6:04:19 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	6:04:20 PM	Tube furnace set to 0
5/29/2010	6:04:20 PM	Run finished at 6:04 PM
5/29/2010	6:04:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2010	6:05:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	6:05:20 PM	Recipe started at 6:05 PM
5/29/2010	6:05:20 PM	H2 valve closed
5/29/2010	6:05:20 PM	BCl3 valve closed
5/29/2010	6:05:20 PM	PH3 valve closed
5/29/2010	6:05:20 PM	SiCl4 pre valve closed
5/29/2010	6:05:20 PM	SiCl4 post valve closed
5/29/2010	6:05:20 PM	Main Vac valve closed
5/29/2010	6:05:20 PM	Bypass valve closed
5/29/2010	6:05:20 PM	Bubbler valve closed
5/29/2010	6:05:20 PM	Helium valve opened
5/29/2010	6:05:20 PM	Helium MFC set to  500.000000
5/29/2010	6:05:20 PM	H2 MFC set to  0.000000
5/29/2010	6:05:20 PM	BCl3 MFC set to  0.000000
5/29/2010	6:05:20 PM	PHl3 MFC set to  0.000000
5/29/2010	6:05:20 PM	SiCl4 MFC set to  0.000000
5/29/2010	6:05:20 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	6:05:20 PM	Tube furnace set to 0
5/29/2010	6:06:41 PM	Helium valve closed
5/29/2010	6:06:41 PM	H2 valve closed
5/29/2010	6:06:41 PM	BCl3 valve closed
5/29/2010	6:06:41 PM	PH3 valve closed
5/29/2010	6:06:41 PM	SiCl4 pre valve closed
5/29/2010	6:06:41 PM	SiCl4 post valve closed
5/29/2010	6:06:41 PM	Main Vac valve closed
5/29/2010	6:06:41 PM	Bypass valve closed
5/29/2010	6:06:41 PM	Bubbler valve closed
5/29/2010	6:06:41 PM	Helium MFC set to  0.000000
5/29/2010	6:06:41 PM	H2 MFC set to  0.000000
5/29/2010	6:06:41 PM	BCl3 MFC set to  0.000000
5/29/2010	6:06:41 PM	PHl3 MFC set to  0.000000
5/29/2010	6:06:41 PM	SiCl4 MFC set to  0.000000
5/29/2010	6:06:41 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	6:06:41 PM	Tube furnace set to 0
5/29/2010	6:06:56 PM	Helium valve closed
5/29/2010	6:06:56 PM	H2 valve closed
5/29/2010	6:06:56 PM	BCl3 valve closed
5/29/2010	6:06:56 PM	PH3 valve closed
5/29/2010	6:06:56 PM	SiCl4 pre valve closed
5/29/2010	6:06:56 PM	SiCl4 post valve closed
5/29/2010	6:06:56 PM	Main Vac valve closed
5/29/2010	6:06:56 PM	Bubbler valve closed
5/29/2010	6:06:56 PM	Bypass valve opened
5/29/2010	6:06:56 PM	Helium MFC set to  0.000000
5/29/2010	6:06:57 PM	H2 MFC set to  0.000000
5/29/2010	6:06:57 PM	BCl3 MFC set to  0.000000
5/29/2010	6:06:57 PM	PHl3 MFC set to  0.000000
5/29/2010	6:06:57 PM	SiCl4 MFC set to  0.000000
5/29/2010	6:06:57 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	6:06:57 PM	Tube furnace set to 0
5/29/2010	6:07:30 PM	Helium valve closed
5/29/2010	6:07:30 PM	H2 valve closed
5/29/2010	6:07:30 PM	BCl3 valve closed
5/29/2010	6:07:30 PM	PH3 valve closed
5/29/2010	6:07:30 PM	SiCl4 pre valve closed
5/29/2010	6:07:30 PM	SiCl4 post valve closed
5/29/2010	6:07:30 PM	Bubbler valve closed
5/29/2010	6:07:30 PM	Main Vac valve opened
5/29/2010	6:07:30 PM	Bypass valve opened
5/29/2010	6:07:30 PM	Helium MFC set to  0.000000
5/29/2010	6:07:30 PM	H2 MFC set to  0.000000
5/29/2010	6:07:30 PM	BCl3 MFC set to  0.000000
5/29/2010	6:07:30 PM	PHl3 MFC set to  0.000000
5/29/2010	6:07:30 PM	SiCl4 MFC set to  0.000000
5/29/2010	6:07:30 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	6:07:30 PM	Tube furnace set to 0
5/29/2010	6:12:30 PM	H2 valve closed
5/29/2010	6:12:30 PM	BCl3 valve closed
5/29/2010	6:12:30 PM	PH3 valve closed
5/29/2010	6:12:30 PM	SiCl4 pre valve closed
5/29/2010	6:12:30 PM	SiCl4 post valve closed
5/29/2010	6:12:30 PM	Main Vac valve closed
5/29/2010	6:12:30 PM	Bypass valve closed
5/29/2010	6:12:30 PM	Bubbler valve closed
5/29/2010	6:12:30 PM	Helium valve opened
5/29/2010	6:12:30 PM	Helium MFC set to  500.000000
5/29/2010	6:12:30 PM	H2 MFC set to  0.000000
5/29/2010	6:12:30 PM	BCl3 MFC set to  0.000000
5/29/2010	6:12:30 PM	PHl3 MFC set to  0.000000
5/29/2010	6:12:30 PM	SiCl4 MFC set to  0.000000
5/29/2010	6:12:30 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	6:12:30 PM	Tube furnace set to 0
5/29/2010	6:13:50 PM	Helium valve closed
5/29/2010	6:13:50 PM	H2 valve closed
5/29/2010	6:13:50 PM	BCl3 valve closed
5/29/2010	6:13:50 PM	PH3 valve closed
5/29/2010	6:13:50 PM	SiCl4 pre valve closed
5/29/2010	6:13:50 PM	SiCl4 post valve closed
5/29/2010	6:13:50 PM	Main Vac valve closed
5/29/2010	6:13:50 PM	Bypass valve closed
5/29/2010	6:13:50 PM	Bubbler valve closed
5/29/2010	6:13:50 PM	Helium MFC set to  0.000000
5/29/2010	6:13:50 PM	H2 MFC set to  0.000000
5/29/2010	6:13:50 PM	BCl3 MFC set to  0.000000
5/29/2010	6:13:50 PM	PHl3 MFC set to  0.000000
5/29/2010	6:13:50 PM	SiCl4 MFC set to  0.000000
5/29/2010	6:13:50 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	6:13:50 PM	Tube furnace set to 0
5/29/2010	6:14:05 PM	Helium valve closed
5/29/2010	6:14:05 PM	H2 valve closed
5/29/2010	6:14:05 PM	BCl3 valve closed
5/29/2010	6:14:05 PM	PH3 valve closed
5/29/2010	6:14:05 PM	SiCl4 pre valve closed
5/29/2010	6:14:05 PM	SiCl4 post valve closed
5/29/2010	6:14:05 PM	Main Vac valve closed
5/29/2010	6:14:05 PM	Bubbler valve closed
5/29/2010	6:14:05 PM	Bypass valve opened
5/29/2010	6:14:05 PM	Helium MFC set to  0.000000
5/29/2010	6:14:05 PM	H2 MFC set to  0.000000
5/29/2010	6:14:06 PM	BCl3 MFC set to  0.000000
5/29/2010	6:14:06 PM	PHl3 MFC set to  0.000000
5/29/2010	6:14:06 PM	SiCl4 MFC set to  0.000000
5/29/2010	6:14:06 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	6:14:06 PM	Tube furnace set to 0
5/29/2010	6:14:38 PM	Helium valve closed
5/29/2010	6:14:38 PM	H2 valve closed
5/29/2010	6:14:38 PM	BCl3 valve closed
5/29/2010	6:14:38 PM	PH3 valve closed
5/29/2010	6:14:38 PM	SiCl4 pre valve closed
5/29/2010	6:14:38 PM	SiCl4 post valve closed
5/29/2010	6:14:38 PM	Bubbler valve closed
5/29/2010	6:14:38 PM	Main Vac valve opened
5/29/2010	6:14:38 PM	Bypass valve opened
5/29/2010	6:14:38 PM	Helium MFC set to  0.000000
5/29/2010	6:14:38 PM	H2 MFC set to  0.000000
5/29/2010	6:14:38 PM	BCl3 MFC set to  0.000000
5/29/2010	6:14:38 PM	PHl3 MFC set to  0.000000
5/29/2010	6:14:38 PM	SiCl4 MFC set to  0.000000
5/29/2010	6:14:38 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	6:14:38 PM	Tube furnace set to 0
5/29/2010	6:19:38 PM	H2 valve closed
5/29/2010	6:19:38 PM	BCl3 valve closed
5/29/2010	6:19:38 PM	PH3 valve closed
5/29/2010	6:19:38 PM	SiCl4 pre valve closed
5/29/2010	6:19:38 PM	SiCl4 post valve closed
5/29/2010	6:19:38 PM	Main Vac valve closed
5/29/2010	6:19:38 PM	Bypass valve closed
5/29/2010	6:19:38 PM	Bubbler valve closed
5/29/2010	6:19:38 PM	Helium valve opened
5/29/2010	6:19:38 PM	Helium MFC set to  500.000000
5/29/2010	6:19:38 PM	H2 MFC set to  0.000000
5/29/2010	6:19:38 PM	BCl3 MFC set to  0.000000
5/29/2010	6:19:38 PM	PHl3 MFC set to  0.000000
5/29/2010	6:19:38 PM	SiCl4 MFC set to  0.000000
5/29/2010	6:19:38 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	6:19:39 PM	Tube furnace set to 0
5/29/2010	6:20:59 PM	Helium valve closed
5/29/2010	6:20:59 PM	H2 valve closed
5/29/2010	6:20:59 PM	BCl3 valve closed
5/29/2010	6:20:59 PM	PH3 valve closed
5/29/2010	6:20:59 PM	SiCl4 pre valve closed
5/29/2010	6:20:59 PM	SiCl4 post valve closed
5/29/2010	6:20:59 PM	Main Vac valve closed
5/29/2010	6:20:59 PM	Bypass valve closed
5/29/2010	6:20:59 PM	Bubbler valve closed
5/29/2010	6:20:59 PM	Helium MFC set to  0.000000
5/29/2010	6:20:59 PM	H2 MFC set to  0.000000
5/29/2010	6:20:59 PM	BCl3 MFC set to  0.000000
5/29/2010	6:20:59 PM	PHl3 MFC set to  0.000000
5/29/2010	6:20:59 PM	SiCl4 MFC set to  0.000000
5/29/2010	6:20:59 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	6:20:59 PM	Tube furnace set to 0
5/29/2010	6:21:14 PM	Helium valve closed
5/29/2010	6:21:14 PM	H2 valve closed
5/29/2010	6:21:14 PM	BCl3 valve closed
5/29/2010	6:21:14 PM	PH3 valve closed
5/29/2010	6:21:14 PM	SiCl4 pre valve closed
5/29/2010	6:21:14 PM	SiCl4 post valve closed
5/29/2010	6:21:14 PM	Main Vac valve closed
5/29/2010	6:21:14 PM	Bubbler valve closed
5/29/2010	6:21:14 PM	Bypass valve opened
5/29/2010	6:21:14 PM	Helium MFC set to  0.000000
5/29/2010	6:21:14 PM	H2 MFC set to  0.000000
5/29/2010	6:21:14 PM	BCl3 MFC set to  0.000000
5/29/2010	6:21:14 PM	PHl3 MFC set to  0.000000
5/29/2010	6:21:14 PM	SiCl4 MFC set to  0.000000
5/29/2010	6:21:14 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	6:21:14 PM	Tube furnace set to 0
5/29/2010	6:21:46 PM	Helium valve closed
5/29/2010	6:21:46 PM	H2 valve closed
5/29/2010	6:21:46 PM	BCl3 valve closed
5/29/2010	6:21:46 PM	PH3 valve closed
5/29/2010	6:21:46 PM	SiCl4 pre valve closed
5/29/2010	6:21:46 PM	SiCl4 post valve closed
5/29/2010	6:21:46 PM	Bubbler valve closed
5/29/2010	6:21:46 PM	Main Vac valve opened
5/29/2010	6:21:46 PM	Bypass valve opened
5/29/2010	6:21:46 PM	Helium MFC set to  0.000000
5/29/2010	6:21:46 PM	H2 MFC set to  0.000000
5/29/2010	6:21:46 PM	BCl3 MFC set to  0.000000
5/29/2010	6:21:46 PM	PHl3 MFC set to  0.000000
5/29/2010	6:21:46 PM	SiCl4 MFC set to  0.000000
5/29/2010	6:21:46 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	6:21:47 PM	Tube furnace set to 0
5/29/2010	6:26:47 PM	Helium valve closed
5/29/2010	6:26:47 PM	H2 valve closed
5/29/2010	6:26:47 PM	BCl3 valve closed
5/29/2010	6:26:47 PM	PH3 valve closed
5/29/2010	6:26:47 PM	SiCl4 pre valve closed
5/29/2010	6:26:47 PM	SiCl4 post valve closed
5/29/2010	6:26:47 PM	Bubbler valve closed
5/29/2010	6:26:47 PM	Main Vac valve opened
5/29/2010	6:26:47 PM	Bypass valve opened
5/29/2010	6:26:47 PM	Helium MFC set to  0.000000
5/29/2010	6:26:47 PM	H2 MFC set to  0.000000
5/29/2010	6:26:47 PM	BCl3 MFC set to  0.000000
5/29/2010	6:26:47 PM	PHl3 MFC set to  0.000000
5/29/2010	6:26:47 PM	SiCl4 MFC set to  0.000000
5/29/2010	6:26:47 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	6:26:47 PM	Tube furnace set to 0
5/29/2010	6:26:48 PM	Run finished at 6:26 PM
5/29/2010	6:26:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	7:23:37 PM	Tube furnace set to 400
5/29/2010	7:32:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/29/2010	7:32:06 PM	Recipe started at 7:32 PM
5/29/2010	7:32:06 PM	Helium valve closed
5/29/2010	7:32:06 PM	H2 valve closed
5/29/2010	7:32:06 PM	BCl3 valve closed
5/29/2010	7:32:06 PM	PH3 valve closed
5/29/2010	7:32:06 PM	SiCl4 pre valve closed
5/29/2010	7:32:06 PM	SiCl4 post valve closed
5/29/2010	7:32:06 PM	Main Vac valve closed
5/29/2010	7:32:06 PM	Bypass valve closed
5/29/2010	7:32:06 PM	Bubbler valve closed
5/29/2010	7:32:06 PM	Helium MFC set to  0.000000
5/29/2010	7:32:06 PM	H2 MFC set to  0.000000
5/29/2010	7:32:06 PM	BCl3 MFC set to  0.000000
5/29/2010	7:32:06 PM	PHl3 MFC set to  0.000000
5/29/2010	7:32:06 PM	SiCl4 MFC set to  0.000000
5/29/2010	7:32:06 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	7:32:06 PM	Tube furnace set to 0
5/29/2010	7:32:06 PM	Run finished at 7:32 PM
5/29/2010	7:32:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/29/2010	7:32:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	7:32:22 PM	Recipe started at 7:32 PM
5/29/2010	7:32:22 PM	H2 valve closed
5/29/2010	7:32:22 PM	BCl3 valve closed
5/29/2010	7:32:22 PM	PH3 valve closed
5/29/2010	7:32:22 PM	SiCl4 pre valve closed
5/29/2010	7:32:22 PM	SiCl4 post valve closed
5/29/2010	7:32:22 PM	Main Vac valve closed
5/29/2010	7:32:22 PM	Bypass valve closed
5/29/2010	7:32:22 PM	Bubbler valve closed
5/29/2010	7:32:22 PM	Helium valve opened
5/29/2010	7:32:22 PM	Helium MFC set to  500.000000
5/29/2010	7:32:22 PM	H2 MFC set to  0.000000
5/29/2010	7:32:22 PM	BCl3 MFC set to  0.000000
5/29/2010	7:32:22 PM	PHl3 MFC set to  0.000000
5/29/2010	7:32:22 PM	SiCl4 MFC set to  0.000000
5/29/2010	7:32:22 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	7:32:22 PM	Tube furnace set to 0
5/29/2010	7:33:35 PM	Helium valve closed
5/29/2010	7:33:35 PM	H2 valve closed
5/29/2010	7:33:35 PM	BCl3 valve closed
5/29/2010	7:33:35 PM	PH3 valve closed
5/29/2010	7:33:35 PM	SiCl4 pre valve closed
5/29/2010	7:33:35 PM	SiCl4 post valve closed
5/29/2010	7:33:35 PM	Main Vac valve closed
5/29/2010	7:33:35 PM	Bypass valve closed
5/29/2010	7:33:35 PM	Bubbler valve closed
5/29/2010	7:33:35 PM	Helium MFC set to  0.000000
5/29/2010	7:33:35 PM	H2 MFC set to  0.000000
5/29/2010	7:33:35 PM	BCl3 MFC set to  0.000000
5/29/2010	7:33:35 PM	PHl3 MFC set to  0.000000
5/29/2010	7:33:35 PM	SiCl4 MFC set to  0.000000
5/29/2010	7:33:35 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	7:33:35 PM	Tube furnace set to 0
5/29/2010	7:33:50 PM	Helium valve closed
5/29/2010	7:33:50 PM	H2 valve closed
5/29/2010	7:33:50 PM	BCl3 valve closed
5/29/2010	7:33:50 PM	PH3 valve closed
5/29/2010	7:33:50 PM	SiCl4 pre valve closed
5/29/2010	7:33:50 PM	SiCl4 post valve closed
5/29/2010	7:33:50 PM	Main Vac valve closed
5/29/2010	7:33:50 PM	Bubbler valve closed
5/29/2010	7:33:50 PM	Bypass valve opened
5/29/2010	7:33:50 PM	Helium MFC set to  0.000000
5/29/2010	7:33:50 PM	H2 MFC set to  0.000000
5/29/2010	7:33:50 PM	BCl3 MFC set to  0.000000
5/29/2010	7:33:50 PM	PHl3 MFC set to  0.000000
5/29/2010	7:33:50 PM	SiCl4 MFC set to  0.000000
5/29/2010	7:33:50 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	7:33:51 PM	Tube furnace set to 0
5/29/2010	7:34:21 PM	Helium valve closed
5/29/2010	7:34:21 PM	H2 valve closed
5/29/2010	7:34:21 PM	BCl3 valve closed
5/29/2010	7:34:21 PM	PH3 valve closed
5/29/2010	7:34:21 PM	SiCl4 pre valve closed
5/29/2010	7:34:21 PM	SiCl4 post valve closed
5/29/2010	7:34:21 PM	Bubbler valve closed
5/29/2010	7:34:21 PM	Main Vac valve opened
5/29/2010	7:34:21 PM	Bypass valve opened
5/29/2010	7:34:21 PM	Helium MFC set to  0.000000
5/29/2010	7:34:21 PM	H2 MFC set to  0.000000
5/29/2010	7:34:21 PM	BCl3 MFC set to  0.000000
5/29/2010	7:34:21 PM	PHl3 MFC set to  0.000000
5/29/2010	7:34:21 PM	SiCl4 MFC set to  0.000000
5/29/2010	7:34:21 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	7:34:21 PM	Tube furnace set to 0
5/29/2010	7:34:23 PM	Run aborted at 7:34 PM
5/29/2010	7:34:23 PM	Helium valve closed
5/29/2010	7:34:23 PM	H2 valve closed
5/29/2010	7:34:23 PM	BCl3 valve closed
5/29/2010	7:34:23 PM	PH3 valve closed
5/29/2010	7:34:23 PM	SiCl4 pre valve closed
5/29/2010	7:34:23 PM	SiCl4 post valve closed
5/29/2010	7:34:23 PM	Bypass valve closed
5/29/2010	7:34:23 PM	Main Vac valve closed
5/29/2010	7:34:23 PM	Bubbler valve closed
5/29/2010	7:34:23 PM	Helium MFC set to  0.000000
5/29/2010	7:34:23 PM	H2 MFC set to  0.000000
5/29/2010	7:34:23 PM	BCl3 MFC set to  0.000000
5/29/2010	7:34:23 PM	PHl3 MFC set to  0.000000
5/29/2010	7:34:23 PM	SiCl4 MFC set to  0.000000
5/29/2010	7:34:23 PM	Tube furnace set to 0
5/29/2010	7:34:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	7:34:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2010	7:34:24 PM	Recipe started at 7:34 PM
5/29/2010	7:34:24 PM	Helium valve closed
5/29/2010	7:34:24 PM	H2 valve closed
5/29/2010	7:34:24 PM	BCl3 valve closed
5/29/2010	7:34:24 PM	PH3 valve closed
5/29/2010	7:34:24 PM	SiCl4 pre valve closed
5/29/2010	7:34:24 PM	SiCl4 post valve closed
5/29/2010	7:34:24 PM	Main Vac valve closed
5/29/2010	7:34:24 PM	Bubbler valve closed
5/29/2010	7:34:24 PM	Bypass valve opened
5/29/2010	7:34:24 PM	Helium MFC set to  0.000000
5/29/2010	7:34:24 PM	H2 MFC set to  0.000000
5/29/2010	7:34:24 PM	BCl3 MFC set to  0.000000
5/29/2010	7:34:24 PM	PHl3 MFC set to  0.000000
5/29/2010	7:34:24 PM	SiCl4 MFC set to  0.000000
5/29/2010	7:34:24 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	7:34:24 PM	Tube furnace set to 0
5/29/2010	7:34:24 PM	Helium valve closed
5/29/2010	7:34:24 PM	H2 valve closed
5/29/2010	7:34:24 PM	BCl3 valve closed
5/29/2010	7:34:24 PM	PH3 valve closed
5/29/2010	7:34:24 PM	SiCl4 pre valve closed
5/29/2010	7:34:24 PM	SiCl4 post valve closed
5/29/2010	7:34:24 PM	Bubbler valve closed
5/29/2010	7:34:24 PM	Main Vac valve opened
5/29/2010	7:34:24 PM	Bypass valve opened
5/29/2010	7:34:24 PM	Helium MFC set to  0.000000
5/29/2010	7:34:24 PM	H2 MFC set to  0.000000
5/29/2010	7:34:24 PM	BCl3 MFC set to  0.000000
5/29/2010	7:34:24 PM	PHl3 MFC set to  0.000000
5/29/2010	7:34:24 PM	SiCl4 MFC set to  0.000000
5/29/2010	7:34:24 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	7:34:25 PM	Tube furnace set to 0
5/29/2010	7:34:25 PM	Run finished at 7:34 PM
5/29/2010	7:34:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2010	7:39:38 PM	Recipe started at 7:39 PM
5/29/2010	7:39:38 PM	Helium valve closed
5/29/2010	7:39:38 PM	BCl3 valve closed
5/29/2010	7:39:38 PM	PH3 valve closed
5/29/2010	7:39:38 PM	SiCl4 pre valve closed
5/29/2010	7:39:38 PM	SiCl4 post valve closed
5/29/2010	7:39:38 PM	Main Vac valve closed
5/29/2010	7:39:38 PM	Bypass valve closed
5/29/2010	7:39:38 PM	Bubbler valve closed
5/29/2010	7:39:38 PM	H2 valve opened
5/29/2010	7:39:38 PM	Helium MFC set to  0.000000
5/29/2010	7:39:38 PM	H2 MFC set to  500.000000
5/29/2010	7:39:38 PM	BCl3 MFC set to  0.000000
5/29/2010	7:39:38 PM	PHl3 MFC set to  0.000000
5/29/2010	7:39:38 PM	SiCl4 MFC set to  0.000000
5/29/2010	7:39:38 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	7:39:38 PM	Tube furnace set to 0
5/29/2010	7:40:53 PM	Helium valve closed
5/29/2010	7:40:53 PM	BCl3 valve closed
5/29/2010	7:40:53 PM	PH3 valve closed
5/29/2010	7:40:53 PM	SiCl4 pre valve closed
5/29/2010	7:40:53 PM	SiCl4 post valve closed
5/29/2010	7:40:53 PM	Main Vac valve closed
5/29/2010	7:40:53 PM	Bypass valve closed
5/29/2010	7:40:53 PM	H2 valve opened
5/29/2010	7:40:53 PM	Bubbler valve opened
5/29/2010	7:40:53 PM	Helium MFC set to  0.000000
5/29/2010	7:40:53 PM	H2 MFC set to  500.000000
5/29/2010	7:40:53 PM	BCl3 MFC set to  0.000000
5/29/2010	7:40:53 PM	PHl3 MFC set to  0.000000
5/29/2010	7:40:53 PM	SiCl4 MFC set to  0.000000
5/29/2010	7:40:53 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	7:40:53 PM	Tube furnace set to 1000
5/29/2010	8:00:53 PM	Helium valve closed
5/29/2010	8:00:53 PM	PH3 valve closed
5/29/2010	8:00:53 PM	Main Vac valve closed
5/29/2010	8:00:53 PM	Bypass valve closed
5/29/2010	8:00:53 PM	H2 valve opened
5/29/2010	8:00:53 PM	BCl3 valve opened
5/29/2010	8:00:53 PM	SiCl4 pre valve opened
5/29/2010	8:00:53 PM	SiCl4 post valve opened
5/29/2010	8:00:53 PM	Bubbler valve opened
5/29/2010	8:00:53 PM	Helium MFC set to  0.000000
5/29/2010	8:00:53 PM	H2 MFC set to  500.000000
5/29/2010	8:00:53 PM	BCl3 MFC set to  35.000000
5/29/2010	8:00:53 PM	PHl3 MFC set to  0.000000
5/29/2010	8:00:53 PM	SiCl4 MFC set to  50.000000
5/29/2010	8:00:53 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	8:00:53 PM	Tube furnace set to 1000
5/29/2010	8:12:53 PM	H2 valve closed
5/29/2010	8:12:53 PM	BCl3 valve closed
5/29/2010	8:12:53 PM	PH3 valve closed
5/29/2010	8:12:53 PM	SiCl4 pre valve closed
5/29/2010	8:12:53 PM	SiCl4 post valve closed
5/29/2010	8:12:53 PM	Main Vac valve closed
5/29/2010	8:12:53 PM	Bypass valve closed
5/29/2010	8:12:53 PM	Helium valve opened
5/29/2010	8:12:53 PM	Bubbler valve opened
5/29/2010	8:12:53 PM	Helium MFC set to  500.000000
5/29/2010	8:12:53 PM	H2 MFC set to  0.000000
5/29/2010	8:12:53 PM	BCl3 MFC set to  0.000000
5/29/2010	8:12:53 PM	PHl3 MFC set to  0.000000
5/29/2010	8:12:53 PM	SiCl4 MFC set to  0.000000
5/29/2010	8:12:53 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	8:12:53 PM	Tube furnace set to 0
5/29/2010	8:32:53 PM	Helium valve closed
5/29/2010	8:32:53 PM	H2 valve closed
5/29/2010	8:32:53 PM	BCl3 valve closed
5/29/2010	8:32:53 PM	PH3 valve closed
5/29/2010	8:32:53 PM	SiCl4 pre valve closed
5/29/2010	8:32:53 PM	SiCl4 post valve closed
5/29/2010	8:32:53 PM	Main Vac valve closed
5/29/2010	8:32:53 PM	Bypass valve closed
5/29/2010	8:32:53 PM	Bubbler valve closed
5/29/2010	8:32:53 PM	Helium MFC set to  0.000000
5/29/2010	8:32:53 PM	H2 MFC set to  0.000000
5/29/2010	8:32:53 PM	BCl3 MFC set to  0.000000
5/29/2010	8:32:53 PM	PHl3 MFC set to  0.000000
5/29/2010	8:32:53 PM	SiCl4 MFC set to  0.000000
5/29/2010	8:32:53 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	8:32:53 PM	Tube furnace set to 0
5/29/2010	8:32:54 PM	Run finished at 8:32 PM
5/29/2010	8:39:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2010	8:39:28 PM	Recipe started at 8:39 PM
5/29/2010	8:39:28 PM	Helium valve closed
5/29/2010	8:39:28 PM	H2 valve closed
5/29/2010	8:39:28 PM	BCl3 valve closed
5/29/2010	8:39:28 PM	PH3 valve closed
5/29/2010	8:39:28 PM	SiCl4 pre valve closed
5/29/2010	8:39:28 PM	SiCl4 post valve closed
5/29/2010	8:39:28 PM	Main Vac valve closed
5/29/2010	8:39:28 PM	Bubbler valve closed
5/29/2010	8:39:28 PM	Bypass valve opened
5/29/2010	8:39:28 PM	Helium MFC set to  0.000000
5/29/2010	8:39:28 PM	H2 MFC set to  0.000000
5/29/2010	8:39:28 PM	BCl3 MFC set to  0.000000
5/29/2010	8:39:28 PM	PHl3 MFC set to  0.000000
5/29/2010	8:39:28 PM	SiCl4 MFC set to  0.000000
5/29/2010	8:39:28 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	8:39:28 PM	Tube furnace set to 0
5/29/2010	8:40:13 PM	Helium valve closed
5/29/2010	8:40:13 PM	H2 valve closed
5/29/2010	8:40:13 PM	BCl3 valve closed
5/29/2010	8:40:13 PM	PH3 valve closed
5/29/2010	8:40:13 PM	SiCl4 pre valve closed
5/29/2010	8:40:13 PM	SiCl4 post valve closed
5/29/2010	8:40:13 PM	Bubbler valve closed
5/29/2010	8:40:13 PM	Main Vac valve opened
5/29/2010	8:40:13 PM	Bypass valve opened
5/29/2010	8:40:13 PM	Helium MFC set to  0.000000
5/29/2010	8:40:13 PM	H2 MFC set to  0.000000
5/29/2010	8:40:13 PM	BCl3 MFC set to  0.000000
5/29/2010	8:40:13 PM	PHl3 MFC set to  0.000000
5/29/2010	8:40:13 PM	SiCl4 MFC set to  0.000000
5/29/2010	8:40:13 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	8:40:13 PM	Tube furnace set to 0
5/29/2010	8:40:13 PM	Run finished at 8:40 PM
5/29/2010	8:40:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2010	8:40:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	8:40:44 PM	Recipe started at 8:40 PM
5/29/2010	8:40:44 PM	H2 valve closed
5/29/2010	8:40:44 PM	BCl3 valve closed
5/29/2010	8:40:44 PM	PH3 valve closed
5/29/2010	8:40:44 PM	SiCl4 pre valve closed
5/29/2010	8:40:44 PM	SiCl4 post valve closed
5/29/2010	8:40:44 PM	Main Vac valve closed
5/29/2010	8:40:44 PM	Bypass valve closed
5/29/2010	8:40:44 PM	Bubbler valve closed
5/29/2010	8:40:44 PM	Helium valve opened
5/29/2010	8:40:44 PM	Helium MFC set to  500.000000
5/29/2010	8:40:44 PM	H2 MFC set to  0.000000
5/29/2010	8:40:44 PM	BCl3 MFC set to  0.000000
5/29/2010	8:40:44 PM	PHl3 MFC set to  0.000000
5/29/2010	8:40:44 PM	SiCl4 MFC set to  0.000000
5/29/2010	8:40:44 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	8:40:44 PM	Tube furnace set to 0
5/29/2010	8:42:01 PM	Helium valve closed
5/29/2010	8:42:01 PM	H2 valve closed
5/29/2010	8:42:01 PM	BCl3 valve closed
5/29/2010	8:42:01 PM	PH3 valve closed
5/29/2010	8:42:01 PM	SiCl4 pre valve closed
5/29/2010	8:42:01 PM	SiCl4 post valve closed
5/29/2010	8:42:01 PM	Main Vac valve closed
5/29/2010	8:42:01 PM	Bypass valve closed
5/29/2010	8:42:01 PM	Bubbler valve closed
5/29/2010	8:42:01 PM	Helium MFC set to  0.000000
5/29/2010	8:42:01 PM	H2 MFC set to  0.000000
5/29/2010	8:42:01 PM	BCl3 MFC set to  0.000000
5/29/2010	8:42:01 PM	PHl3 MFC set to  0.000000
5/29/2010	8:42:01 PM	SiCl4 MFC set to  0.000000
5/29/2010	8:42:01 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	8:42:01 PM	Tube furnace set to 0
5/29/2010	8:42:16 PM	Helium valve closed
5/29/2010	8:42:16 PM	H2 valve closed
5/29/2010	8:42:16 PM	BCl3 valve closed
5/29/2010	8:42:16 PM	PH3 valve closed
5/29/2010	8:42:16 PM	SiCl4 pre valve closed
5/29/2010	8:42:16 PM	SiCl4 post valve closed
5/29/2010	8:42:16 PM	Main Vac valve closed
5/29/2010	8:42:16 PM	Bubbler valve closed
5/29/2010	8:42:16 PM	Bypass valve opened
5/29/2010	8:42:16 PM	Helium MFC set to  0.000000
5/29/2010	8:42:16 PM	H2 MFC set to  0.000000
5/29/2010	8:42:16 PM	BCl3 MFC set to  0.000000
5/29/2010	8:42:16 PM	PHl3 MFC set to  0.000000
5/29/2010	8:42:16 PM	SiCl4 MFC set to  0.000000
5/29/2010	8:42:16 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	8:42:16 PM	Tube furnace set to 0
5/29/2010	8:42:47 PM	Helium valve closed
5/29/2010	8:42:47 PM	H2 valve closed
5/29/2010	8:42:47 PM	BCl3 valve closed
5/29/2010	8:42:47 PM	PH3 valve closed
5/29/2010	8:42:47 PM	SiCl4 pre valve closed
5/29/2010	8:42:47 PM	SiCl4 post valve closed
5/29/2010	8:42:47 PM	Bubbler valve closed
5/29/2010	8:42:47 PM	Main Vac valve opened
5/29/2010	8:42:47 PM	Bypass valve opened
5/29/2010	8:42:47 PM	Helium MFC set to  0.000000
5/29/2010	8:42:47 PM	H2 MFC set to  0.000000
5/29/2010	8:42:47 PM	BCl3 MFC set to  0.000000
5/29/2010	8:42:47 PM	PHl3 MFC set to  0.000000
5/29/2010	8:42:47 PM	SiCl4 MFC set to  0.000000
5/29/2010	8:42:47 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	8:42:47 PM	Tube furnace set to 0
5/29/2010	8:47:47 PM	H2 valve closed
5/29/2010	8:47:47 PM	BCl3 valve closed
5/29/2010	8:47:47 PM	PH3 valve closed
5/29/2010	8:47:47 PM	SiCl4 pre valve closed
5/29/2010	8:47:47 PM	SiCl4 post valve closed
5/29/2010	8:47:47 PM	Main Vac valve closed
5/29/2010	8:47:47 PM	Bypass valve closed
5/29/2010	8:47:47 PM	Bubbler valve closed
5/29/2010	8:47:47 PM	Helium valve opened
5/29/2010	8:47:47 PM	Helium MFC set to  500.000000
5/29/2010	8:47:47 PM	H2 MFC set to  0.000000
5/29/2010	8:47:47 PM	BCl3 MFC set to  0.000000
5/29/2010	8:47:47 PM	PHl3 MFC set to  0.000000
5/29/2010	8:47:47 PM	SiCl4 MFC set to  0.000000
5/29/2010	8:47:47 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	8:47:47 PM	Tube furnace set to 0
5/29/2010	8:49:03 PM	Helium valve closed
5/29/2010	8:49:03 PM	H2 valve closed
5/29/2010	8:49:03 PM	BCl3 valve closed
5/29/2010	8:49:03 PM	PH3 valve closed
5/29/2010	8:49:03 PM	SiCl4 pre valve closed
5/29/2010	8:49:03 PM	SiCl4 post valve closed
5/29/2010	8:49:03 PM	Main Vac valve closed
5/29/2010	8:49:03 PM	Bypass valve closed
5/29/2010	8:49:03 PM	Bubbler valve closed
5/29/2010	8:49:03 PM	Helium MFC set to  0.000000
5/29/2010	8:49:03 PM	H2 MFC set to  0.000000
5/29/2010	8:49:03 PM	BCl3 MFC set to  0.000000
5/29/2010	8:49:03 PM	PHl3 MFC set to  0.000000
5/29/2010	8:49:03 PM	SiCl4 MFC set to  0.000000
5/29/2010	8:49:03 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	8:49:03 PM	Tube furnace set to 0
5/29/2010	8:49:18 PM	Helium valve closed
5/29/2010	8:49:18 PM	H2 valve closed
5/29/2010	8:49:18 PM	BCl3 valve closed
5/29/2010	8:49:18 PM	PH3 valve closed
5/29/2010	8:49:18 PM	SiCl4 pre valve closed
5/29/2010	8:49:18 PM	SiCl4 post valve closed
5/29/2010	8:49:18 PM	Main Vac valve closed
5/29/2010	8:49:18 PM	Bubbler valve closed
5/29/2010	8:49:18 PM	Bypass valve opened
5/29/2010	8:49:18 PM	Helium MFC set to  0.000000
5/29/2010	8:49:18 PM	H2 MFC set to  0.000000
5/29/2010	8:49:18 PM	BCl3 MFC set to  0.000000
5/29/2010	8:49:18 PM	PHl3 MFC set to  0.000000
5/29/2010	8:49:18 PM	SiCl4 MFC set to  0.000000
5/29/2010	8:49:18 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	8:49:18 PM	Tube furnace set to 0
5/29/2010	8:49:49 PM	Helium valve closed
5/29/2010	8:49:49 PM	H2 valve closed
5/29/2010	8:49:49 PM	BCl3 valve closed
5/29/2010	8:49:49 PM	PH3 valve closed
5/29/2010	8:49:49 PM	SiCl4 pre valve closed
5/29/2010	8:49:49 PM	SiCl4 post valve closed
5/29/2010	8:49:49 PM	Bubbler valve closed
5/29/2010	8:49:49 PM	Main Vac valve opened
5/29/2010	8:49:49 PM	Bypass valve opened
5/29/2010	8:49:49 PM	Helium MFC set to  0.000000
5/29/2010	8:49:49 PM	H2 MFC set to  0.000000
5/29/2010	8:49:49 PM	BCl3 MFC set to  0.000000
5/29/2010	8:49:49 PM	PHl3 MFC set to  0.000000
5/29/2010	8:49:49 PM	SiCl4 MFC set to  0.000000
5/29/2010	8:49:49 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	8:49:49 PM	Tube furnace set to 0
5/29/2010	8:54:49 PM	H2 valve closed
5/29/2010	8:54:49 PM	BCl3 valve closed
5/29/2010	8:54:49 PM	PH3 valve closed
5/29/2010	8:54:49 PM	SiCl4 pre valve closed
5/29/2010	8:54:49 PM	SiCl4 post valve closed
5/29/2010	8:54:49 PM	Main Vac valve closed
5/29/2010	8:54:49 PM	Bypass valve closed
5/29/2010	8:54:49 PM	Bubbler valve closed
5/29/2010	8:54:49 PM	Helium valve opened
5/29/2010	8:54:49 PM	Helium MFC set to  500.000000
5/29/2010	8:54:49 PM	H2 MFC set to  0.000000
5/29/2010	8:54:49 PM	BCl3 MFC set to  0.000000
5/29/2010	8:54:49 PM	PHl3 MFC set to  0.000000
5/29/2010	8:54:49 PM	SiCl4 MFC set to  0.000000
5/29/2010	8:54:49 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	8:54:49 PM	Tube furnace set to 0
5/29/2010	8:56:05 PM	Helium valve closed
5/29/2010	8:56:05 PM	H2 valve closed
5/29/2010	8:56:05 PM	BCl3 valve closed
5/29/2010	8:56:05 PM	PH3 valve closed
5/29/2010	8:56:05 PM	SiCl4 pre valve closed
5/29/2010	8:56:05 PM	SiCl4 post valve closed
5/29/2010	8:56:05 PM	Main Vac valve closed
5/29/2010	8:56:05 PM	Bypass valve closed
5/29/2010	8:56:05 PM	Bubbler valve closed
5/29/2010	8:56:05 PM	Helium MFC set to  0.000000
5/29/2010	8:56:05 PM	H2 MFC set to  0.000000
5/29/2010	8:56:05 PM	BCl3 MFC set to  0.000000
5/29/2010	8:56:05 PM	PHl3 MFC set to  0.000000
5/29/2010	8:56:05 PM	SiCl4 MFC set to  0.000000
5/29/2010	8:56:05 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	8:56:05 PM	Tube furnace set to 0
5/29/2010	8:56:20 PM	Helium valve closed
5/29/2010	8:56:20 PM	H2 valve closed
5/29/2010	8:56:20 PM	BCl3 valve closed
5/29/2010	8:56:20 PM	PH3 valve closed
5/29/2010	8:56:20 PM	SiCl4 pre valve closed
5/29/2010	8:56:20 PM	SiCl4 post valve closed
5/29/2010	8:56:20 PM	Main Vac valve closed
5/29/2010	8:56:20 PM	Bubbler valve closed
5/29/2010	8:56:20 PM	Bypass valve opened
5/29/2010	8:56:20 PM	Helium MFC set to  0.000000
5/29/2010	8:56:20 PM	H2 MFC set to  0.000000
5/29/2010	8:56:20 PM	BCl3 MFC set to  0.000000
5/29/2010	8:56:20 PM	PHl3 MFC set to  0.000000
5/29/2010	8:56:20 PM	SiCl4 MFC set to  0.000000
5/29/2010	8:56:20 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	8:56:20 PM	Tube furnace set to 0
5/29/2010	8:56:51 PM	Helium valve closed
5/29/2010	8:56:51 PM	H2 valve closed
5/29/2010	8:56:51 PM	BCl3 valve closed
5/29/2010	8:56:51 PM	PH3 valve closed
5/29/2010	8:56:51 PM	SiCl4 pre valve closed
5/29/2010	8:56:51 PM	SiCl4 post valve closed
5/29/2010	8:56:51 PM	Bubbler valve closed
5/29/2010	8:56:51 PM	Main Vac valve opened
5/29/2010	8:56:51 PM	Bypass valve opened
5/29/2010	8:56:51 PM	Helium MFC set to  0.000000
5/29/2010	8:56:51 PM	H2 MFC set to  0.000000
5/29/2010	8:56:51 PM	BCl3 MFC set to  0.000000
5/29/2010	8:56:51 PM	PHl3 MFC set to  0.000000
5/29/2010	8:56:51 PM	SiCl4 MFC set to  0.000000
5/29/2010	8:56:51 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	8:56:51 PM	Tube furnace set to 0
5/29/2010	9:01:51 PM	Helium valve closed
5/29/2010	9:01:51 PM	H2 valve closed
5/29/2010	9:01:51 PM	BCl3 valve closed
5/29/2010	9:01:51 PM	PH3 valve closed
5/29/2010	9:01:51 PM	SiCl4 pre valve closed
5/29/2010	9:01:51 PM	SiCl4 post valve closed
5/29/2010	9:01:51 PM	Bubbler valve closed
5/29/2010	9:01:51 PM	Main Vac valve opened
5/29/2010	9:01:51 PM	Bypass valve opened
5/29/2010	9:01:51 PM	Helium MFC set to  0.000000
5/29/2010	9:01:51 PM	H2 MFC set to  0.000000
5/29/2010	9:01:51 PM	BCl3 MFC set to  0.000000
5/29/2010	9:01:51 PM	PHl3 MFC set to  0.000000
5/29/2010	9:01:51 PM	SiCl4 MFC set to  0.000000
5/29/2010	9:01:51 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:01:51 PM	Tube furnace set to 0
5/29/2010	9:01:52 PM	Run finished at 9:01 PM
5/29/2010	9:01:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	9:08:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	9:08:55 PM	Recipe started at 9:08 PM
5/29/2010	9:08:55 PM	H2 valve closed
5/29/2010	9:08:55 PM	BCl3 valve closed
5/29/2010	9:08:55 PM	PH3 valve closed
5/29/2010	9:08:55 PM	SiCl4 pre valve closed
5/29/2010	9:08:55 PM	SiCl4 post valve closed
5/29/2010	9:08:55 PM	Main Vac valve closed
5/29/2010	9:08:55 PM	Bypass valve closed
5/29/2010	9:08:55 PM	Bubbler valve closed
5/29/2010	9:08:55 PM	Helium valve opened
5/29/2010	9:08:55 PM	Helium MFC set to  500.000000
5/29/2010	9:08:55 PM	H2 MFC set to  0.000000
5/29/2010	9:08:55 PM	BCl3 MFC set to  0.000000
5/29/2010	9:08:55 PM	PHl3 MFC set to  0.000000
5/29/2010	9:08:55 PM	SiCl4 MFC set to  0.000000
5/29/2010	9:08:55 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:08:55 PM	Tube furnace set to 0
5/29/2010	9:10:11 PM	Helium valve closed
5/29/2010	9:10:11 PM	H2 valve closed
5/29/2010	9:10:11 PM	BCl3 valve closed
5/29/2010	9:10:11 PM	PH3 valve closed
5/29/2010	9:10:11 PM	SiCl4 pre valve closed
5/29/2010	9:10:11 PM	SiCl4 post valve closed
5/29/2010	9:10:11 PM	Main Vac valve closed
5/29/2010	9:10:11 PM	Bypass valve closed
5/29/2010	9:10:11 PM	Bubbler valve closed
5/29/2010	9:10:11 PM	Helium MFC set to  0.000000
5/29/2010	9:10:11 PM	H2 MFC set to  0.000000
5/29/2010	9:10:11 PM	BCl3 MFC set to  0.000000
5/29/2010	9:10:11 PM	PHl3 MFC set to  0.000000
5/29/2010	9:10:11 PM	SiCl4 MFC set to  0.000000
5/29/2010	9:10:11 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:10:11 PM	Tube furnace set to 0
5/29/2010	9:10:26 PM	Helium valve closed
5/29/2010	9:10:26 PM	H2 valve closed
5/29/2010	9:10:26 PM	BCl3 valve closed
5/29/2010	9:10:26 PM	PH3 valve closed
5/29/2010	9:10:26 PM	SiCl4 pre valve closed
5/29/2010	9:10:26 PM	SiCl4 post valve closed
5/29/2010	9:10:26 PM	Main Vac valve closed
5/29/2010	9:10:26 PM	Bubbler valve closed
5/29/2010	9:10:26 PM	Bypass valve opened
5/29/2010	9:10:26 PM	Helium MFC set to  0.000000
5/29/2010	9:10:26 PM	H2 MFC set to  0.000000
5/29/2010	9:10:26 PM	BCl3 MFC set to  0.000000
5/29/2010	9:10:26 PM	PHl3 MFC set to  0.000000
5/29/2010	9:10:26 PM	SiCl4 MFC set to  0.000000
5/29/2010	9:10:26 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:10:26 PM	Tube furnace set to 0
5/29/2010	9:10:57 PM	Helium valve closed
5/29/2010	9:10:57 PM	H2 valve closed
5/29/2010	9:10:57 PM	BCl3 valve closed
5/29/2010	9:10:57 PM	PH3 valve closed
5/29/2010	9:10:57 PM	SiCl4 pre valve closed
5/29/2010	9:10:57 PM	SiCl4 post valve closed
5/29/2010	9:10:57 PM	Bubbler valve closed
5/29/2010	9:10:57 PM	Main Vac valve opened
5/29/2010	9:10:57 PM	Bypass valve opened
5/29/2010	9:10:57 PM	Helium MFC set to  0.000000
5/29/2010	9:10:57 PM	H2 MFC set to  0.000000
5/29/2010	9:10:57 PM	BCl3 MFC set to  0.000000
5/29/2010	9:10:57 PM	PHl3 MFC set to  0.000000
5/29/2010	9:10:57 PM	SiCl4 MFC set to  0.000000
5/29/2010	9:10:57 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:10:57 PM	Tube furnace set to 0
5/29/2010	9:15:57 PM	H2 valve closed
5/29/2010	9:15:57 PM	BCl3 valve closed
5/29/2010	9:15:57 PM	PH3 valve closed
5/29/2010	9:15:57 PM	SiCl4 pre valve closed
5/29/2010	9:15:57 PM	SiCl4 post valve closed
5/29/2010	9:15:57 PM	Main Vac valve closed
5/29/2010	9:15:57 PM	Bypass valve closed
5/29/2010	9:15:57 PM	Bubbler valve closed
5/29/2010	9:15:57 PM	Helium valve opened
5/29/2010	9:15:57 PM	Helium MFC set to  500.000000
5/29/2010	9:15:57 PM	H2 MFC set to  0.000000
5/29/2010	9:15:57 PM	BCl3 MFC set to  0.000000
5/29/2010	9:15:57 PM	PHl3 MFC set to  0.000000
5/29/2010	9:15:57 PM	SiCl4 MFC set to  0.000000
5/29/2010	9:15:57 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:15:58 PM	Tube furnace set to 0
5/29/2010	9:17:14 PM	Helium valve closed
5/29/2010	9:17:14 PM	H2 valve closed
5/29/2010	9:17:14 PM	BCl3 valve closed
5/29/2010	9:17:14 PM	PH3 valve closed
5/29/2010	9:17:14 PM	SiCl4 pre valve closed
5/29/2010	9:17:14 PM	SiCl4 post valve closed
5/29/2010	9:17:14 PM	Main Vac valve closed
5/29/2010	9:17:14 PM	Bypass valve closed
5/29/2010	9:17:14 PM	Bubbler valve closed
5/29/2010	9:17:14 PM	Helium MFC set to  0.000000
5/29/2010	9:17:14 PM	H2 MFC set to  0.000000
5/29/2010	9:17:14 PM	BCl3 MFC set to  0.000000
5/29/2010	9:17:14 PM	PHl3 MFC set to  0.000000
5/29/2010	9:17:14 PM	SiCl4 MFC set to  0.000000
5/29/2010	9:17:14 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:17:14 PM	Tube furnace set to 0
5/29/2010	9:17:29 PM	Helium valve closed
5/29/2010	9:17:29 PM	H2 valve closed
5/29/2010	9:17:29 PM	BCl3 valve closed
5/29/2010	9:17:29 PM	PH3 valve closed
5/29/2010	9:17:29 PM	SiCl4 pre valve closed
5/29/2010	9:17:29 PM	SiCl4 post valve closed
5/29/2010	9:17:29 PM	Main Vac valve closed
5/29/2010	9:17:29 PM	Bubbler valve closed
5/29/2010	9:17:29 PM	Bypass valve opened
5/29/2010	9:17:29 PM	Helium MFC set to  0.000000
5/29/2010	9:17:29 PM	H2 MFC set to  0.000000
5/29/2010	9:17:29 PM	BCl3 MFC set to  0.000000
5/29/2010	9:17:29 PM	PHl3 MFC set to  0.000000
5/29/2010	9:17:29 PM	SiCl4 MFC set to  0.000000
5/29/2010	9:17:29 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:17:29 PM	Tube furnace set to 0
5/29/2010	9:18:00 PM	Helium valve closed
5/29/2010	9:18:00 PM	H2 valve closed
5/29/2010	9:18:00 PM	BCl3 valve closed
5/29/2010	9:18:00 PM	PH3 valve closed
5/29/2010	9:18:00 PM	SiCl4 pre valve closed
5/29/2010	9:18:00 PM	SiCl4 post valve closed
5/29/2010	9:18:00 PM	Bubbler valve closed
5/29/2010	9:18:00 PM	Main Vac valve opened
5/29/2010	9:18:00 PM	Bypass valve opened
5/29/2010	9:18:00 PM	Helium MFC set to  0.000000
5/29/2010	9:18:00 PM	H2 MFC set to  0.000000
5/29/2010	9:18:00 PM	BCl3 MFC set to  0.000000
5/29/2010	9:18:00 PM	PHl3 MFC set to  0.000000
5/29/2010	9:18:00 PM	SiCl4 MFC set to  0.000000
5/29/2010	9:18:00 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:18:01 PM	Tube furnace set to 0
5/29/2010	9:23:01 PM	H2 valve closed
5/29/2010	9:23:01 PM	BCl3 valve closed
5/29/2010	9:23:01 PM	PH3 valve closed
5/29/2010	9:23:01 PM	SiCl4 pre valve closed
5/29/2010	9:23:01 PM	SiCl4 post valve closed
5/29/2010	9:23:01 PM	Main Vac valve closed
5/29/2010	9:23:01 PM	Bypass valve closed
5/29/2010	9:23:01 PM	Bubbler valve closed
5/29/2010	9:23:01 PM	Helium valve opened
5/29/2010	9:23:01 PM	Helium MFC set to  500.000000
5/29/2010	9:23:01 PM	H2 MFC set to  0.000000
5/29/2010	9:23:01 PM	BCl3 MFC set to  0.000000
5/29/2010	9:23:01 PM	PHl3 MFC set to  0.000000
5/29/2010	9:23:01 PM	SiCl4 MFC set to  0.000000
5/29/2010	9:23:01 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:23:01 PM	Tube furnace set to 0
5/29/2010	9:24:17 PM	Helium valve closed
5/29/2010	9:24:17 PM	H2 valve closed
5/29/2010	9:24:17 PM	BCl3 valve closed
5/29/2010	9:24:17 PM	PH3 valve closed
5/29/2010	9:24:17 PM	SiCl4 pre valve closed
5/29/2010	9:24:17 PM	SiCl4 post valve closed
5/29/2010	9:24:17 PM	Main Vac valve closed
5/29/2010	9:24:17 PM	Bypass valve closed
5/29/2010	9:24:17 PM	Bubbler valve closed
5/29/2010	9:24:17 PM	Helium MFC set to  0.000000
5/29/2010	9:24:17 PM	H2 MFC set to  0.000000
5/29/2010	9:24:17 PM	BCl3 MFC set to  0.000000
5/29/2010	9:24:17 PM	PHl3 MFC set to  0.000000
5/29/2010	9:24:17 PM	SiCl4 MFC set to  0.000000
5/29/2010	9:24:17 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:24:17 PM	Tube furnace set to 0
5/29/2010	9:24:32 PM	Helium valve closed
5/29/2010	9:24:33 PM	H2 valve closed
5/29/2010	9:24:33 PM	BCl3 valve closed
5/29/2010	9:24:33 PM	PH3 valve closed
5/29/2010	9:24:33 PM	SiCl4 pre valve closed
5/29/2010	9:24:33 PM	SiCl4 post valve closed
5/29/2010	9:24:33 PM	Main Vac valve closed
5/29/2010	9:24:33 PM	Bubbler valve closed
5/29/2010	9:24:33 PM	Bypass valve opened
5/29/2010	9:24:33 PM	Helium MFC set to  0.000000
5/29/2010	9:24:33 PM	H2 MFC set to  0.000000
5/29/2010	9:24:33 PM	BCl3 MFC set to  0.000000
5/29/2010	9:24:33 PM	PHl3 MFC set to  0.000000
5/29/2010	9:24:33 PM	SiCl4 MFC set to  0.000000
5/29/2010	9:24:33 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:24:33 PM	Tube furnace set to 0
5/29/2010	9:25:04 PM	Helium valve closed
5/29/2010	9:25:04 PM	H2 valve closed
5/29/2010	9:25:04 PM	BCl3 valve closed
5/29/2010	9:25:04 PM	PH3 valve closed
5/29/2010	9:25:04 PM	SiCl4 pre valve closed
5/29/2010	9:25:04 PM	SiCl4 post valve closed
5/29/2010	9:25:04 PM	Bubbler valve closed
5/29/2010	9:25:04 PM	Main Vac valve opened
5/29/2010	9:25:04 PM	Bypass valve opened
5/29/2010	9:25:04 PM	Helium MFC set to  0.000000
5/29/2010	9:25:04 PM	H2 MFC set to  0.000000
5/29/2010	9:25:04 PM	BCl3 MFC set to  0.000000
5/29/2010	9:25:04 PM	PHl3 MFC set to  0.000000
5/29/2010	9:25:04 PM	SiCl4 MFC set to  0.000000
5/29/2010	9:25:04 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:25:04 PM	Tube furnace set to 0
5/29/2010	9:28:21 PM	Run aborted at 9:28 PM
5/29/2010	9:28:21 PM	Helium valve closed
5/29/2010	9:28:21 PM	H2 valve closed
5/29/2010	9:28:21 PM	BCl3 valve closed
5/29/2010	9:28:21 PM	PH3 valve closed
5/29/2010	9:28:21 PM	SiCl4 pre valve closed
5/29/2010	9:28:21 PM	SiCl4 post valve closed
5/29/2010	9:28:21 PM	Bypass valve closed
5/29/2010	9:28:21 PM	Main Vac valve closed
5/29/2010	9:28:21 PM	Bubbler valve closed
5/29/2010	9:28:21 PM	Helium MFC set to  0.000000
5/29/2010	9:28:21 PM	H2 MFC set to  0.000000
5/29/2010	9:28:21 PM	BCl3 MFC set to  0.000000
5/29/2010	9:28:21 PM	PHl3 MFC set to  0.000000
5/29/2010	9:28:21 PM	SiCl4 MFC set to  0.000000
5/29/2010	9:28:21 PM	Tube furnace set to 0
5/29/2010	9:28:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	9:28:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2010	9:28:22 PM	Recipe started at 9:28 PM
5/29/2010	9:28:22 PM	Helium valve closed
5/29/2010	9:28:22 PM	H2 valve closed
5/29/2010	9:28:22 PM	BCl3 valve closed
5/29/2010	9:28:22 PM	PH3 valve closed
5/29/2010	9:28:22 PM	SiCl4 pre valve closed
5/29/2010	9:28:22 PM	SiCl4 post valve closed
5/29/2010	9:28:22 PM	Main Vac valve closed
5/29/2010	9:28:22 PM	Bubbler valve closed
5/29/2010	9:28:22 PM	Bypass valve opened
5/29/2010	9:28:22 PM	Helium MFC set to  0.000000
5/29/2010	9:28:22 PM	H2 MFC set to  0.000000
5/29/2010	9:28:22 PM	BCl3 MFC set to  0.000000
5/29/2010	9:28:22 PM	PHl3 MFC set to  0.000000
5/29/2010	9:28:22 PM	SiCl4 MFC set to  0.000000
5/29/2010	9:28:22 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:28:22 PM	Tube furnace set to 0
5/29/2010	9:28:23 PM	Helium valve closed
5/29/2010	9:28:23 PM	H2 valve closed
5/29/2010	9:28:23 PM	BCl3 valve closed
5/29/2010	9:28:23 PM	PH3 valve closed
5/29/2010	9:28:23 PM	SiCl4 pre valve closed
5/29/2010	9:28:23 PM	SiCl4 post valve closed
5/29/2010	9:28:23 PM	Bubbler valve closed
5/29/2010	9:28:23 PM	Main Vac valve opened
5/29/2010	9:28:23 PM	Bypass valve opened
5/29/2010	9:28:23 PM	Helium MFC set to  0.000000
5/29/2010	9:28:23 PM	H2 MFC set to  0.000000
5/29/2010	9:28:23 PM	BCl3 MFC set to  0.000000
5/29/2010	9:28:23 PM	PHl3 MFC set to  0.000000
5/29/2010	9:28:23 PM	SiCl4 MFC set to  0.000000
5/29/2010	9:28:23 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:28:23 PM	Tube furnace set to 0
5/29/2010	9:28:23 PM	Run finished at 9:28 PM
5/29/2010	9:28:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2010	9:28:29 PM	Recipe started at 9:28 PM
5/29/2010	9:28:29 PM	Helium valve closed
5/29/2010	9:28:29 PM	BCl3 valve closed
5/29/2010	9:28:29 PM	PH3 valve closed
5/29/2010	9:28:29 PM	SiCl4 pre valve closed
5/29/2010	9:28:29 PM	SiCl4 post valve closed
5/29/2010	9:28:29 PM	Main Vac valve closed
5/29/2010	9:28:29 PM	Bypass valve closed
5/29/2010	9:28:29 PM	Bubbler valve closed
5/29/2010	9:28:29 PM	H2 valve opened
5/29/2010	9:28:29 PM	Helium MFC set to  0.000000
5/29/2010	9:28:29 PM	H2 MFC set to  500.000000
5/29/2010	9:28:29 PM	BCl3 MFC set to  0.000000
5/29/2010	9:28:29 PM	PHl3 MFC set to  0.000000
5/29/2010	9:28:29 PM	SiCl4 MFC set to  0.000000
5/29/2010	9:28:29 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:28:29 PM	Tube furnace set to 0
5/29/2010	9:29:46 PM	Helium valve closed
5/29/2010	9:29:46 PM	BCl3 valve closed
5/29/2010	9:29:46 PM	PH3 valve closed
5/29/2010	9:29:46 PM	SiCl4 pre valve closed
5/29/2010	9:29:46 PM	SiCl4 post valve closed
5/29/2010	9:29:46 PM	Main Vac valve closed
5/29/2010	9:29:46 PM	Bypass valve closed
5/29/2010	9:29:46 PM	H2 valve opened
5/29/2010	9:29:46 PM	Bubbler valve opened
5/29/2010	9:29:46 PM	Helium MFC set to  0.000000
5/29/2010	9:29:46 PM	H2 MFC set to  500.000000
5/29/2010	9:29:46 PM	BCl3 MFC set to  0.000000
5/29/2010	9:29:46 PM	PHl3 MFC set to  0.000000
5/29/2010	9:29:46 PM	SiCl4 MFC set to  0.000000
5/29/2010	9:29:46 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:29:46 PM	Tube furnace set to 1000
5/29/2010	9:49:46 PM	Helium valve closed
5/29/2010	9:49:46 PM	PH3 valve closed
5/29/2010	9:49:46 PM	Main Vac valve closed
5/29/2010	9:49:46 PM	Bypass valve closed
5/29/2010	9:49:46 PM	H2 valve opened
5/29/2010	9:49:46 PM	BCl3 valve opened
5/29/2010	9:49:46 PM	SiCl4 pre valve opened
5/29/2010	9:49:46 PM	SiCl4 post valve opened
5/29/2010	9:49:46 PM	Bubbler valve opened
5/29/2010	9:49:46 PM	Helium MFC set to  0.000000
5/29/2010	9:49:46 PM	H2 MFC set to  500.000000
5/29/2010	9:49:46 PM	BCl3 MFC set to  35.000000
5/29/2010	9:49:46 PM	PHl3 MFC set to  0.000000
5/29/2010	9:49:46 PM	SiCl4 MFC set to  50.000000
5/29/2010	9:49:46 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	9:49:46 PM	Tube furnace set to 1000
5/29/2010	10:01:46 PM	H2 valve closed
5/29/2010	10:01:46 PM	BCl3 valve closed
5/29/2010	10:01:46 PM	PH3 valve closed
5/29/2010	10:01:46 PM	SiCl4 pre valve closed
5/29/2010	10:01:46 PM	SiCl4 post valve closed
5/29/2010	10:01:46 PM	Main Vac valve closed
5/29/2010	10:01:46 PM	Bypass valve closed
5/29/2010	10:01:46 PM	Helium valve opened
5/29/2010	10:01:46 PM	Bubbler valve opened
5/29/2010	10:01:46 PM	Helium MFC set to  500.000000
5/29/2010	10:01:46 PM	H2 MFC set to  0.000000
5/29/2010	10:01:46 PM	BCl3 MFC set to  0.000000
5/29/2010	10:01:46 PM	PHl3 MFC set to  0.000000
5/29/2010	10:01:46 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:01:46 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:01:46 PM	Tube furnace set to 0
5/29/2010	10:21:46 PM	Helium valve closed
5/29/2010	10:21:46 PM	H2 valve closed
5/29/2010	10:21:46 PM	BCl3 valve closed
5/29/2010	10:21:46 PM	PH3 valve closed
5/29/2010	10:21:46 PM	SiCl4 pre valve closed
5/29/2010	10:21:46 PM	SiCl4 post valve closed
5/29/2010	10:21:46 PM	Main Vac valve closed
5/29/2010	10:21:46 PM	Bypass valve closed
5/29/2010	10:21:46 PM	Bubbler valve closed
5/29/2010	10:21:46 PM	Helium MFC set to  0.000000
5/29/2010	10:21:46 PM	H2 MFC set to  0.000000
5/29/2010	10:21:46 PM	BCl3 MFC set to  0.000000
5/29/2010	10:21:46 PM	PHl3 MFC set to  0.000000
5/29/2010	10:21:46 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:21:46 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:21:47 PM	Tube furnace set to 0
5/29/2010	10:21:47 PM	Run finished at 10:21 PM
5/29/2010	10:27:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/29/2010	10:27:55 PM	Recipe started at 10:27 PM
5/29/2010	10:27:55 PM	H2 valve closed
5/29/2010	10:27:55 PM	BCl3 valve closed
5/29/2010	10:27:55 PM	PH3 valve closed
5/29/2010	10:27:55 PM	SiCl4 pre valve closed
5/29/2010	10:27:55 PM	SiCl4 post valve closed
5/29/2010	10:27:55 PM	Main Vac valve closed
5/29/2010	10:27:56 PM	Bypass valve closed
5/29/2010	10:27:56 PM	Bubbler valve closed
5/29/2010	10:27:56 PM	Helium valve opened
5/29/2010	10:27:56 PM	Helium MFC set to  500.000000
5/29/2010	10:27:56 PM	H2 MFC set to  0.000000
5/29/2010	10:27:56 PM	BCl3 MFC set to  0.000000
5/29/2010	10:27:56 PM	PHl3 MFC set to  0.000000
5/29/2010	10:27:56 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:27:56 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:27:56 PM	Tube furnace set to 0
5/29/2010	10:27:58 PM	Helium valve closed
5/29/2010	10:27:58 PM	H2 valve closed
5/29/2010	10:27:58 PM	BCl3 valve closed
5/29/2010	10:27:58 PM	PH3 valve closed
5/29/2010	10:27:58 PM	SiCl4 pre valve closed
5/29/2010	10:27:58 PM	SiCl4 post valve closed
5/29/2010	10:27:58 PM	Main Vac valve closed
5/29/2010	10:27:58 PM	Bypass valve closed
5/29/2010	10:27:58 PM	Bubbler valve closed
5/29/2010	10:27:58 PM	Helium MFC set to  0.000000
5/29/2010	10:27:58 PM	H2 MFC set to  0.000000
5/29/2010	10:27:58 PM	BCl3 MFC set to  0.000000
5/29/2010	10:27:58 PM	PHl3 MFC set to  0.000000
5/29/2010	10:27:58 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:27:58 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:27:59 PM	Tube furnace set to 0
5/29/2010	10:27:59 PM	Run finished at 10:27 PM
5/29/2010	10:27:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/29/2010	10:31:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2010	10:31:20 PM	Recipe started at 10:31 PM
5/29/2010	10:31:20 PM	Helium valve closed
5/29/2010	10:31:20 PM	H2 valve closed
5/29/2010	10:31:20 PM	BCl3 valve closed
5/29/2010	10:31:20 PM	PH3 valve closed
5/29/2010	10:31:20 PM	SiCl4 pre valve closed
5/29/2010	10:31:20 PM	SiCl4 post valve closed
5/29/2010	10:31:20 PM	Main Vac valve closed
5/29/2010	10:31:20 PM	Bubbler valve closed
5/29/2010	10:31:20 PM	Bypass valve opened
5/29/2010	10:31:20 PM	Helium MFC set to  0.000000
5/29/2010	10:31:20 PM	H2 MFC set to  0.000000
5/29/2010	10:31:20 PM	BCl3 MFC set to  0.000000
5/29/2010	10:31:20 PM	PHl3 MFC set to  0.000000
5/29/2010	10:31:20 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:31:20 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:31:20 PM	Tube furnace set to 0
5/29/2010	10:32:06 PM	Helium valve closed
5/29/2010	10:32:06 PM	H2 valve closed
5/29/2010	10:32:06 PM	BCl3 valve closed
5/29/2010	10:32:06 PM	PH3 valve closed
5/29/2010	10:32:06 PM	SiCl4 pre valve closed
5/29/2010	10:32:06 PM	SiCl4 post valve closed
5/29/2010	10:32:06 PM	Bubbler valve closed
5/29/2010	10:32:06 PM	Main Vac valve opened
5/29/2010	10:32:06 PM	Bypass valve opened
5/29/2010	10:32:06 PM	Helium MFC set to  0.000000
5/29/2010	10:32:06 PM	H2 MFC set to  0.000000
5/29/2010	10:32:06 PM	BCl3 MFC set to  0.000000
5/29/2010	10:32:06 PM	PHl3 MFC set to  0.000000
5/29/2010	10:32:06 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:32:06 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:32:06 PM	Tube furnace set to 0
5/29/2010	10:32:06 PM	Run finished at 10:32 PM
5/29/2010	10:32:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2010	10:32:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	10:32:50 PM	Recipe started at 10:32 PM
5/29/2010	10:32:50 PM	H2 valve closed
5/29/2010	10:32:51 PM	BCl3 valve closed
5/29/2010	10:32:51 PM	PH3 valve closed
5/29/2010	10:32:51 PM	SiCl4 pre valve closed
5/29/2010	10:32:51 PM	SiCl4 post valve closed
5/29/2010	10:32:51 PM	Main Vac valve closed
5/29/2010	10:32:51 PM	Bypass valve closed
5/29/2010	10:32:51 PM	Bubbler valve closed
5/29/2010	10:32:51 PM	Helium valve opened
5/29/2010	10:32:51 PM	Helium MFC set to  500.000000
5/29/2010	10:32:51 PM	H2 MFC set to  0.000000
5/29/2010	10:32:51 PM	BCl3 MFC set to  0.000000
5/29/2010	10:32:51 PM	PHl3 MFC set to  0.000000
5/29/2010	10:32:51 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:32:51 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:32:51 PM	Tube furnace set to 0
5/29/2010	10:34:08 PM	Helium valve closed
5/29/2010	10:34:08 PM	H2 valve closed
5/29/2010	10:34:08 PM	BCl3 valve closed
5/29/2010	10:34:08 PM	PH3 valve closed
5/29/2010	10:34:08 PM	SiCl4 pre valve closed
5/29/2010	10:34:08 PM	SiCl4 post valve closed
5/29/2010	10:34:08 PM	Main Vac valve closed
5/29/2010	10:34:08 PM	Bypass valve closed
5/29/2010	10:34:08 PM	Bubbler valve closed
5/29/2010	10:34:08 PM	Helium MFC set to  0.000000
5/29/2010	10:34:08 PM	H2 MFC set to  0.000000
5/29/2010	10:34:08 PM	BCl3 MFC set to  0.000000
5/29/2010	10:34:08 PM	PHl3 MFC set to  0.000000
5/29/2010	10:34:08 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:34:08 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:34:08 PM	Tube furnace set to 0
5/29/2010	10:34:23 PM	Helium valve closed
5/29/2010	10:34:23 PM	H2 valve closed
5/29/2010	10:34:23 PM	BCl3 valve closed
5/29/2010	10:34:23 PM	PH3 valve closed
5/29/2010	10:34:23 PM	SiCl4 pre valve closed
5/29/2010	10:34:23 PM	SiCl4 post valve closed
5/29/2010	10:34:23 PM	Main Vac valve closed
5/29/2010	10:34:23 PM	Bubbler valve closed
5/29/2010	10:34:23 PM	Bypass valve opened
5/29/2010	10:34:23 PM	Helium MFC set to  0.000000
5/29/2010	10:34:23 PM	H2 MFC set to  0.000000
5/29/2010	10:34:23 PM	BCl3 MFC set to  0.000000
5/29/2010	10:34:23 PM	PHl3 MFC set to  0.000000
5/29/2010	10:34:23 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:34:23 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:34:23 PM	Tube furnace set to 0
5/29/2010	10:34:55 PM	Helium valve closed
5/29/2010	10:34:55 PM	H2 valve closed
5/29/2010	10:34:55 PM	BCl3 valve closed
5/29/2010	10:34:55 PM	PH3 valve closed
5/29/2010	10:34:55 PM	SiCl4 pre valve closed
5/29/2010	10:34:55 PM	SiCl4 post valve closed
5/29/2010	10:34:55 PM	Bubbler valve closed
5/29/2010	10:34:55 PM	Main Vac valve opened
5/29/2010	10:34:55 PM	Bypass valve opened
5/29/2010	10:34:55 PM	Helium MFC set to  0.000000
5/29/2010	10:34:55 PM	H2 MFC set to  0.000000
5/29/2010	10:34:55 PM	BCl3 MFC set to  0.000000
5/29/2010	10:34:55 PM	PHl3 MFC set to  0.000000
5/29/2010	10:34:55 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:34:55 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:34:55 PM	Tube furnace set to 0
5/29/2010	10:39:55 PM	H2 valve closed
5/29/2010	10:39:55 PM	BCl3 valve closed
5/29/2010	10:39:55 PM	PH3 valve closed
5/29/2010	10:39:55 PM	SiCl4 pre valve closed
5/29/2010	10:39:55 PM	SiCl4 post valve closed
5/29/2010	10:39:55 PM	Main Vac valve closed
5/29/2010	10:39:55 PM	Bypass valve closed
5/29/2010	10:39:55 PM	Bubbler valve closed
5/29/2010	10:39:55 PM	Helium valve opened
5/29/2010	10:39:55 PM	Helium MFC set to  500.000000
5/29/2010	10:39:55 PM	H2 MFC set to  0.000000
5/29/2010	10:39:55 PM	BCl3 MFC set to  0.000000
5/29/2010	10:39:55 PM	PHl3 MFC set to  0.000000
5/29/2010	10:39:55 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:39:55 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:39:55 PM	Tube furnace set to 0
5/29/2010	10:41:11 PM	Helium valve closed
5/29/2010	10:41:11 PM	H2 valve closed
5/29/2010	10:41:11 PM	BCl3 valve closed
5/29/2010	10:41:11 PM	PH3 valve closed
5/29/2010	10:41:11 PM	SiCl4 pre valve closed
5/29/2010	10:41:11 PM	SiCl4 post valve closed
5/29/2010	10:41:11 PM	Main Vac valve closed
5/29/2010	10:41:12 PM	Bypass valve closed
5/29/2010	10:41:12 PM	Bubbler valve closed
5/29/2010	10:41:12 PM	Helium MFC set to  0.000000
5/29/2010	10:41:12 PM	H2 MFC set to  0.000000
5/29/2010	10:41:12 PM	BCl3 MFC set to  0.000000
5/29/2010	10:41:12 PM	PHl3 MFC set to  0.000000
5/29/2010	10:41:12 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:41:12 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:41:12 PM	Tube furnace set to 0
5/29/2010	10:41:27 PM	Helium valve closed
5/29/2010	10:41:27 PM	H2 valve closed
5/29/2010	10:41:27 PM	BCl3 valve closed
5/29/2010	10:41:27 PM	PH3 valve closed
5/29/2010	10:41:27 PM	SiCl4 pre valve closed
5/29/2010	10:41:27 PM	SiCl4 post valve closed
5/29/2010	10:41:27 PM	Main Vac valve closed
5/29/2010	10:41:27 PM	Bubbler valve closed
5/29/2010	10:41:27 PM	Bypass valve opened
5/29/2010	10:41:27 PM	Helium MFC set to  0.000000
5/29/2010	10:41:27 PM	H2 MFC set to  0.000000
5/29/2010	10:41:27 PM	BCl3 MFC set to  0.000000
5/29/2010	10:41:27 PM	PHl3 MFC set to  0.000000
5/29/2010	10:41:27 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:41:27 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:41:27 PM	Tube furnace set to 0
5/29/2010	10:41:58 PM	Helium valve closed
5/29/2010	10:41:58 PM	H2 valve closed
5/29/2010	10:41:58 PM	BCl3 valve closed
5/29/2010	10:41:58 PM	PH3 valve closed
5/29/2010	10:41:58 PM	SiCl4 pre valve closed
5/29/2010	10:41:58 PM	SiCl4 post valve closed
5/29/2010	10:41:58 PM	Bubbler valve closed
5/29/2010	10:41:58 PM	Main Vac valve opened
5/29/2010	10:41:58 PM	Bypass valve opened
5/29/2010	10:41:58 PM	Helium MFC set to  0.000000
5/29/2010	10:41:58 PM	H2 MFC set to  0.000000
5/29/2010	10:41:58 PM	BCl3 MFC set to  0.000000
5/29/2010	10:41:58 PM	PHl3 MFC set to  0.000000
5/29/2010	10:41:58 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:41:58 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:41:58 PM	Tube furnace set to 0
5/29/2010	10:46:58 PM	H2 valve closed
5/29/2010	10:46:58 PM	BCl3 valve closed
5/29/2010	10:46:58 PM	PH3 valve closed
5/29/2010	10:46:58 PM	SiCl4 pre valve closed
5/29/2010	10:46:58 PM	SiCl4 post valve closed
5/29/2010	10:46:58 PM	Main Vac valve closed
5/29/2010	10:46:58 PM	Bypass valve closed
5/29/2010	10:46:58 PM	Bubbler valve closed
5/29/2010	10:46:58 PM	Helium valve opened
5/29/2010	10:46:58 PM	Helium MFC set to  500.000000
5/29/2010	10:46:58 PM	H2 MFC set to  0.000000
5/29/2010	10:46:58 PM	BCl3 MFC set to  0.000000
5/29/2010	10:46:58 PM	PHl3 MFC set to  0.000000
5/29/2010	10:46:58 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:46:58 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:46:58 PM	Tube furnace set to 0
5/29/2010	10:48:14 PM	Helium valve closed
5/29/2010	10:48:14 PM	H2 valve closed
5/29/2010	10:48:14 PM	BCl3 valve closed
5/29/2010	10:48:14 PM	PH3 valve closed
5/29/2010	10:48:14 PM	SiCl4 pre valve closed
5/29/2010	10:48:14 PM	SiCl4 post valve closed
5/29/2010	10:48:14 PM	Main Vac valve closed
5/29/2010	10:48:14 PM	Bypass valve closed
5/29/2010	10:48:14 PM	Bubbler valve closed
5/29/2010	10:48:14 PM	Helium MFC set to  0.000000
5/29/2010	10:48:14 PM	H2 MFC set to  0.000000
5/29/2010	10:48:14 PM	BCl3 MFC set to  0.000000
5/29/2010	10:48:14 PM	PHl3 MFC set to  0.000000
5/29/2010	10:48:14 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:48:14 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:48:14 PM	Tube furnace set to 0
5/29/2010	10:48:29 PM	Helium valve closed
5/29/2010	10:48:29 PM	H2 valve closed
5/29/2010	10:48:29 PM	BCl3 valve closed
5/29/2010	10:48:29 PM	PH3 valve closed
5/29/2010	10:48:29 PM	SiCl4 pre valve closed
5/29/2010	10:48:29 PM	SiCl4 post valve closed
5/29/2010	10:48:29 PM	Main Vac valve closed
5/29/2010	10:48:29 PM	Bubbler valve closed
5/29/2010	10:48:29 PM	Bypass valve opened
5/29/2010	10:48:29 PM	Helium MFC set to  0.000000
5/29/2010	10:48:29 PM	H2 MFC set to  0.000000
5/29/2010	10:48:29 PM	BCl3 MFC set to  0.000000
5/29/2010	10:48:29 PM	PHl3 MFC set to  0.000000
5/29/2010	10:48:29 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:48:29 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:48:30 PM	Tube furnace set to 0
5/29/2010	10:49:01 PM	Helium valve closed
5/29/2010	10:49:01 PM	H2 valve closed
5/29/2010	10:49:01 PM	BCl3 valve closed
5/29/2010	10:49:01 PM	PH3 valve closed
5/29/2010	10:49:01 PM	SiCl4 pre valve closed
5/29/2010	10:49:01 PM	SiCl4 post valve closed
5/29/2010	10:49:01 PM	Bubbler valve closed
5/29/2010	10:49:01 PM	Main Vac valve opened
5/29/2010	10:49:01 PM	Bypass valve opened
5/29/2010	10:49:01 PM	Helium MFC set to  0.000000
5/29/2010	10:49:01 PM	H2 MFC set to  0.000000
5/29/2010	10:49:01 PM	BCl3 MFC set to  0.000000
5/29/2010	10:49:01 PM	PHl3 MFC set to  0.000000
5/29/2010	10:49:01 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:49:01 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:49:01 PM	Tube furnace set to 0
5/29/2010	10:54:01 PM	Helium valve closed
5/29/2010	10:54:01 PM	H2 valve closed
5/29/2010	10:54:01 PM	BCl3 valve closed
5/29/2010	10:54:01 PM	PH3 valve closed
5/29/2010	10:54:01 PM	SiCl4 pre valve closed
5/29/2010	10:54:01 PM	SiCl4 post valve closed
5/29/2010	10:54:01 PM	Bubbler valve closed
5/29/2010	10:54:01 PM	Main Vac valve opened
5/29/2010	10:54:01 PM	Bypass valve opened
5/29/2010	10:54:01 PM	Helium MFC set to  0.000000
5/29/2010	10:54:01 PM	H2 MFC set to  0.000000
5/29/2010	10:54:01 PM	BCl3 MFC set to  0.000000
5/29/2010	10:54:01 PM	PHl3 MFC set to  0.000000
5/29/2010	10:54:01 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:54:01 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:54:01 PM	Tube furnace set to 0
5/29/2010	10:54:02 PM	Run finished at 10:54 PM
5/29/2010	10:54:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	10:54:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	10:54:49 PM	Recipe started at 10:54 PM
5/29/2010	10:54:49 PM	H2 valve closed
5/29/2010	10:54:49 PM	BCl3 valve closed
5/29/2010	10:54:49 PM	PH3 valve closed
5/29/2010	10:54:49 PM	SiCl4 pre valve closed
5/29/2010	10:54:49 PM	SiCl4 post valve closed
5/29/2010	10:54:49 PM	Main Vac valve closed
5/29/2010	10:54:49 PM	Bypass valve closed
5/29/2010	10:54:49 PM	Bubbler valve closed
5/29/2010	10:54:49 PM	Helium valve opened
5/29/2010	10:54:49 PM	Helium MFC set to  500.000000
5/29/2010	10:54:49 PM	H2 MFC set to  0.000000
5/29/2010	10:54:49 PM	BCl3 MFC set to  0.000000
5/29/2010	10:54:49 PM	PHl3 MFC set to  0.000000
5/29/2010	10:54:49 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:54:49 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:54:49 PM	Tube furnace set to 0
5/29/2010	10:56:06 PM	Helium valve closed
5/29/2010	10:56:06 PM	H2 valve closed
5/29/2010	10:56:06 PM	BCl3 valve closed
5/29/2010	10:56:06 PM	PH3 valve closed
5/29/2010	10:56:06 PM	SiCl4 pre valve closed
5/29/2010	10:56:06 PM	SiCl4 post valve closed
5/29/2010	10:56:06 PM	Main Vac valve closed
5/29/2010	10:56:06 PM	Bypass valve closed
5/29/2010	10:56:06 PM	Bubbler valve closed
5/29/2010	10:56:06 PM	Helium MFC set to  0.000000
5/29/2010	10:56:06 PM	H2 MFC set to  0.000000
5/29/2010	10:56:06 PM	BCl3 MFC set to  0.000000
5/29/2010	10:56:06 PM	PHl3 MFC set to  0.000000
5/29/2010	10:56:06 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:56:06 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:56:06 PM	Tube furnace set to 0
5/29/2010	10:56:21 PM	Helium valve closed
5/29/2010	10:56:21 PM	H2 valve closed
5/29/2010	10:56:21 PM	BCl3 valve closed
5/29/2010	10:56:21 PM	PH3 valve closed
5/29/2010	10:56:21 PM	SiCl4 pre valve closed
5/29/2010	10:56:21 PM	SiCl4 post valve closed
5/29/2010	10:56:21 PM	Main Vac valve closed
5/29/2010	10:56:21 PM	Bubbler valve closed
5/29/2010	10:56:21 PM	Bypass valve opened
5/29/2010	10:56:21 PM	Helium MFC set to  0.000000
5/29/2010	10:56:21 PM	H2 MFC set to  0.000000
5/29/2010	10:56:21 PM	BCl3 MFC set to  0.000000
5/29/2010	10:56:21 PM	PHl3 MFC set to  0.000000
5/29/2010	10:56:21 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:56:21 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:56:21 PM	Tube furnace set to 0
5/29/2010	10:56:52 PM	Helium valve closed
5/29/2010	10:56:52 PM	H2 valve closed
5/29/2010	10:56:52 PM	BCl3 valve closed
5/29/2010	10:56:52 PM	PH3 valve closed
5/29/2010	10:56:52 PM	SiCl4 pre valve closed
5/29/2010	10:56:52 PM	SiCl4 post valve closed
5/29/2010	10:56:52 PM	Bubbler valve closed
5/29/2010	10:56:52 PM	Main Vac valve opened
5/29/2010	10:56:52 PM	Bypass valve opened
5/29/2010	10:56:52 PM	Helium MFC set to  0.000000
5/29/2010	10:56:52 PM	H2 MFC set to  0.000000
5/29/2010	10:56:52 PM	BCl3 MFC set to  0.000000
5/29/2010	10:56:52 PM	PHl3 MFC set to  0.000000
5/29/2010	10:56:52 PM	SiCl4 MFC set to  0.000000
5/29/2010	10:56:52 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	10:56:53 PM	Tube furnace set to 0
5/29/2010	11:01:53 PM	H2 valve closed
5/29/2010	11:01:53 PM	BCl3 valve closed
5/29/2010	11:01:53 PM	PH3 valve closed
5/29/2010	11:01:53 PM	SiCl4 pre valve closed
5/29/2010	11:01:53 PM	SiCl4 post valve closed
5/29/2010	11:01:53 PM	Main Vac valve closed
5/29/2010	11:01:53 PM	Bypass valve closed
5/29/2010	11:01:53 PM	Bubbler valve closed
5/29/2010	11:01:53 PM	Helium valve opened
5/29/2010	11:01:53 PM	Helium MFC set to  500.000000
5/29/2010	11:01:53 PM	H2 MFC set to  0.000000
5/29/2010	11:01:53 PM	BCl3 MFC set to  0.000000
5/29/2010	11:01:53 PM	PHl3 MFC set to  0.000000
5/29/2010	11:01:53 PM	SiCl4 MFC set to  0.000000
5/29/2010	11:01:53 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:01:53 PM	Tube furnace set to 0
5/29/2010	11:03:09 PM	Helium valve closed
5/29/2010	11:03:09 PM	H2 valve closed
5/29/2010	11:03:09 PM	BCl3 valve closed
5/29/2010	11:03:09 PM	PH3 valve closed
5/29/2010	11:03:09 PM	SiCl4 pre valve closed
5/29/2010	11:03:09 PM	SiCl4 post valve closed
5/29/2010	11:03:09 PM	Main Vac valve closed
5/29/2010	11:03:09 PM	Bypass valve closed
5/29/2010	11:03:09 PM	Bubbler valve closed
5/29/2010	11:03:09 PM	Helium MFC set to  0.000000
5/29/2010	11:03:09 PM	H2 MFC set to  0.000000
5/29/2010	11:03:09 PM	BCl3 MFC set to  0.000000
5/29/2010	11:03:09 PM	PHl3 MFC set to  0.000000
5/29/2010	11:03:09 PM	SiCl4 MFC set to  0.000000
5/29/2010	11:03:09 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:03:09 PM	Tube furnace set to 0
5/29/2010	11:03:24 PM	Helium valve closed
5/29/2010	11:03:24 PM	H2 valve closed
5/29/2010	11:03:24 PM	BCl3 valve closed
5/29/2010	11:03:24 PM	PH3 valve closed
5/29/2010	11:03:24 PM	SiCl4 pre valve closed
5/29/2010	11:03:24 PM	SiCl4 post valve closed
5/29/2010	11:03:24 PM	Main Vac valve closed
5/29/2010	11:03:24 PM	Bubbler valve closed
5/29/2010	11:03:24 PM	Bypass valve opened
5/29/2010	11:03:24 PM	Helium MFC set to  0.000000
5/29/2010	11:03:24 PM	H2 MFC set to  0.000000
5/29/2010	11:03:24 PM	BCl3 MFC set to  0.000000
5/29/2010	11:03:24 PM	PHl3 MFC set to  0.000000
5/29/2010	11:03:24 PM	SiCl4 MFC set to  0.000000
5/29/2010	11:03:24 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:03:24 PM	Tube furnace set to 0
5/29/2010	11:03:56 PM	Helium valve closed
5/29/2010	11:03:56 PM	H2 valve closed
5/29/2010	11:03:56 PM	BCl3 valve closed
5/29/2010	11:03:56 PM	PH3 valve closed
5/29/2010	11:03:56 PM	SiCl4 pre valve closed
5/29/2010	11:03:56 PM	SiCl4 post valve closed
5/29/2010	11:03:56 PM	Bubbler valve closed
5/29/2010	11:03:56 PM	Main Vac valve opened
5/29/2010	11:03:56 PM	Bypass valve opened
5/29/2010	11:03:56 PM	Helium MFC set to  0.000000
5/29/2010	11:03:56 PM	H2 MFC set to  0.000000
5/29/2010	11:03:56 PM	BCl3 MFC set to  0.000000
5/29/2010	11:03:56 PM	PHl3 MFC set to  0.000000
5/29/2010	11:03:56 PM	SiCl4 MFC set to  0.000000
5/29/2010	11:03:56 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:03:56 PM	Tube furnace set to 0
5/29/2010	11:08:56 PM	H2 valve closed
5/29/2010	11:08:56 PM	BCl3 valve closed
5/29/2010	11:08:56 PM	PH3 valve closed
5/29/2010	11:08:56 PM	SiCl4 pre valve closed
5/29/2010	11:08:56 PM	SiCl4 post valve closed
5/29/2010	11:08:56 PM	Main Vac valve closed
5/29/2010	11:08:56 PM	Bypass valve closed
5/29/2010	11:08:56 PM	Bubbler valve closed
5/29/2010	11:08:56 PM	Helium valve opened
5/29/2010	11:08:56 PM	Helium MFC set to  500.000000
5/29/2010	11:08:56 PM	H2 MFC set to  0.000000
5/29/2010	11:08:56 PM	BCl3 MFC set to  0.000000
5/29/2010	11:08:56 PM	PHl3 MFC set to  0.000000
5/29/2010	11:08:56 PM	SiCl4 MFC set to  0.000000
5/29/2010	11:08:56 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:08:56 PM	Tube furnace set to 0
5/29/2010	11:10:12 PM	Helium valve closed
5/29/2010	11:10:12 PM	H2 valve closed
5/29/2010	11:10:12 PM	BCl3 valve closed
5/29/2010	11:10:12 PM	PH3 valve closed
5/29/2010	11:10:12 PM	SiCl4 pre valve closed
5/29/2010	11:10:12 PM	SiCl4 post valve closed
5/29/2010	11:10:12 PM	Main Vac valve closed
5/29/2010	11:10:12 PM	Bypass valve closed
5/29/2010	11:10:12 PM	Bubbler valve closed
5/29/2010	11:10:13 PM	Helium MFC set to  0.000000
5/29/2010	11:10:13 PM	H2 MFC set to  0.000000
5/29/2010	11:10:13 PM	BCl3 MFC set to  0.000000
5/29/2010	11:10:13 PM	PHl3 MFC set to  0.000000
5/29/2010	11:10:13 PM	SiCl4 MFC set to  0.000000
5/29/2010	11:10:13 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:10:13 PM	Tube furnace set to 0
5/29/2010	11:10:28 PM	Helium valve closed
5/29/2010	11:10:28 PM	H2 valve closed
5/29/2010	11:10:28 PM	BCl3 valve closed
5/29/2010	11:10:28 PM	PH3 valve closed
5/29/2010	11:10:28 PM	SiCl4 pre valve closed
5/29/2010	11:10:28 PM	SiCl4 post valve closed
5/29/2010	11:10:28 PM	Main Vac valve closed
5/29/2010	11:10:28 PM	Bubbler valve closed
5/29/2010	11:10:28 PM	Bypass valve opened
5/29/2010	11:10:28 PM	Helium MFC set to  0.000000
5/29/2010	11:10:28 PM	H2 MFC set to  0.000000
5/29/2010	11:10:28 PM	BCl3 MFC set to  0.000000
5/29/2010	11:10:28 PM	PHl3 MFC set to  0.000000
5/29/2010	11:10:28 PM	SiCl4 MFC set to  0.000000
5/29/2010	11:10:28 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:10:28 PM	Tube furnace set to 0
5/29/2010	11:10:59 PM	Helium valve closed
5/29/2010	11:10:59 PM	H2 valve closed
5/29/2010	11:10:59 PM	BCl3 valve closed
5/29/2010	11:10:59 PM	PH3 valve closed
5/29/2010	11:10:59 PM	SiCl4 pre valve closed
5/29/2010	11:10:59 PM	SiCl4 post valve closed
5/29/2010	11:10:59 PM	Bubbler valve closed
5/29/2010	11:10:59 PM	Main Vac valve opened
5/29/2010	11:10:59 PM	Bypass valve opened
5/29/2010	11:10:59 PM	Helium MFC set to  0.000000
5/29/2010	11:10:59 PM	H2 MFC set to  0.000000
5/29/2010	11:10:59 PM	BCl3 MFC set to  0.000000
5/29/2010	11:10:59 PM	PHl3 MFC set to  0.000000
5/29/2010	11:10:59 PM	SiCl4 MFC set to  0.000000
5/29/2010	11:10:59 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:10:59 PM	Tube furnace set to 0
5/29/2010	11:15:59 PM	Helium valve closed
5/29/2010	11:15:59 PM	H2 valve closed
5/29/2010	11:15:59 PM	BCl3 valve closed
5/29/2010	11:15:59 PM	PH3 valve closed
5/29/2010	11:15:59 PM	SiCl4 pre valve closed
5/29/2010	11:15:59 PM	SiCl4 post valve closed
5/29/2010	11:15:59 PM	Bubbler valve closed
5/29/2010	11:15:59 PM	Main Vac valve opened
5/29/2010	11:15:59 PM	Bypass valve opened
5/29/2010	11:15:59 PM	Helium MFC set to  0.000000
5/29/2010	11:15:59 PM	H2 MFC set to  0.000000
5/29/2010	11:15:59 PM	BCl3 MFC set to  0.000000
5/29/2010	11:15:59 PM	PHl3 MFC set to  0.000000
5/29/2010	11:15:59 PM	SiCl4 MFC set to  0.000000
5/29/2010	11:15:59 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:15:59 PM	Tube furnace set to 0
5/29/2010	11:16:00 PM	Run finished at 11:16 PM
5/29/2010	11:16:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/29/2010	11:19:09 PM	Recipe started at 11:19 PM
5/29/2010	11:19:09 PM	Helium valve closed
5/29/2010	11:19:09 PM	BCl3 valve closed
5/29/2010	11:19:09 PM	PH3 valve closed
5/29/2010	11:19:09 PM	SiCl4 pre valve closed
5/29/2010	11:19:09 PM	SiCl4 post valve closed
5/29/2010	11:19:09 PM	Main Vac valve closed
5/29/2010	11:19:09 PM	Bypass valve closed
5/29/2010	11:19:09 PM	Bubbler valve closed
5/29/2010	11:19:09 PM	H2 valve opened
5/29/2010	11:19:09 PM	Helium MFC set to  0.000000
5/29/2010	11:19:09 PM	H2 MFC set to  500.000000
5/29/2010	11:19:09 PM	BCl3 MFC set to  0.000000
5/29/2010	11:19:09 PM	PHl3 MFC set to  0.000000
5/29/2010	11:19:09 PM	SiCl4 MFC set to  0.000000
5/29/2010	11:19:09 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:19:09 PM	Tube furnace set to 0
5/29/2010	11:20:27 PM	Helium valve closed
5/29/2010	11:20:27 PM	BCl3 valve closed
5/29/2010	11:20:27 PM	PH3 valve closed
5/29/2010	11:20:27 PM	SiCl4 pre valve closed
5/29/2010	11:20:27 PM	SiCl4 post valve closed
5/29/2010	11:20:27 PM	Main Vac valve closed
5/29/2010	11:20:27 PM	Bypass valve closed
5/29/2010	11:20:27 PM	H2 valve opened
5/29/2010	11:20:27 PM	Bubbler valve opened
5/29/2010	11:20:27 PM	Helium MFC set to  0.000000
5/29/2010	11:20:27 PM	H2 MFC set to  500.000000
5/29/2010	11:20:27 PM	BCl3 MFC set to  0.000000
5/29/2010	11:20:27 PM	PHl3 MFC set to  0.000000
5/29/2010	11:20:27 PM	SiCl4 MFC set to  0.000000
5/29/2010	11:20:27 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:20:27 PM	Tube furnace set to 1000
5/29/2010	11:40:27 PM	Helium valve closed
5/29/2010	11:40:27 PM	PH3 valve closed
5/29/2010	11:40:27 PM	Main Vac valve closed
5/29/2010	11:40:27 PM	Bypass valve closed
5/29/2010	11:40:27 PM	H2 valve opened
5/29/2010	11:40:27 PM	BCl3 valve opened
5/29/2010	11:40:27 PM	SiCl4 pre valve opened
5/29/2010	11:40:27 PM	SiCl4 post valve opened
5/29/2010	11:40:27 PM	Bubbler valve opened
5/29/2010	11:40:27 PM	Helium MFC set to  0.000000
5/29/2010	11:40:27 PM	H2 MFC set to  500.000000
5/29/2010	11:40:27 PM	BCl3 MFC set to  35.000000
5/29/2010	11:40:27 PM	PHl3 MFC set to  0.000000
5/29/2010	11:40:27 PM	SiCl4 MFC set to  50.000000
5/29/2010	11:40:27 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:40:27 PM	Tube furnace set to 1000
5/29/2010	11:52:27 PM	H2 valve closed
5/29/2010	11:52:27 PM	BCl3 valve closed
5/29/2010	11:52:27 PM	PH3 valve closed
5/29/2010	11:52:27 PM	SiCl4 pre valve closed
5/29/2010	11:52:27 PM	SiCl4 post valve closed
5/29/2010	11:52:27 PM	Main Vac valve closed
5/29/2010	11:52:27 PM	Bypass valve closed
5/29/2010	11:52:27 PM	Helium valve opened
5/29/2010	11:52:27 PM	Bubbler valve opened
5/29/2010	11:52:27 PM	Helium MFC set to  500.000000
5/29/2010	11:52:27 PM	H2 MFC set to  0.000000
5/29/2010	11:52:27 PM	BCl3 MFC set to  0.000000
5/29/2010	11:52:27 PM	PHl3 MFC set to  0.000000
5/29/2010	11:52:27 PM	SiCl4 MFC set to  0.000000
5/29/2010	11:52:27 PM	Bypass solenoid MFC set to  0.000000
5/29/2010	11:52:27 PM	Tube furnace set to 0
